JPS59162465A - Tester - Google Patents

Abstract

PURPOSE:To maintain a normal low temperature test environment by storing a non-conductive antifreeze liquid into a low temperature tank. CONSTITUTION:A non-conductive antifreeze liquid 2 never solidifying even under a very low temperature is stored into a low temperature tank 1 and cooled down to a very low temperature with a freezer 3 arranged in parallel therewith. An IC13 to be tested is carried in plurality as inserted into a terminal board 12 and with the door 4 of the low temperature tank 1 left open, the board 12 is inserted into a socket 11 of a connector 9 to connect the IC13 electrically to a specified tester. But as the connector 9 is submerged into the antifreeze liquid 2, there is no dew formation in the socket 11 or the like. Thus, a normal testable condition can be maintained.

Description

[Detailed Description of the Invention] [Technical Field] The present invention relates to a test technique for performing an operation test in a low-temperature atmosphere, and in particular, a test technique that is effective when used to test the operation of a semiconductor device in a low-temperature atmosphere. Regarding.

[Background technology] For example, integrated circuits (IC) and large-scale integrated circuits (LSI)
), etc., are sometimes subjected to low-temperature operation tests to confirm that they perform as expected even in low-temperature atmospheres.

When performing such low-temperature operation tests, test equipment is used. It is conceivable that a connector be provided for connection to a tester for carrying out the test.

However, in such test equipment, if the door of the cryostat is opened or closed at temperatures below -10°C, steam from the atmosphere will enter the tank and cause condensation on connector plugs and sockets, making it impossible to perform normal tests. The inventor has found that a problem arises in that it is not possible to perform the following steps.

[Object of the Invention] An object of the present invention is to solve the above-mentioned problems and provide a test device that can always perform normal low-temperature operation tests.

The above and other objects and novel features of the present invention will become apparent from the description of this specification and the accompanying drawings.

[Summary of the Invention] A brief overview of typical inventions disclosed in this application is as follows.

That is, by storing a non-conductive antifreeze in a low temperature chamber, dew condensation on connectors, etc. is prevented and a normal test is ensured.

[Example] The present invention will be described below according to an example shown in the drawings.

The figure is a partially cutaway front view showing an embodiment of the testing device according to the present invention.

In this embodiment, this low temperature operation test device is equipped with a low temperature chamber 1, in which a cryogenic temperature (for example, -6
Non-conductive antifreeze that does not solidify even at temperatures around 0℃ and is not electrically conductive (e.g., liquids whose main component is fluorocarbons)
2 are stored.

The inside of the cryostat 1 is configured to be cooled to an extremely low temperature by a refrigerator 3 (details of the internal structure etc. are omitted) installed in parallel thereto, and the cryostat 1 has an adiabatic structure (not shown). ) is configured.

The top surface of the cryostat 1 is covered with a door 4 that can be opened and closed freely.
This door 4 is constructed so that a highly sealed state can be maintained by a clamper 5. A perforated plate 6 is installed in the low-temperature tank 1 to partition the inside of the tank into left and right sides, and a stirring blade 7 as a stirring member is installed in one partition in the tank so as to be submerged in the antifreeze liquid 2. The blades 7 are configured to be rotationally driven by a motor 8 installed outside the tank.

At the bottom of the other partition in tank 1, there are multiple (only one is shown)
A connector 9 is installed submerged in the antifreeze liquid 2, and this connector 9 is connected by a conductive wire 10 to various characteristic testers (not shown) installed outside the tank. Further, the connector 9 is provided with a plurality of sockets 11, and the sockets 11 are configured so that a terminal board 12 can be inserted thereinto for electrical connection. Terminal board 12
is a semiconductor device (hereinafter referred to as IC) as a test object.

) 13 are inserted.

Next, the method of use and effect will be explained.

A plurality of ICl3s to be tested are inserted and mounted on the terminal board 12.

The door 4 of the cryostat 1 is opened, and the terminal board 12 loaded with the RC is inserted into the socket 11 of the connector 9.
With this insertion, each ICl3 has board 12, socket 1
1. Connector 9 is electrically connected to a predetermined tester via conductor 10.

By the way, if the inside of the cryogenic chamber is in a gas phase, the atmosphere may enter the chamber when the door 4 is opened, and the water vapor in the atmosphere may be cooled and condense on connector sockets and the like. This dew condensation damages the electrical insulation of connector sockets and the like, causing errors in electrical characteristic tests performed by various testers, making it impossible to conduct normal tests.

However, in the test apparatus according to the above configuration, the cryostat 1
Since a non-conductive antifreeze liquid 2 is stored in and the connector 9 is immersed in this liquid, there is no possibility of dew condensation occurring on the socket or the like. Therefore, a normal testable state is always maintained.

When the attachment of the terminal board 12 to the connector 9 is completed, the door 4 is sealed by the clamper 5, and the inside of the tank 1 is maintained at a predetermined test temperature by the refrigerator 3.

At this time, the non-conductive antifreeze liquid 2 is stirred by the stirring blade 7, and the temperature distribution of the antifreeze liquid 2 is maintained uniform over the metal bodies in the tank. Therefore, all ICl3 in tank 1 is placed under an equal and low temperature atmosphere.

The perforated plate 6 serves to prevent the stirring force of the stirring blade 7 from directly affecting the ICl 3 and the like.

Under such a predetermined low temperature atmosphere, each IC1, 3
A predetermined operation test by a tester is performed on the connector 9 through the board 12 and the like.

Effects] (1) By storing non-conductive antifreeze in a low temperature tank, it is possible to prevent outside air from entering the tank, and to avoid conduction failures in connectors, etc. due to dew condensation. and can always maintain a normal low-temperature test environment.

(2) By storing non-conductive antifreeze in the cryostat, it is possible to avoid the exchange of inside and outside air when the door is opened, so it is possible to suppress energy loss due to cold and hot dissipation when the door is opened. .

(3) By stirring the non-conductive antifreeze liquid, the temperature distribution can be made uniform, and an equal low-temperature test atmosphere can be created throughout the metal body in the tank.

゛Although the invention made by the present inventor has been specifically explained based on examples, the present invention is not limited to the above-mentioned examples (and may be modified in various ways without departing from the gist thereof). Needless to say.

For example, the number of perforated plates and stirring blades is not limited to one set;
It is also possible to omit it. Furthermore, there are no particular limitations on the structure or quantity of the cryostat, connectors, etc.

[Field of Application] In the above nine explanations, the invention made by the present inventor has mainly been explained in the case where it is applied to the field of application which is the background of the invention, which is a low-temperature operation test equipment for semiconductor devices, but the present invention is not limited thereto. For example, it can also be applied to low-temperature operation test equipment for other electrical components.

[Brief explanation of drawings]

The figure is a partially cutaway front view showing one embodiment of the present invention. 1... Low temperature tank, 2... Non-conductive antifreeze, 3... Freezer, 4... Door, 6... Perforated plate, 7... Stirring member, 9... Connector, 10 ...Conductor, 11...Socket, 12...Terminal board, I3...IC (
test object).

Claims (1)

[Scope of Claims] (1) A test device for carrying out a test in a low temperature atmosphere by placing a test object in a low temperature chamber, characterized in that a non-conductive antifreeze liquid is stored in the low temperature chamber. 2. The test device according to claim 1, wherein the low temperature bath has a stirring member that stirs the non-conductive antifreeze to make the temperature distribution uniform.