JPS59161809A - Lead-frame transfer equipment - Google Patents

Abstract

PURPOSE:To perform highly accurate and quick adjustment to lead-frames which have different shape by a method wherein guide rails, which support and guide the lead-frames, are composed in such a manner that one of the two guide rails is reference and another is movable relative to the reference along the width direction of the lead-frames. CONSTITUTION:A stage 10 has an intermediate base board 13 which is supported on a main base board 11 by supporting plates 12. A pair of supporting plates 14, 15 are provided apart on the base board 13. Guide rails 2, 3 are fixed on the supporting plates 14, 15. Grooves 14a, 15a are provided to the part of the supporting plate 14, 15 where the rail 3 is fitted. The rail 3 is fitted in such a manner that it can be moved along the width direction of lead-frames 1 relatively to the rail 2 as reference. A feeding device 20, a delivery device 30, an intermittent feeding device 40, a stopping device 50 and a positioning device 60 are coupled to the rail 2 as a driving system. With this constitution, highly accurate and quick adjustment to the lead-frames which have different shape can be performed.

Description

DETAILED DESCRIPTION OF THE INVENTION [Technical Field of the Invention] The present invention relates to semiconductor manufacturing equipment, and more particularly to a lead frame transport device that transports and positions a lead frame during semiconductor chip mounting.

[Technical background of the invention and its problems] Generally, when mounting semiconductor chips, a lead frame on which leads corresponding to a plurality of chips are continuously formed is transferred and positioned at a predetermined pitch, and then mounted at a specific location. We perform die bonding, wire bonding, etc.

As shown in FIG. 1, the conventional lead frame transport device includes kite rails 2 that support each end of the lead frame 1 in the width direction and form a guide path for transporting the lead frame 1 in the longitudinal direction. and 3 are arranged in parallel, while the lead frame 1 is being transferred to a position A where die bonding or wire bonding is performed (hereinafter simply referred to as the bonding position). A feeding mechanism is provided in which the pawls 4 to 7 are arranged and driven by a cam or crank (not shown).

In this case, grooves and holes of various shapes are formed in the lead frame 1, and when transferring the square hole 1a formed at one end in the width direction, a square hole 1a formed at the other end in the width direction is used for positioning. The formed round holes 1b are used respectively.

Therefore, the tips of the feed claws 4 to 7 each have a square hole 1a.
Pieces 4a to 7a that engage with each other are attached.

Further, a positioning mechanism is provided near the bonding position A, and the positioning pin 9 is inserted into the round hole 1b for accurate positioning.

In such a conventional lead frame conveying device, the grading position RA is usually fixed, and in order to stop the grading portion of the lead frame 1 at this position, for example, it is necessary to adjust the width, pitch, hole shape, length, etc. For lead frames that are
7a, the position of the positioning mechanism, the positioning bin 9, etc. must be changed or replaced.

In this case, since the feeding mechanism, positioning mechanism, and bonding device (not shown) each have a drive system, it takes a lot of time to adjust and replace parts every time the type of lead frame changes, which only reduces the operating rate. However, imperfections in the adjustment may be discovered for the first time during a trial run, which has the disadvantage of lowering product yield.

[Purpose of the invention]

The present invention has been made in order to eliminate the above-mentioned drawbacks of the conventional devices, and an object of the present invention is to provide a lead frame conveying device that enables highly accurate and rapid adjustment of lead frames of different shapes.

[Summary of the invention]

To achieve this object, the present invention provides a pair of kite rails each supporting the widthwise ends of a lead frame and forming a guide path for longitudinally transporting the lead frame; A lead frame transport device comprising a plurality of drive systems for transporting and positioning the lead frame at predetermined pitches along the lead frame,
The present invention is characterized in that the other guide rail is configured to be movable relative to one of the kite rails in the width direction of the lead frame.

[Embodiments of the invention]

Hereinafter, one embodiment of the present invention will be described with reference to the accompanying drawings.

FIG. 2 is a plan view of a lead frame conveying device according to the present invention, and FIG. 3 is a side view thereof, in which the same reference numerals as in FIG. 1 indicate the same elements.

This lead frame transport device is mainly used for Kiterail 2
．． 3 and a mount 10 for fixing each of the following drive systems, a loading device that feeds the lead frame before bonding along the guide rail 2.3, and sends the lead frame after bonding to the next processing step. The intermittent feeding device 40, whose stroke can be arbitrarily adjusted, transports the lead frame fed by the loading device (with the adjusted stroke) and the leading end of the lead frame when loading the lead frame. It consists of a stop device that stops the machine at a fixed position, and a turret-type positioning device mark that performs positioning during loading.

Here, the pedestal section 10 has an intermediate substrate 13 connected to the main substrate 11 by a support plate 12, and furthermore, a pair of support plates 14 and 15 are arranged apart from each other on this intermediate substrate 13. A kite rail 2.3 is fixed on the support plates 14 and 15. Note that grooves 14a and 15a are provided in the parts of the support plates 14 and 15 to which the guide rail 3 is attached, respectively, so that the guide rail 3 can be moved relative to the width direction of the lead frame 1 with the guide rail 2 as a reference. It has become.

Next, the carrying-in device has a roller at the shaft end of a pair of roll support parts 21, a driving roll mechanism connected to the electric root blade via a belt tracker, and a roll support part formed in a U-shape. Rollers 5 that press the side edges of the lead frame 1 together with the roller ρ are attached to both ends, respectively.
And a cylinder 21- for opening and closing the roll gap.
It is composed of a driven roll mechanism and a driven roll mechanism.

Similarly, the unloading device 30 also has rollers 32 at the shaft ends of a pair of roll supports 31, a driving roll mechanism connected to an electric motor 33 via a belt, and a U-shaped roll. Rows 235 that press the side ends of the lead frame 1 together with the rollers 32 are attached to both ends of the support section 340, and each roller 340 is constructed of a driven roll mechanism having a cylinder 36 for opening and closing the gap between the rolls. There is.

Next, the intermittent feeding device 40 has a fixed claw 41 and a cylinder 4.
A pair of chuck mechanisms 44 that clamp the side ends of the lead frame 1 from both sides with movable claws 42 whose relative spacing can be changed by 3 are attached in the axial direction of the slide shafts 45 arranged parallel to the guide rails 2, respectively. Furthermore, this slide shaft 45 is connected via an arm 46 to a nut 47 that is screwed into the screw shaft, and by rotating the screw shaft 48 with an electric motor 49, the chuck mechanism is activated. 44 is configured to make a stroke movement in the direction along the guide rail 2.

Next, a stopper 51 is placed on the L/2 side and in the middle part in the longitudinal direction of the stopper, and is brought into contact with the leading end when the lead frame 1 is carried in, and a stopper 51 is used for transporting and positioning the lead frame 1. At times, the stopper 51 is provided with a cylinder 52 that releases the stopper 51.

Further, the positioning device 60 is provided at the bonding position,
The device itself has a plurality of positioning pins 61 arranged in a turret shape, and the tip thereof is inserted into the hole of the lead frame 1 by selecting an appropriate one corresponding to the change in the hole shape and position of the lead frame 1. be. Other components include a heater block 62, a frame holder (not shown), and the like.

On the other hand, the above-mentioned 100 pedestals & IJ and intermediate board 1
3, a shaft 18 parallel to the guide rail 2.3 passes through the support plate 12 and is rotatably supported, and the lead frame of this shaft is carried in (a sensor group J6 is attached to the end of 1111, A cam group 17 is attached to the axially intermediate portion corresponding to the positioning device (a), and an electric motor 19 is further provided at the end of this shaft on the lead frame delivery side.
The cam group 17 operates the positioning device 60 via a connecting member (not shown).

In addition, near the stop device
-)' A sensor 71 that detects the tip of the frame 1;
A sensor 72 detects that the rear end of the lead frame 1 that is being transferred at a predetermined pitch has passed.
They are arranged in parallel in the direction of transport of the lead frame l.

Incidentally, all drive systems including electric motors or cylinders such as the intermittent feeding device 40, the stopping device, and the positioning device (a) described above are arranged centrally on the guide rail 2 side.

What is the effect of the lead frame conveying device configured as above?
This will be explained below.

First, since the drive system including the electric motor or cylinder is fixed integrally with the guide rail 2, if the width of the lead frame 1 changes, the kite rail 3, which can change the mounting position f at any time, can be adjusted. to form a guide path commensurate with the width of the lead frame. When the lead frame 1 is fed at the stage where this adjustment is completed, it is bitten by the roller B constituting the carry-in device side and separately, moves toward the grading position A, and its tip abuts against the stopper. At this time, the sensor 71 detects the lead frame 1, and the cylinder 26 is placed on the side that widens the gap between the rollers n and 2.
Activate it. Therefore, the lead frame 1 stops in contact with the stone ξ51.

In this state, when the electric motor 19 is driven, the positioning device ω is released by the cam group 17, and then the cylinder 43 that constitutes the intermittent feed device 40 is actuated by the sensor group 16, and the fixed pawl 41 and the movable pawl 42 are activated. While holding the lead frame 1, the cylinder 52 constituting the stop device 50 is operated to release the stopper 51, and when the electric motor 49 of the intermittent feed device is driven, the lead frame 1 is transferred at a predetermined stroke. Ru. Of course, when this transfer is completed, the cylinder 43 is returned and the lead frame 1 is released, but the cam group 17 driven approximately in synchronization with this actuates the positioning device 60 to move the positioning bin 61 to the lead frame. Insert it into hole 1.

In this way, the transfer and positioning of the lead frame is completed.
Bonding work is performed at bonding level tρA.

Further, during the bonding operation, the intermittent feeding device 40 is later tightened to the illustrated state.

Next, after performing the bonding work, the electric motor 19)
When the lead frame 1 is driven, the positioning bin 61 is lowered, the intermittent feeding device is synchronized, and the transfer operation, positioning operation, and bonding operation of the lead frame 1 are sequentially repeated.

Next, the sensor 72 detects the passage of the tail end of the lead frame 1, and a series of bonding operations are performed.
At the completed stage, this lead frame 1 is sent to the next process by an unloading device, while a new lead frame 1 is sent by a loading device.

Figure 4 shows the position of the stone-socket 51 and the lndeng position A.
This shows the relationship between the pitch of the lead frame and the stroke of the intermittent feeder 4o.The pitch Pl of the lead frame, the dimension from its tip to the point where it is first bonded (hereinafter referred to as the end face dimension) are P2, and the stone diameter is P1. Assuming that the distance from the bonding position A is L (constant), the lead frame in contact with the stone ξ1 needs to be moved by L+P2.

On the other hand, these values P4. P2 and L' are equipped with four numerical values, and when these values are changed when the type of lead frame is changed, the intermittent feeder 4 degrees is changed every time a new lead frame 1 arrives. is configured so that the transfer operation with a stroke of (L+P2)/2 is repeated twice, and then the transfer operation with a stroke of P is repeated, and rapid forwarding is performed when holding the lead frame 1 and moving forward. There is.

In this way, even when bonding different types of lead frames, all you need to do is change the mounting position of the guide rail 3 according to the width of the lead frame, and input numerical values such as pitch P and end face dimension P2. As a result, adjustment time is significantly shortened, and appropriate loading, transporting, positioning, and unloading operations are performed in accordance with the type of lead frame.

In the above two embodiments, a turret-type positioning device is used to insert the positioning pin 61 into a matching hole in order to avoid cumulative errors when the lead frame is intermittently fed. If the number of frames to be scanned is small, this positioning device may be removed (or alternatively, an optical position detection device may be used instead of this positioning device to control the feed amount and handle a large number of frames). Even when the leads are formed in series, it is possible to construct a conveying device that does not use any holes or grooves in the lead frame.

In addition, in the above embodiment, the lead frame is fed in 72 times while it is in contact with the stone e51.
If an intermittent feeding device with a wide stroke adjustment range is used, it is of course possible to reach the landing position A with one feeding operation, or to move the kite rail 3 by an external command.

〔Effect of the invention〕

As is clear from the above explanation 1, according to the lead frame conveying device of the present invention, one of the pair of kite rails for supporting and guiding the lead frame is used as a reference, and the other is relative to the width direction of the lead frame. Since it has a structure that can be moved automatically, it is possible to integrally fix the reference guide rail and multiple drive systems, and in addition, by simply moving the other kite rail to match the width of the lead frame, Since the adjustment work can be completed quickly and with high precision for different types of lead frames, an excellent effect can be obtained in that productivity and product yield can be greatly improved.

[Brief explanation of the drawing]

FIG. 1 is a plan view showing the structure of a conventional lead frame transfer device, FIG. 2 is a plan view showing the structure of an embodiment of the lead frame transfer device according to the present invention, and FIG. 3 is a plan view showing the structure of the same embodiment. The side view shown in FIG. 4 is a plan view showing the positional relationship of the main parts in order to explain the operation of the same embodiment. 1...Lead frame, 2.3...Kite rail,
4 to 7... Feed claw, 1o... Frame section, Processing... Loading device, Processing... Carrying out device, 40... Intermittent feeding device, Seki... Stopping device, (A)...・Positioning device. Applicant's agent Kiyoshi Inomata

Claims (1)

[Scope of Claims] 1. A pair of kite rails each supporting the widthwise ends of the lead frame and forming a guide path for transporting the lead frame in the longitudinal direction; In a lead frame transport device comprising a plurality of drive systems that transport and position the lead frame at predetermined pitches, one of the guide rails is used as a reference, and the other of the kite rails is set in the width direction of the lead frame. A lead frame conveying device characterized in that it is configured to be movable relative to the lead frame. 2. The lead frame conveying device according to claim 1, wherein the drive system is integrally fixed to the one guide rail serving as a reference with respect to the width direction of the lead frame.