JPS59155733U - Mound removal device - Google Patents

Mound removal device

Info

Publication number
JPS59155733U
JPS59155733U JP4976283U JP4976283U JPS59155733U JP S59155733 U JPS59155733 U JP S59155733U JP 4976283 U JP4976283 U JP 4976283U JP 4976283 U JP4976283 U JP 4976283U JP S59155733 U JPS59155733 U JP S59155733U
Authority
JP
Japan
Prior art keywords
mound
removal device
flat plate
holder
hard flat
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP4976283U
Other languages
Japanese (ja)
Inventor
井口　順二
Original Assignee
日本電気株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 日本電気株式会社 filed Critical 日本電気株式会社
Priority to JP4976283U priority Critical patent/JPS59155733U/en
Publication of JPS59155733U publication Critical patent/JPS59155733U/en
Pending legal-status Critical Current

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  • Crystals, And After-Treatments Of Crystals (AREA)

Abstract

(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.

Description

【図面の簡単な説明】[Brief explanation of the drawing]

第１図は従来のマウンド除去装置および被処理半導体ウ
ェーハの側面図、第２図ａ、　　ｂ、　　ｃは本考案の
一実施例のマウンド除去装置における、半導体ウェーハ
を硬質平板に押し付ける前、押し付けている時、離した
ときのそれぞれの状態を示す断面図である。 １．１１・・・硬質平板、１ａ・・・貫通孔、２．１２
・・・硬質平板ホルダ、２ａ、１３・・・真空吸着溝、
２６・・・窒素ガス流通路、３・・・半導体ウェーハ、
４・・・ウェーハ載置台、５・・・シリンダ、６・・・
Ｎ２・・・ガス、７・・・シリンダ上昇方向、８・・・
シリンダ下降方向。Figure 1 is a side view of a conventional mound removal apparatus and a semiconductor wafer to be processed, and Figures 2a, b, and c are views of a mound removal apparatus according to an embodiment of the present invention, before pressing the semiconductor wafer against a hard flat plate. FIG. 4 is a cross-sectional view showing the states when the device is in place and when it is released. 1.11...Hard flat plate, 1a...Through hole, 2.12
...Hard flat plate holder, 2a, 13...Vacuum suction groove,
26... Nitrogen gas flow path, 3... Semiconductor wafer,
4... Wafer mounting table, 5... Cylinder, 6...
N2...Gas, 7...Cylinder upward direction, 8...
Cylinder descending direction.

Claims (1)

【実用新案登録請求の範囲】[Scope of utility model registration request] エピタキシャル成長後の半導体ウェーハの前記エピタキ
シャル成長面をホルダに保持させた硬質平板に押しつけ
、前記成長面に成長したマウンドを押しつぶし除去する
マウンド除去装置において、前記硬質平板のほぼ中央附
近には、前記ホルダ内の流通路を通して送られるＮ２ガ
スの流出する貫通孔が設けられていることを特徴とする
マウンド除去装置。In a mound removal device that presses the epitaxial growth surface of a semiconductor wafer after epitaxial growth against a hard flat plate held in a holder, and crushes and removes the mound grown on the growth surface, a mound in the holder is placed near the center of the hard flat plate. A mound removal device characterized by being provided with a through hole through which N2 gas sent through a flow path flows out.
JP4976283U 1983-04-04 1983-04-04 Mound removal device Pending JPS59155733U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP4976283U JPS59155733U (en) 1983-04-04 1983-04-04 Mound removal device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4976283U JPS59155733U (en) 1983-04-04 1983-04-04 Mound removal device

Publications (1)

Publication Number Publication Date
JPS59155733U true JPS59155733U (en) 1984-10-19

Family

ID=30180252

Family Applications (1)

Application Number Title Priority Date Filing Date
JP4976283U Pending JPS59155733U (en) 1983-04-04 1983-04-04 Mound removal device

Country Status (1)

Country Link
JP (1) JPS59155733U (en)

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS54116881A (en) * 1978-03-02 1979-09-11 Nec Corp Surface processor for semiconductor wafer

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS54116881A (en) * 1978-03-02 1979-09-11 Nec Corp Surface processor for semiconductor wafer

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