JPS5915072Y2 - プラズマエツチング装置 - Google Patents

プラズマエツチング装置

Info

Publication number
JPS5915072Y2
JPS5915072Y2 JP1976049152U JP4915276U JPS5915072Y2 JP S5915072 Y2 JPS5915072 Y2 JP S5915072Y2 JP 1976049152 U JP1976049152 U JP 1976049152U JP 4915276 U JP4915276 U JP 4915276U JP S5915072 Y2 JPS5915072 Y2 JP S5915072Y2
Authority
JP
Japan
Prior art keywords
gas
reaction tube
etching
plasma etching
amount
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP1976049152U
Other languages
English (en)
Japanese (ja)
Other versions
JPS52140772U (enExample
Inventor
実 井上
潤一 甲斐
善彦 北原
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP1976049152U priority Critical patent/JPS5915072Y2/ja
Publication of JPS52140772U publication Critical patent/JPS52140772U/ja
Application granted granted Critical
Publication of JPS5915072Y2 publication Critical patent/JPS5915072Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • ing And Chemical Polishing (AREA)
  • Drying Of Semiconductors (AREA)
JP1976049152U 1976-04-19 1976-04-19 プラズマエツチング装置 Expired JPS5915072Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1976049152U JPS5915072Y2 (ja) 1976-04-19 1976-04-19 プラズマエツチング装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1976049152U JPS5915072Y2 (ja) 1976-04-19 1976-04-19 プラズマエツチング装置

Publications (2)

Publication Number Publication Date
JPS52140772U JPS52140772U (enExample) 1977-10-25
JPS5915072Y2 true JPS5915072Y2 (ja) 1984-05-04

Family

ID=28508343

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1976049152U Expired JPS5915072Y2 (ja) 1976-04-19 1976-04-19 プラズマエツチング装置

Country Status (1)

Country Link
JP (1) JPS5915072Y2 (enExample)

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4944517U (enExample) * 1972-07-21 1974-04-19
JPS5333240B2 (enExample) * 1973-06-01 1978-09-13

Also Published As

Publication number Publication date
JPS52140772U (enExample) 1977-10-25

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