JPS59150329A - スル−ホ−ル検査装置 - Google Patents

スル−ホ−ル検査装置

Info

Publication number
JPS59150329A
JPS59150329A JP1139683A JP1139683A JPS59150329A JP S59150329 A JPS59150329 A JP S59150329A JP 1139683 A JP1139683 A JP 1139683A JP 1139683 A JP1139683 A JP 1139683A JP S59150329 A JPS59150329 A JP S59150329A
Authority
JP
Japan
Prior art keywords
hole
light
printed board
hole inspection
illumination means
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP1139683A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0332732B2 (enrdf_load_stackoverflow
Inventor
Moritoshi Ando
護俊 安藤
Kikuo Mita
三田　喜久夫
Giichi Kakigi
柿木　義一
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP1139683A priority Critical patent/JPS59150329A/ja
Priority to US06/554,543 priority patent/US4560273A/en
Priority to DE8383307291T priority patent/DE3377527D1/de
Priority to EP83307291A priority patent/EP0111404B1/en
Publication of JPS59150329A publication Critical patent/JPS59150329A/ja
Publication of JPH0332732B2 publication Critical patent/JPH0332732B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
    • G01N21/956—Inspecting patterns on the surface of objects
    • G01N21/95692—Patterns showing hole parts, e.g. honeycomb filtering structures

Landscapes

  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
JP1139683A 1982-11-30 1983-01-28 スル−ホ−ル検査装置 Granted JPS59150329A (ja)

Priority Applications (4)

Application Number Priority Date Filing Date Title
JP1139683A JPS59150329A (ja) 1983-01-28 1983-01-28 スル−ホ−ル検査装置
US06/554,543 US4560273A (en) 1982-11-30 1983-11-23 Method and apparatus for inspecting plated through holes in printed circuit boards
DE8383307291T DE3377527D1 (en) 1982-11-30 1983-11-30 Method and apparatus for inspecting plated through holes in printed circuit boards
EP83307291A EP0111404B1 (en) 1982-11-30 1983-11-30 Method and apparatus for inspecting plated through holes in printed circuit boards

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1139683A JPS59150329A (ja) 1983-01-28 1983-01-28 スル−ホ−ル検査装置

Publications (2)

Publication Number Publication Date
JPS59150329A true JPS59150329A (ja) 1984-08-28
JPH0332732B2 JPH0332732B2 (enrdf_load_stackoverflow) 1991-05-14

Family

ID=11776847

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1139683A Granted JPS59150329A (ja) 1982-11-30 1983-01-28 スル−ホ−ル検査装置

Country Status (1)

Country Link
JP (1) JPS59150329A (enrdf_load_stackoverflow)

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5920840A (ja) * 1982-07-28 1984-02-02 Fujitsu Ltd 欠陥検査装置

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5920840A (ja) * 1982-07-28 1984-02-02 Fujitsu Ltd 欠陥検査装置

Also Published As

Publication number Publication date
JPH0332732B2 (enrdf_load_stackoverflow) 1991-05-14

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