JPS59150081A - Amorphous magnetic material provided with high hardness insulating coating and its manufacture - Google Patents

Abstract

PURPOSE:To manufacture the titled material with a small iron loss, superior wear and corrosion resistances by forming a coating of an oxide of Ti, Zr, Cr, Al or Si or the nitride of Al or Si on the surface of an amorphous magnetic material in an atmosphere of a specified gas under reduced pressure. CONSTITUTION:An amorphous magnetic material is put in an atmosphere of an inert gas such as Ar, Ne or He, an active gas such as N2, O2 or H2, or a gaseous mixture contg. one or more kinds of active or inert gases under 2.5X10<-4>- 5X10<-3>Torr pressure. One or more kinds of compounds selected among the oxides of Ti, Zr, Cr, Al and Si and the nitrides of Al and Si are vapor-deposited on the surface of the amorphous magnetic material to form a coating of about 100Angstrom -3.7mum thickness.

Description

[Detailed description of the invention] The present invention relates to an amorphous magnetic material with a high hardness insulating film.

The present invention relates to a manufacturing method thereof.

As is well known, amorphous magnetic materials (including microcrystalline magnetic materials)
Because it has high mechanical strength and high magnetic permeability, it can be used as a high permeability material to replace conventional silicon steel sheets and permalloy, or as a magnetic bubble material or magnetic memory material used in computers and electronic devices. It is starting to be used.

However, when used as a high magnetic permeability material, thin plate-like amorphous materials are stacked in layers, so in the high frequency region there are problems with increased iron loss due to interlayer resistance and corrosion resistance.

Furthermore, when used as the latter material, in addition to these problems, there is also a problem of poor characteristics due to wear and tear.

Therefore, the present invention aims to provide an amorphous magnetic material free from these drawbacks and a method for producing the same. This is what we are trying to provide.

That is, the first invention has Ti and Zr on the surface of the amorphous magnetic material.
, Cr, AA, Si oxide or AA, 8j nitrogen f
One or more types of skin and axilla 100A to 3.
The metal film is formed to have a thickness of 7 μm, and the second invention uses argon,
Inert gases such as neon and helium.

or 2,5 X 10-'Torr~5 consisting of an active gas such as nitrogen, oxygen, hydrogen, or a mixed gas containing one or more types of active gas or inert gas.
x Deposition in a gas atmosphere of 10-3 Torr? This is a unique manufacturing method.

The amorphous magnetic material according to the first invention not only has low core loss in the high frequency range and has excellent wear resistance, but also has a chemically stable film, so there is no problem of corrosion. .

Further, according to the second invention, there is provided an amorphous magnetic material with low iron loss and wear resistance and corrosion resistance.

The implementation steps of the present invention will be explained below.

First, Ti and Zr were deposited on the surface of an amorphous magnetic plate with a thickness of 30 μm.
, Or, AA, Si or UAA, St
One or more types of nitrogen atomizers are deposited to a thickness as shown in Table 1? Prepared, each with an inner diameter of 11 mm and an outer diameter of 2
A ring-shaped piece of 4 snares was made, and 10 pieces of the same type were stacked and wound into a syllable, and the iron loss sound was measured at a frequency of IKHz and a magnetic flux density of 10KG.

The results are as shown in Table 1.The results are as shown in Table 1.

As can be seen from this result, the thickness is 1 regardless of the type of film.
From 00A to 3.7 μm thick coating, the iron loss is smaller than that without coating.

Although the film is thin, it is not a continuous and uniform film, so there are short circuits between the layers and iron loss is not reduced.

On the other hand, if it is too thick, the space will increase, leading to an increase in iron loss.

The implementation of the invention in part 1 regarding the thickness of the film has been described above, and next, embodiment V of the second invention regarding the method for manufacturing the same will be explained in detail.

Figure 2 is a film? This shows an electron beam vacuum evaporation apparatus for forming a vacuum chamber 1 with an exhaust port 2 t''L,
, V) The inside of the tank is set to 10-5 Tor by a vacuum pump (not shown).
It is configured to exhaust air so that the temperature becomes r. 3,3
7 is a supporting stand fixed to the tank wall, and is provided with a roll 5 having four amorphous magnetic plates wound thereon, and a take-up roll 6. 7 is a shutter, and 8 is a support stand provided in the tank. An evaporative substance 9 is charged in the hearth. 10 is an electron beam gun, and 11 is a gas inlet.

Vacuum chamber 1 of the electron beam vacuum evaporation apparatus configured in this way
The gas and coating materials shown in Table 2 were used in the tank, and the gas pressure was 2 x 10-'Torr and 3 x 10'T.
orr, 4.6 x 10-3 Torr, 5.
Four types of 3 x 10-3 Torr were selected and each film material was deposited on the surface to make an amorphous magnetic plate, and then, as in the case of the previous example, the inner diameter was 1 nm and the outer diameter was 24 nm.
nm ring-shaped piece? After stamping and annealing for strain relief 1
Winding syllables with 0 sheets stacked, frequency 1 ) G (z
, Iron loss at magnetic flux density 10KG? It was measured.

The measurement results are shown in Figure 2, but to make it easier to understand, aluminum (AA203) was selected as the coating material, and nitrogen gas was used as the active gas. Use.

Figure 3 shows the variation of iron loss when the gas pressure is changed.

As can be seen from this second coat and Figure 3, regardless of the type of gas or film, the
It was found that the core loss of the material deposited in the pressure range of orr is equal to the theoretical value assuming that the total interlayer resistance is infinite.

Regarding the effect of gas pressure, as the gas pressure becomes flat, the adhesion of the film becomes weaker, so the effect of stress on iron loss becomes smaller.At 5X10-3 Torr or more, iron loss increases sharply, and when there is no film, The reason why it is the same as in the case is because the adhesion force becomes too small and the film peels off.

From the above results, if the film is coated using the method specified above, there will be no problems with magnetic properties due to a decrease in interlayer resistance (considering the chemical stability of these films). , corrosion resistance can also be improved.

Incidentally, although only an example of a vacuum evaporation method has been shown here, it goes without saying that the present invention can be applied to other film forming methods that utilize the same vacuum system.

[Brief explanation of the drawing]

Fig. 1 is a diagram showing the relationship between film thickness and iron loss in an embodiment of the present invention, and Fig. 2 is an embodiment of the manufacturing equipment? The cross-sectional view shown in FIG. 3 shows the relationship between production gas pressure and iron loss in the embodiment of the present invention. FIG. 1... Vacuum chamber, 2... Exhaust port, 3... Support stand, 4
... Amorphous magnetic plate, 5... Roll, 6... Winding roll, 7... Shutter, -18... Hearth, 9...
・・I intervention 'J+t, 1'0...Electron beam gun,
11...Gas inlet. 5th Oka pressure (io” Torr,) 1st Enza 4 (/A territory)

Claims (2)

[Claims] (1) Bottom surface K Ti , Zr, Or, AA, Si oxide or AA, Si nitride one or more types of coating kloOA to 3.7 μm thick. Amorphous magnetic material with hard insulating film. (2) Consisting of an inert gas such as argon, neon, or helium, or an active gas such as nitrogen, acid, or water, or a mixed gas containing one or more of the active gas or inert gas. 1 (1"4To'
Amorphous magnetic materials are placed in a gas atmosphere of rr ~ 5 x 1.0-3 Torr, and Ti, Zr. Or, AA, St acid f arsenate or AA, Si
Nitride? One or more types? Does it evaporate and form a film on the surface of the amorphous magnetic material? To form? A method for producing an amorphous magnetic plate with a high-hardness insulating film.