JPS6320449A - Titanium plated steel sheet having excellent heat resistance - Google Patents
Titanium plated steel sheet having excellent heat resistanceInfo
- Publication number
- JPS6320449A JPS6320449A JP16475386A JP16475386A JPS6320449A JP S6320449 A JPS6320449 A JP S6320449A JP 16475386 A JP16475386 A JP 16475386A JP 16475386 A JP16475386 A JP 16475386A JP S6320449 A JPS6320449 A JP S6320449A
- Authority
- JP
- Japan
- Prior art keywords
- titanium
- steel sheet
- plated steel
- layer
- film
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 229910000831 Steel Inorganic materials 0.000 title claims abstract description 30
- 239000010959 steel Substances 0.000 title claims abstract description 30
- 239000010936 titanium Substances 0.000 title claims description 17
- 229910052719 titanium Inorganic materials 0.000 title claims description 17
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 title claims description 16
- 238000007747 plating Methods 0.000 claims abstract description 15
- 238000007738 vacuum evaporation Methods 0.000 claims description 5
- PMHQVHHXPFUNSP-UHFFFAOYSA-M copper(1+);methylsulfanylmethane;bromide Chemical compound Br[Cu].CSC PMHQVHHXPFUNSP-UHFFFAOYSA-M 0.000 claims 1
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 abstract description 7
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 abstract description 7
- 238000001704 evaporation Methods 0.000 abstract description 7
- 230000008020 evaporation Effects 0.000 abstract description 5
- 238000010884 ion-beam technique Methods 0.000 abstract description 5
- 238000009792 diffusion process Methods 0.000 abstract description 4
- 229910052742 iron Inorganic materials 0.000 abstract description 4
- 238000001771 vacuum deposition Methods 0.000 abstract description 4
- ATJFFYVFTNAWJD-UHFFFAOYSA-N Tin Chemical compound [Sn] ATJFFYVFTNAWJD-UHFFFAOYSA-N 0.000 abstract description 3
- 230000015572 biosynthetic process Effects 0.000 abstract description 3
- 229910052757 nitrogen Inorganic materials 0.000 abstract description 3
- 238000007740 vapor deposition Methods 0.000 abstract description 3
- 229910045601 alloy Inorganic materials 0.000 abstract description 2
- 239000000956 alloy Substances 0.000 abstract description 2
- 239000000463 material Substances 0.000 abstract description 2
- 229910002593 Fe-Ti Inorganic materials 0.000 abstract 1
- 150000002500 ions Chemical class 0.000 abstract 1
- NRTOMJZYCJJWKI-UHFFFAOYSA-N Titanium nitride Chemical compound [Ti]#N NRTOMJZYCJJWKI-UHFFFAOYSA-N 0.000 description 13
- 238000004519 manufacturing process Methods 0.000 description 4
- 239000011248 coating agent Substances 0.000 description 3
- 238000000576 coating method Methods 0.000 description 3
- 238000000921 elemental analysis Methods 0.000 description 3
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 2
- 229910001069 Ti alloy Inorganic materials 0.000 description 2
- 239000010949 copper Substances 0.000 description 2
- 229910052802 copper Inorganic materials 0.000 description 2
- 238000004453 electron probe microanalysis Methods 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 229910001335 Galvanized steel Inorganic materials 0.000 description 1
- 230000001133 acceleration Effects 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 239000010953 base metal Substances 0.000 description 1
- 238000005260 corrosion Methods 0.000 description 1
- 230000007797 corrosion Effects 0.000 description 1
- 238000000151 deposition Methods 0.000 description 1
- 230000008021 deposition Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 229910001873 dinitrogen Inorganic materials 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 229920001971 elastomer Polymers 0.000 description 1
- 239000000806 elastomer Substances 0.000 description 1
- 238000009713 electroplating Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 239000008397 galvanized steel Substances 0.000 description 1
- 230000002401 inhibitory effect Effects 0.000 description 1
- 239000011159 matrix material Substances 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 150000004767 nitrides Chemical class 0.000 description 1
Landscapes
- Physical Vapour Deposition (AREA)
Abstract
Description
【発明の詳細な説明】 く産業上の利用分野〉 本発明は耐熱性に優れたチタンめっき鋼板に関する。[Detailed description of the invention] Industrial application fields> The present invention relates to a titanium-plated steel sheet with excellent heat resistance.
く従来技術とその問題点〉
従来チタンめっき鋼板はチタンめっきの優れた性質にも
かかわらず、溶融めっきや電気めっきによる製造が困難
であるために、実用化に至っていない、しかし近年、真
空蒸着による製造法が検討され、実用化の機運が熟して
いる。しかし、このような蒸着によって製造されたチタ
ンめっき鋼板を高温で使用しようとすると、非常に脆い
F@−Ti合金の層が直ちに厚く形成されるために、加
工性、耐食性、表面外観などの性能が著しく阻害される
。Conventional technologies and their problems> Despite the excellent properties of titanium plating, conventional titanium-plated steel sheets have not been put into practical use because they are difficult to manufacture by hot-dip plating or electroplating. Manufacturing methods are being studied, and the opportunity for practical application is ripe. However, when titanium-plated steel sheets manufactured by such vapor deposition are used at high temperatures, a thick layer of extremely brittle F@-Ti alloy is immediately formed, resulting in poor performance such as workability, corrosion resistance, and surface appearance. is significantly inhibited.
く問題を解決する手段〉
本発明はこの問題に鑑み、真空蒸着でチタンめっき鋼板
を製造する際に、鋼板とめっき暦の間にチタンの窒化物
の層を形成することによって、めっき層のチタンと母材
の鉄との拡散を妨げてFe−T i合金層の形成を防止
するものである。In view of this problem, the present invention aims to reduce the amount of titanium in the plating layer by forming a layer of titanium nitride between the steel sheet and the plating layer when producing titanium-plated steel sheets by vacuum evaporation. This prevents the formation of a Fe--Ti alloy layer by inhibiting the diffusion of iron and base metal iron.
〈発明の構成〉
即ち、本発明によれば、鋼板の表面に1100nないし
1μmの厚さの窒化チタン層を有し、その上にチタンの
真空蒸着めっきを施してなる耐熱性に優れたチタンめっ
き鋼板が提供される。<Structure of the Invention> That is, according to the present invention, titanium plating with excellent heat resistance is obtained by having a titanium nitride layer with a thickness of 1100 nm to 1 μm on the surface of a steel plate, and applying vacuum evaporation plating of titanium thereon. Steel plate is provided.
本発明において、FeとTiの拡散を防止するためには
少くとも約100n■のTi N層が必要である。しか
し1μ腸を越えるとめっき鋼板の加工性が悪くなるので
、鋼板使用の面から見て100n層ないし1終鳳が妥当
である。In the present invention, a TiN layer of at least about 100 nm is required to prevent diffusion of Fe and Ti. However, if the thickness exceeds 1μ, the workability of the plated steel sheet deteriorates, so from the viewpoint of use of the steel sheet, 100n layers or 1 layer is appropriate.
真空蒸着めっき法でチタンめっき鋼板を製造する際に、
鋼板とめっ!!暦の間にチタンの窒化物層を形成するこ
とは、イオンビーム発生装置(イオン源装置)を使用す
れば、比較的容易に実施することができる。When manufacturing titanium-plated steel sheets using the vacuum evaporation plating method,
Steel plate tome! ! Forming a titanium nitride layer during the process can be performed relatively easily using an ion beam generator (ion source device).
〈発明の具体的開示〉
次に図面を参照し実施例により、本発明を具体的に説明
するが、これは同等本発明を限定するものではない。<Specific Disclosure of the Invention> Next, the present invention will be specifically explained by way of examples with reference to the drawings, but this is not intended to limit the present invention in the same way.
第1図は本発明のチタンめっき鋼板を製造する装置の概
念を示す断面図である。装置は真空にすることのできる
3個の真空室からなる。即ち、コイル装入室3、蒸着室
4、コイル取り出し室5である。コイルlは操業に先立
ってこの装入室に装填する。FIG. 1 is a sectional view showing the concept of an apparatus for manufacturing titanium-plated steel sheets of the present invention. The device consists of three vacuum chambers that can be evacuated. That is, a coil loading chamber 3, a vapor deposition chamber 4, and a coil unloading chamber 5. The coil I is loaded into this charging chamber prior to operation.
蒸着室4には、窒素イオンビーム発生装置6とチタン蒸
発槽7と電子銃8が設けられた窒化チタン層形成領域9
と、チタン蒸発槽7°と電子銃8′が設けられたチタン
蒸着領域10からなる。The deposition chamber 4 includes a titanium nitride layer forming region 9 in which a nitrogen ion beam generator 6, a titanium evaporation tank 7, and an electron gun 8 are provided.
, a titanium evaporation area 10 provided with a titanium evaporation tank 7° and an electron gun 8'.
次にコイルの装填は3室を大気圧下において行ってもよ
いが(操業の最初はそうする)、連続操業中は、エラス
トマー製のバルブ2で鋼帯lをはさんで締めて、コイル
装入室3のみを大気圧に戻し、次のコイルの鋼帯を前の
コイルの銅帯に溶接してからコイル装入室を減圧した後
、バルブを開くようにすれば効率がよい、蒸着済みのコ
イルを取り出す場合も同様にバルブ2′を締めて、コイ
ルを取り出し、室5のみを大気圧に戻すようにすればよ
い。Next, the coils may be loaded in the three chambers under atmospheric pressure (this is done at the beginning of the operation), but during continuous operation, the coils are loaded by tightening the steel strip l with the elastomer valve 2. It is efficient to return only the entrance chamber 3 to atmospheric pressure, weld the steel strip of the next coil to the copper strip of the previous coil, depressurize the coil charging chamber, and then open the valve. When taking out the coil, the valve 2' is similarly tightened, the coil is taken out, and only the chamber 5 is returned to atmospheric pressure.
さらに大規模に連続操業する場合は、特願昭59−19
2574に開示されているようなシールロール室装置で
もよい。For continuous operation on a larger scale, the patent application
2574 may be used.
窒素ガスのイオンビーム発生装置は、例えば、石川順三
著、アイオニックス社刊の「イオン源工学」等に詳細に
記載されている。。The nitrogen gas ion beam generator is described in detail in, for example, "Ion Source Engineering" written by Junzo Ishikawa and published by Ionics. .
真空室は10−’ 〜10−’ Torr程度に減圧さ
れ、窒素は前記の装置でイオン化せられて、同時にチタ
ン蒸発槽7で電子銃8などによって蒸発させられるチタ
ン蒸気を連行して鋼板表面に到達し、ここに窒化チタン
の被膜を形成する。被膜厚さの調節はラインスピードの
調節によって行うことができる。窒化チタンの被膜形成
を受けた銅帯は続いてチタン真空蒸着領域10へ進む、
ここではるつぼで加熱蒸発させられたチタン蒸気が窒化
チタン被膜上に蒸着させられる。イオンビーム発生装置
の操作は当業者に知られているが、イオン加速電圧40
kV、電流IA程度で実施するのが妥当である。The pressure in the vacuum chamber is reduced to about 10-' to 10-' Torr, nitrogen is ionized in the above-mentioned device, and at the same time titanium vapor evaporated by an electron gun 8 or the like in the titanium evaporation tank 7 is entrained and deposited on the surface of the steel plate. A titanium nitride film is formed there. The coating thickness can be adjusted by adjusting the line speed. The copper strip that has been coated with titanium nitride then proceeds to a titanium vacuum deposition region 10.
Here, titanium vapor heated and evaporated in a crucible is deposited on the titanium nitride coating. Although the operation of ion beam generators is known to those skilled in the art, the ion acceleration voltage 40
It is appropriate to carry out the test at approximately kV and current IA.
このように蒸着を完了した鋼板は、巻き取りロールlO
に巻き取られる。上記のような操作によって取り出され
る。The steel plate that has been vapor-deposited in this way is rolled onto a take-up roll lO
is wound up. It is extracted by the operation described above.
次に300nmの厚さの窒化チタン層を施し、ついでチ
タンを10JL層の厚さに蒸着した試験片と窒化チタン
被膜を施さないで単純にチタン蒸着めっき(10gm
)を施した鋼板試片を800℃で3時間保持したものの
断面をEPMAによって元素分析した結果を第2図と第
3図に示す、窒化チタン層を有しない試片(第3図)で
は完全に合金化しているのに対し、窒化チタン層を有す
る試片(第2図)ではめっき層がチタンの状態を保持し
ていることがわかる。窒化チタン層の厚みを変えてアル
ミニウムを蒸着し、同様に800℃で3時間保持した場
合の合金層の厚さを測定した結果を第1表に示す。Next, a titanium nitride layer with a thickness of 300 nm was applied, and then titanium was deposited to a thickness of 10 JL on specimens and titanium evaporated plated (10 gm) without a titanium nitride coating.
Figures 2 and 3 show the results of elemental analysis by EPMA of a cross section of a steel plate specimen coated with a titanium nitride layer (Figure 3) held at 800°C for 3 hours. It can be seen that, on the other hand, in the sample having a titanium nitride layer (FIG. 2), the plating layer maintains its titanium state. Table 1 shows the results of measuring the thickness of the alloy layer when aluminum was vapor-deposited while changing the thickness of the titanium nitride layer and similarly held at 800° C. for 3 hours.
第1表
〈発明の効果〉
以上述べたように、本発明によれば、真空蒸着法によっ
て製造されるチタンめっき鋼板のめっき層と鋼板の間に
窒化チタンの層を設けることによりめっき層と母材の相
互拡散を防止することができるので、比較的高温におい
ても、めっき層そのものの性質と表面外観を維持したま
ま鋼板を使用することが可能となる。また、この窒化物
層の形成のための装置は、真空蒸着めっき装置の比較的
簡単な改変によって達成できる。Table 1 <Effects of the Invention> As described above, according to the present invention, by providing a layer of titanium nitride between the plating layer and the steel sheet of a titanium-plated steel sheet manufactured by a vacuum evaporation method, the plating layer and the matrix Since mutual diffusion of materials can be prevented, it is possible to use the steel sheet while maintaining the properties and surface appearance of the plating layer itself, even at relatively high temperatures. Moreover, the apparatus for forming this nitride layer can be achieved by relatively simple modification of a vacuum evaporation plating apparatus.
【図面の簡単な説明】
第1図は本発明をめっき鋼板を製造するのに使用される
装置のa合図である。
第2図は未発1jのチタンめっき鋼板を800℃で3時
間保持した場合の断面のEPMAによる元素分析の結果
を示すグラフである。第3図は従来技術のチタンめっき
鋼板を同様に800℃で3時間保持した場合の断面のE
PMAによる元素分析の結果を示すグラフである。BRIEF DESCRIPTION OF THE DRAWINGS FIG. 1 is a schematic diagram of the apparatus used to produce galvanized steel sheets according to the present invention. FIG. 2 is a graph showing the results of elemental analysis by EPMA of a cross section of an unexploited titanium-plated steel plate held at 800° C. for 3 hours. Figure 3 shows the E of the cross section of a conventional titanium-plated steel sheet held at 800°C for 3 hours.
It is a graph showing the results of elemental analysis by PMA.
Claims (1)
ルミニウム層を有し、その上にチタンの真空蒸着めっき
を施してなる耐熱性に優れたチタンめっき鋼板。1. A titanium-plated steel sheet with excellent heat resistance, which has an aluminum nitride layer with a thickness of 100 nm to 1 μm on the surface of the steel sheet, and vacuum evaporation plating of titanium is applied thereon.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP61164753A JPH0759745B2 (en) | 1986-07-15 | 1986-07-15 | Titanium plated steel plate with excellent heat resistance |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP61164753A JPH0759745B2 (en) | 1986-07-15 | 1986-07-15 | Titanium plated steel plate with excellent heat resistance |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS6320449A true JPS6320449A (en) | 1988-01-28 |
JPH0759745B2 JPH0759745B2 (en) | 1995-06-28 |
Family
ID=15799263
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP61164753A Expired - Lifetime JPH0759745B2 (en) | 1986-07-15 | 1986-07-15 | Titanium plated steel plate with excellent heat resistance |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH0759745B2 (en) |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5798566A (en) * | 1996-01-11 | 1998-08-25 | Ngk Spark Plug Co., Ltd. | Ceramic IC package base and ceramic cover |
US6994917B2 (en) | 2003-01-15 | 2006-02-07 | Kabushiki Kaisha Toyota Jidoshokki | Composite material and method for manufacturing the same |
US7087316B2 (en) | 2002-09-06 | 2006-08-08 | Kabushiki Kaisha Toyota Jidoshokki | Low-expansion unit, method of manufacturing the same and semiconductor provided with the same |
Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5266835A (en) * | 1975-12-02 | 1977-06-02 | Mitsubishi Heavy Ind Ltd | Surface treating method of metals |
JPS5822374A (en) * | 1981-07-30 | 1983-02-09 | Mitsubishi Metal Corp | Surface coated high speed steel member |
JPS61163262A (en) * | 1985-01-14 | 1986-07-23 | Seiko Instr & Electronics Ltd | Golden color exterior parts |
-
1986
- 1986-07-15 JP JP61164753A patent/JPH0759745B2/en not_active Expired - Lifetime
Patent Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5266835A (en) * | 1975-12-02 | 1977-06-02 | Mitsubishi Heavy Ind Ltd | Surface treating method of metals |
JPS5822374A (en) * | 1981-07-30 | 1983-02-09 | Mitsubishi Metal Corp | Surface coated high speed steel member |
JPS61163262A (en) * | 1985-01-14 | 1986-07-23 | Seiko Instr & Electronics Ltd | Golden color exterior parts |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5798566A (en) * | 1996-01-11 | 1998-08-25 | Ngk Spark Plug Co., Ltd. | Ceramic IC package base and ceramic cover |
US7087316B2 (en) | 2002-09-06 | 2006-08-08 | Kabushiki Kaisha Toyota Jidoshokki | Low-expansion unit, method of manufacturing the same and semiconductor provided with the same |
US6994917B2 (en) | 2003-01-15 | 2006-02-07 | Kabushiki Kaisha Toyota Jidoshokki | Composite material and method for manufacturing the same |
Also Published As
Publication number | Publication date |
---|---|
JPH0759745B2 (en) | 1995-06-28 |
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