JPS59149633U - Adhesive plate for wafer fixation - Google Patents

Adhesive plate for wafer fixation

Info

Publication number
JPS59149633U
JPS59149633U JP4414883U JP4414883U JPS59149633U JP S59149633 U JPS59149633 U JP S59149633U JP 4414883 U JP4414883 U JP 4414883U JP 4414883 U JP4414883 U JP 4414883U JP S59149633 U JPS59149633 U JP S59149633U
Authority
JP
Japan
Prior art keywords
adhesive plate
wafer
wafer fixation
fixation
adhesive layer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP4414883U
Other languages
Japanese (ja)
Inventor
大溝　博志
横山　秀則
Original Assignee
日東電工株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 日東電工株式会社 filed Critical 日東電工株式会社
Priority to JP4414883U priority Critical patent/JPS59149633U/en
Publication of JPS59149633U publication Critical patent/JPS59149633U/en
Pending legal-status Critical Current

Links

Abstract

(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。(57) [Abstract] This bulletin contains application data before electronic filing, so abstract data is not recorded.

Description

【図面の簡単な説明】[Brief explanation of drawings]

図は本考案の実例を示す平面図である。 １・・・プラスチックフィルム、２・・・ウェハ固定用
接着層、３・・・治具貼着用接着層。The figure is a plan view showing an example of the present invention. DESCRIPTION OF SYMBOLS 1...Plastic film, 2...Adhesive layer for wafer fixing, 3...Adhesive layer for jig attachment.

Claims (1)

【実用新案登録請求の範囲】[Scope of utility model registration request] プラスチックフィルムの表面中央区域面にウェハ固定用
接着層を設けると共に、裏面周辺区域面に治具貼着用接
着層を設けてなるウェハ固定用接着板。An adhesive plate for fixing a wafer, which is formed by providing an adhesive layer for fixing a wafer on the central area of the front surface of a plastic film, and an adhesive layer for adhering a jig to the peripheral area of the back surface.
JP4414883U 1983-03-25 1983-03-25 Adhesive plate for wafer fixation Pending JPS59149633U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP4414883U JPS59149633U (en) 1983-03-25 1983-03-25 Adhesive plate for wafer fixation

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4414883U JPS59149633U (en) 1983-03-25 1983-03-25 Adhesive plate for wafer fixation

Publications (1)

Publication Number Publication Date
JPS59149633U true JPS59149633U (en) 1984-10-06

Family

ID=30174682

Family Applications (1)

Application Number Title Priority Date Filing Date
JP4414883U Pending JPS59149633U (en) 1983-03-25 1983-03-25 Adhesive plate for wafer fixation

Country Status (1)

Country Link
JP (1) JPS59149633U (en)

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