JPS59148179A - Production of magnetic head - Google Patents

Abstract

PURPOSE:To obtain a magnetic head which can coat properly the lubricant to a recording disk and absorb the lubricant by roughing the rail surface of a slider substrate with use of metallic crystal grains as a mask. CONSTITUTION:A metallic film of Al, etc. is vapor deposited on the rail surface of the projected ferrite of a slider substrate 1 which holds a magnetic head to form a aggregate of crystal garins 2. Then a plasma etching process is applied to the substrate with the prescribed reaction gas. Thus the grain boundary part of the grain 2 is etched to be changed into a crystal grain 2A. This grain 2A is used as a mask to etch the ferrite forming the rail surface by means of the prescribed reaction gas in order to eliminate the grain 2A. Thus a rough surface containing recess parts 3 is obtained for a head. Then a liquid lubricant 5 is filled into the recess 3. A proper amount of lubricant 5 is coated to a disk after the disk is heated by an air current produced by the high-speed revolutions of the disk. Then the lubricant 5 is absorbed into the recess 3 by the surface tension when the revolution of the disk is stopped. This prevents the adsorption of the lubricant to a disk for a head.

Description

[Detailed description of the invention] Toma =, i type a) Technical field of the invention The present invention provides good contact, start, and magnetic recording media with magnetic recording media.
A magnetic head with NuTop characteristics.

BACKGROUND OF THE INVENTION It is well known that magnetic heads are used to read information from a magnetic recording disk that stores recorded information, or to store recorded information on a recording disk.

(c) Prior art and problems The magnetic disk device used for reading and writing recorded information described above consists of a number of recording disks coated with the magnetic film described above, which are coaxially stacked and rotated. A magnetic head is installed between the disks at a predetermined distance, facing the disk by air pressure caused by the rotation of the disk, and this magnetic head reads and writes information stored on the disk. Is going.

When recording information using such a magnetic head, the disk is rotated with the magnetic head in contact with the recording disk, and by rotating the disk, the slider on which the magnetic head is mounted moves toward the recording disk. A predetermined interval is maintained between the rotating lidar of the disk, and information is recorded on the magnetic film on the recording disk by the leakage magnetic field generated in the gap between the magnetic cores at the bottom of the slider. Furthermore, when the operation of the apparatus is stopped, the rotation of the disc is stopped, and the slider is brought into contact with the disc without generating an air flow between the slider and the disc.

The method of reading and writing information using this method is contact I, start, stop (C8S).
Although this C8S method is a simple method,
Since the magnetic head is dragged along the disk at a relatively high speed from when the disk starts rotating until it leaves the disk, friction occurs between the magnetic head and the recording medium formed on the recording disk. This has the disadvantage that the media and magnetic head tend to wear out.

As a solution, a method of applying a lubricant made of organic acid to the surface of the recording medium has been adopted, but recently, in order to increase the density of recorded information and to simplify the manufacturing process of recording disks, The method of forming a recording medium by coating has changed to the method of continuously forming a recording medium by vapor deposition or sputtering.

For this reason, it is not possible to use the conventional method of mixing a lubricant in advance into the material to which the recording medium is applied and coating the recording medium. A method of coating is used.

However, when such a lubricant is applied onto a recording medium, there arise problems such as the lubricant is scraped off and the lubricating effect is lost, or the magnetic head is attracted to the excess lubricant.

((1) Purpose of the Invention The present invention eliminates the above-mentioned drawbacks, and even when a continuous recording medium is formed using vapor deposition or sputtering, an appropriate amount of excess lubricant on the recording medium is applied to the recording disk. The object of the present invention is to provide a novel magnetic head, in particular a method for manufacturing a slider of the magnetic head, in which an excess amount of trench lubricant is absorbed during rotation of the recording disk.

(e) Structure of the Invention In order to achieve the above object, the method for manufacturing a magnetic head of the present invention includes forming a metal film in a state in which crystal grains are precipitated on the rail of a slider base on which the magnetic head is mounted; etching to erode the crystal grain interface to form a metal film in which crystal grains are precipitated on the rail, and then etching the slider base using the crystal grains as a mask,
Furthermore, the metal film having the crystal grains is removed to roughen the ray/l' surface of the slider base, and the roughened surface is placed so as to face a magnetic recording medium to form a slider base on which a magnetic head is mounted. It is characterized by the fact that

(f) Embodiment of the Invention An embodiment of the invention will be described in detail below with reference to the drawings.

FIG. 1 is a perspective view showing the entire state of the slider portion of a magnetic head formed using the method of the present invention, and FIGS. 2 to 6 show the steps of the method of manufacturing the magnetic head of the present invention. FIG. 3 is a cross-sectional view of the main parts of the head.

Aluminum (
A metal film of AA) is formed to a thickness of 0.2 μm by vapor deposition or sputtering.

In this way, the A, l metal film formed on the magnetic substrate 1 is formed as a collection of crystal grains with a size of 0.8 μm. In the figure, 2 is a schematic enlarged view of the crystal grains of AI.

The substrate is then plasma etched using a reactive gas of carbon tetrachloride (CC14). In this way, the metal film 1 is etched from the grain boundary portion at the interface between the crystal grains, resulting in the shape of the AI crystal grain 2A as shown in FIG.

Next, the ferrite slider base l is etched using a reactive gas of carbon tetrafluoride (CF4) using the aforementioned AI crystal grains 2A as a mask. This state is shown in FIG.

Next, as shown in FIG.
A minute depression 8 is formed on the surface of the plasma-etched body 1 using the reaction gas c14.

Next, a carp μ4 is wound around the slider base 1.

In this way, as shown in FIG. 1, a minute depression 3 is formed on the surface of the slider base 1 at ray/l/10, and the surface on which the depression 8 is formed faces the recording medium side. Install it in a magnetic disk device.

Here, a recording disk coated with a recording medium is installed on the top of the slider base 1.

Next, as shown in FIG. 6, the recesses of the slider base 1 are impregnated with a liquid lubricant 5 made of an organic resin. Then, when the recording disk rotates at high speed, the disk is heated by the airflow between the disk and the slider, and this heating causes the lubricant 5 contained in the depression to swell and lubricate the μm0 surface of the sphere. It serves as a replenisher. Furthermore, when the apparatus is stopped, excess lubricant is absorbed by the capillary phenomenon to prevent the magnetic head from being attracted. In addition, if the lubricant is an easily evaporable organic resin liquid, even when the recording disk starts to rotate, the medium surface on the disk will be covered with lubricant vapor, allowing the disk to start rotating smoothly. do.

In the above embodiments, the recesses of the slider were impregnated with liquid lubricant in advance, but even if the lubricant is applied to the medium surface of the recording disk in advance, the excess lubricant will not be absorbed into the recesses of the slider. Since the magnetic head is accommodated in the recording disk, a situation where the magnetic head is attracted to the recording disk can be avoided.

In addition to the above embodiments, an Al metal film may be formed on a substrate and then the substrate may be heat-treated to form AI crystal grains, or the AI film may be etched with phosphoric acid to form crystal grains. After that, the lower slider substrate may be etched by a wet etching method using hydrofluoric acid.

(2) Effects of the Invention As described above, when a magnetic head is formed using the method of the present invention, an appropriate amount of lubricant is impregnated into the recess of the slider base, so that the recording disk is not scratched by the slider base. If the magnetic head formed in this manner is used in a magnetic disk device, there is an advantage that a highly reliable magnetic disk device can be obtained.

[Brief explanation of the drawing]

FIG. 1 is a perspective view showing the state of a slider base of a magnetic head formed using the method of the present invention, and FIGS. FIG. In the figure, 1 is a slider base, 2 and 2A are crystal grains of AI, 3 is a depression, 4 is a coil, 5 is a lubricant, and IO is a rail. Figure 1 Figure 4 , A

Claims (1)

[Claims] A metal film is formed with crystal grains precipitated on the rail of a slider base on which a magnetic head is mounted, and the metal film is etched to erode the crystal grain interface to form a metal film with crystal grains precipitated on the rail. is formed, then the slider base is etched using the crystal grains as a mask, the metal film having the crystal grains is removed to roughen the rail surface of the slider base, and the roughened surface is used for magnetic recording. 1. A method of manufacturing a magnetic head, comprising: a slider base on which a magnetic head is mounted by placing it facing a medium.