JPS62231428A - Disk type magnetic recording medium and its production - Google Patents
Disk type magnetic recording medium and its productionInfo
- Publication number
- JPS62231428A JPS62231428A JP7303186A JP7303186A JPS62231428A JP S62231428 A JPS62231428 A JP S62231428A JP 7303186 A JP7303186 A JP 7303186A JP 7303186 A JP7303186 A JP 7303186A JP S62231428 A JPS62231428 A JP S62231428A
- Authority
- JP
- Japan
- Prior art keywords
- recording medium
- magnetic recording
- magnetic
- protective
- disk
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000004519 manufacturing process Methods 0.000 title claims description 12
- 230000001681 protective effect Effects 0.000 claims abstract description 34
- 230000001050 lubricating effect Effects 0.000 claims abstract description 30
- 230000002093 peripheral effect Effects 0.000 claims abstract description 25
- 238000004544 sputter deposition Methods 0.000 claims abstract description 15
- 239000000758 substrate Substances 0.000 claims abstract description 12
- 238000000034 method Methods 0.000 claims description 11
- 238000007740 vapor deposition Methods 0.000 claims description 2
- 238000007667 floating Methods 0.000 abstract description 8
- 239000002245 particle Substances 0.000 abstract description 5
- 239000007789 gas Substances 0.000 abstract 1
- 238000005339 levitation Methods 0.000 description 6
- 229910052782 aluminium Inorganic materials 0.000 description 3
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 3
- 230000000694 effects Effects 0.000 description 3
- 239000000314 lubricant Substances 0.000 description 3
- 238000005461 lubrication Methods 0.000 description 3
- YCKRFDGAMUMZLT-UHFFFAOYSA-N Fluorine atom Chemical compound [F] YCKRFDGAMUMZLT-UHFFFAOYSA-N 0.000 description 2
- 238000000576 coating method Methods 0.000 description 2
- 238000007796 conventional method Methods 0.000 description 2
- 229910052731 fluorine Inorganic materials 0.000 description 2
- 239000011737 fluorine Substances 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 238000010586 diagram Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 238000000053 physical method Methods 0.000 description 1
- 230000001105 regulatory effect Effects 0.000 description 1
Abstract
Description
【発明の詳細な説明】
〔産業上の利用分野〕
本発明は、ディスク型磁気記録媒体に関し、特にハード
ディスク型磁気記録媒体およびその製造方法に関する。DETAILED DESCRIPTION OF THE INVENTION [Field of Industrial Application] The present invention relates to a disk-type magnetic recording medium, and particularly to a hard disk-type magnetic recording medium and a method for manufacturing the same.
ハードディスク型磁気記録媒体に対して磁気ヘッドによ
り情報を記録再生する場合、磁気ヘッドは磁気記録媒体
の表面から僅かに浮上しながら情報を記録再生する。こ
の場合、磁気ヘッドは磁気記録媒体に対する浮上距離が
極力少なく、すなわち低浮上であるとともに、磁気ヘッ
ドが磁気記録媒体に接触して停止している接触停止状態
から磁気記録媒体に対して記録再生を開始するための浮
上開始動作および浮上状態から磁気記録媒体に接触停止
するための浮上停止動作における所謂Ｃ８Ｓ特性が良好
であることが磁気記録媒体にとって重要である。When recording and reproducing information on a hard disk type magnetic recording medium using a magnetic head, the magnetic head records and reproduces information while slightly floating above the surface of the magnetic recording medium. In this case, the flying distance of the magnetic head with respect to the magnetic recording medium is as small as possible, that is, the flying distance is low, and the magnetic head is in contact with the magnetic recording medium and is stopped, in which case it is possible to record and read from the magnetic recording medium. It is important for a magnetic recording medium to have good so-called C8S characteristics in the levitation start operation for starting the levitation operation and the levitation stop operation for stopping the magnetic recording medium from contacting the levitation state.
従来、このようなディスク型磁気記録媒体は、例えば第
４図の断面図に示すように、例えばアルミニウム（Ａｔ
）等からなる円板状の基板４１を基体とし、この基板４
１の両面に下地層４２を形成し、この下地１１４２の上
に磁性層４３を積層し、更にこの磁性層４３の上に最上
層として保護および潤滑用の膜層４５を形成して構成さ
れている。Conventionally, such disk-type magnetic recording media have been made of, for example, aluminum (At
), etc., is used as a base, and this substrate 4
1, a magnetic layer 43 is laminated on the underlayer 1142, and a protective and lubricating film layer 45 is further formed as the uppermost layer on the magnetic layer 43. There is.
ディスク型磁気記録媒体は勿論円板状の形状をし、その
中央部を中心として回転するとともに、この磁気記録媒
体の表面に対向した磁気ヘッドが磁気記録媒体の回転に
よるエアベアリング効果により記録媒体の表面から浮上
しながら該磁気記録媒体の磁性［４３に対して情報を記
録再生するようになっている。A disk-type magnetic recording medium is of course disk-shaped and rotates around its center, and a magnetic head facing the surface of the magnetic recording medium rotates the recording medium due to the air bearing effect caused by the rotation of the magnetic recording medium. Information is recorded and reproduced on the magnetic field [43] of the magnetic recording medium while floating above the surface.
上述したように、ディスク型磁気記録媒体においては、
該媒体が回転することにより磁気ヘッドが媒体上を浮上
して情報を記録再生しているが、ディスク型磁気記録媒
体は円板状であるため、該記録媒体が回転した場合、そ
の記録面の磁気ヘッドに対する相対的移動速度は該記録
媒体の中心側と外周端側とでは、すなわち磁気記録媒体
の半径方向においてかなり異なっていて中心側が小さい
のに対して外周端側が大きく、浮上した場合の磁気ヘッ
ドの磁気記録媒体の表面からの距離も同様に中心側が小
さく、外周側が大きくなる。このため、磁気記録媒体と
磁気ヘッドとの間の種々の特性、例えば浮上特性、ＣＳ
Ｓ特性、記録再生特性などは当然記録媒体の中心側と外
周端部側とでかなり異なることになるが、従来のディス
ク型磁気記録媒体においてはこれに対処する構造的対策
またはその他の対策を全く講じていないため、すなわち
従来のディスク型磁気記録媒体は第４図に示すようにそ
の中心側も外周端側も全く同じように構成しているため
、上述したＣ８Ｓ特性、浮上特性、記録再生特性等が記
録媒体の中心側と外周端側とでかなり異なって均一でな
く、悪化しているという問題点があるとともに、またデ
ィスク型磁気記録媒体の外周端側はど記録媒体と磁気ヘ
ッドとの間の上記相対的移動速度は大きくなっているた
め、この外周端側における磁気ヘッドの浮上量が大きく
なり、この大きく浮上する分、余計なスペースを必要と
するという問題点もある。As mentioned above, in disk-type magnetic recording media,
As the medium rotates, a magnetic head flies above the medium to record and reproduce information. However, since disk-type magnetic recording media are disk-shaped, when the recording medium rotates, the recording surface The relative moving speed with respect to the magnetic head is quite different between the center side and the outer edge side of the recording medium, that is, in the radial direction of the magnetic recording medium. Similarly, the distance of the head from the surface of the magnetic recording medium is smaller on the center side and larger on the outer circumference side. For this reason, various characteristics between the magnetic recording medium and the magnetic head, such as flying characteristics, CS
S characteristics, recording/reproducing characteristics, etc. naturally differ considerably between the center side and the outer edge side of the recording medium, but conventional disk-type magnetic recording media do not take any structural or other measures to deal with this. In other words, because conventional disk-type magnetic recording media have exactly the same structure on the center side and the outer edge side as shown in Figure 4, the C8S characteristics, flying characteristics, and recording/reproducing characteristics described above There is a problem that the magnetic head is quite different between the center side and the outer edge of the recording medium, is not uniform, and is getting worse. Since the above-mentioned relative movement speed between the magnetic heads is increased, the flying height of the magnetic head on the outer peripheral end side becomes large, and there is also the problem that extra space is required for this large flying height.
本発明の目的は、上記従来の問題を解決し、ＣＳＳ特性
、浮上特性、記録再生特性、スペーシングロス等を改善
したディスク型磁気記録媒体およびその製造方法を提供
することにある。SUMMARY OF THE INVENTION An object of the present invention is to solve the above-mentioned conventional problems and provide a disk-type magnetic recording medium with improved CSS characteristics, flying characteristics, recording/reproducing characteristics, spacing loss, etc., and a method for manufacturing the same.
上記目的を達成するため、本発明のディスク型磁気記録
媒体は、円板状の基体上に磁性膜を形成し、該磁性膜上
に保護および潤滑用の膜を形成したディスク型磁気記録
媒体において、前記保護・潤滑用膜の厚さを円板状基体
の半径方向に沿って中心側の方が外周端側よりも厚く形
成することを特徴とする。In order to achieve the above object, the disk-type magnetic recording medium of the present invention is a disk-type magnetic recording medium in which a magnetic film is formed on a disk-shaped base, and a protective and lubricating film is formed on the magnetic film. The protective/lubricating film is formed to be thicker on the center side in the radial direction of the disc-shaped base than on the outer peripheral end side.
また、本発明のディスク型磁気記録媒体の製造方法は、
円板状の基体上に磁性膜を形成し、該磁性膜上に円板状
基体の半径方向に沿って中心側の方が外周端側より厚く
保護および潤滑用の膜を形成することを特徴とする。Further, the method for manufacturing a disk-type magnetic recording medium of the present invention includes:
A magnetic film is formed on a disc-shaped base, and a protective and lubricating film is formed on the magnetic film, which is thicker on the center side than on the outer peripheral edge along the radial direction of the disc-shaped base. shall be.
（作用〕
本発明のディスク型磁気記録媒体においては、磁性膜の
上に形成する保護・潤滑用膜の厚さを中心側の方が外周
端側よりも厚く形成している。(Function) In the disk-type magnetic recording medium of the present invention, the protective/lubricating film formed on the magnetic film is thicker on the center side than on the outer peripheral side.
また、本発明のディスク型磁気記録媒体の製造方法にお
いては、磁性膜上に中心側の他が外周端側より厚く保護
・潤滑用膜を形成している。Further, in the method for manufacturing a disk-type magnetic recording medium of the present invention, a protective/lubricating film is formed on the magnetic film to be thicker on the center side than on the outer peripheral side.
［実施例］ 以下、図面を参照して本発明の詳細な説明する。[Example] Hereinafter, the present invention will be described in detail with reference to the drawings.
第１図は本発明の一実施例に係わるディスク型磁気記録
媒体の断面図である。この磁気記録媒体は例えばディジ
タルデータ等を記録するためのハードディスク型磁気記
録媒体であって、例えばアルミニウム（ＡＩ）等からな
る円板状の基板１を基体とし、この基板１の両面に例え
ばＮ１−Ｐからなる下地層２を形成し、この下地層２の
上に磁性ｗＪ３を積層し、更にこの磁性層３の上に最上
層として保護および潤滑用の膜層５を形成して構成され
ている。この磁気記録媒体を構成する基板１は例えば１
．９ｍｍの厚さの平坦な円板で形成され、この基板ｌの
両面に形成される下地Ｊ？ｇ２は平坦に所定の厚さに形
成され、更にこの下地Ｎ２の上に形成される磁性層３は
例えば１０００人から２００人の均一な厚さで平坦に形
成されている。そして、この磁性Ｎ３の上に形成される
保護・潤滑用膜４は該磁気記録媒体の中心部５における
厚さが最も厚く、外周端部６における厚さが最も薄くな
るようにスロープを描いて形成されている。この場合に
おいて、保護・潤滑用膜４の中心部５における厚さは約
０．０３μｍ〜０．０５μｍであり、外周端部６におけ
る厚さは約０．０１μｍ−０゜０２μｍであり、また保
護・潤滑用膜４を構成する材料は例えばＣ，ＳｉＯ，、
またはフッ素系のものである。FIG. 1 is a sectional view of a disk-type magnetic recording medium according to an embodiment of the present invention. This magnetic recording medium is, for example, a hard disk type magnetic recording medium for recording digital data, etc., and has a disk-shaped substrate 1 made of, for example, aluminum (AI) as a base. A base layer 2 made of P is formed, a magnetic wJ3 is laminated on this base layer 2, and a protective and lubricating film layer 5 is further formed as the top layer on this magnetic layer 3. . The substrate 1 constituting this magnetic recording medium is, for example, 1
．． The base layer J? is formed of a flat disk with a thickness of 9 mm and is formed on both sides of this substrate l. G2 is formed flat and to a predetermined thickness, and furthermore, the magnetic layer 3 formed on this base N2 is formed flat and to a uniform thickness of, for example, 1000 to 200 layers. The protective/lubricating film 4 formed on the magnetic N3 has a slope so that the thickness is the thickest at the center 5 of the magnetic recording medium and the thinnest at the outer peripheral edge 6. It is formed. In this case, the thickness of the protective/lubricating film 4 at the center 5 is about 0.03 μm to 0.05 μm, and the thickness at the outer peripheral edge 6 is about 0.01 μm to 0.02 μm.・The material constituting the lubricating film 4 is, for example, C, SiO,
Or fluorine-based.
このように構成されるディスク型磁気記録媒体は円板状
の中央部を中心として回転するとともに、この磁気記録
媒体の表面に対向した磁気ヘッドが磁気記録媒体の回転
によるエアベアリング効果により記録媒体の表面から浮
上しながら該磁気記録媒体の磁性層３に対して情報を記
録再生するものであるが、この回転時における磁気記録
媒体と磁気ヘッドとの相対的移動速度は中心部５と外周
端°部６とでは上述したようにかなり異なって中心部５
における速度が遅（、外周端部６における速度が速くな
っている。従って、この速度の相違のために磁気記録媒
体の中心部５と外周端部６とにおける磁気ヘッドの浮上
量および浮上刃も中心部５が小さく、外周端部６が大き
くなっているが、上記第１図の磁気記録媒体においては
この浮上量お・よび浮上刃に応じて磁性層３の上に形成
される保護・潤滑用膜４の厚さを中心部５側の方が外周
端部６側よりも厚く形成しているので、浮上した場合の
磁気ヘッドの浮上位置は磁気記録媒体上の半径方向にわ
たって略同じ高さ位置、すなわち保護・潤滑用膜４の下
層である平坦な磁性層３と磁気ヘッドとの間の距離につ
いて考えると該距離は半径方向にわたって略同じとなる
とともに、またこの同じ高さ位置まで磁気ヘッドが浮上
して安定するまでの時間も上記浮上量および浮上刃に関
連して略同−となるのである、この結果、磁気記録媒体
のＣ８Ｓ特性は均一化されて優れたものに改善されるこ
とになるとともに、磁気ヘッドの浮上位置は上述したよ
うに略同じ高さ位置となるため、浮上特性も均一化され
て優れた特性となる。また、磁性層３と磁気ヘッドとの
間の距離も磁気記録媒体の半径方向にわたって同一距離
となるため、磁気記録再生特性も均一化されて優れたも
のになる。The disk-shaped magnetic recording medium constructed in this way rotates around the disk-shaped center, and the magnetic head facing the surface of the magnetic recording medium rotates the recording medium due to the air bearing effect caused by the rotation of the magnetic recording medium. Information is recorded and reproduced on the magnetic layer 3 of the magnetic recording medium while floating above the surface, and the relative moving speed between the magnetic recording medium and the magnetic head during this rotation is between the center 5 and the outer peripheral edge. As mentioned above, the central part 5 is quite different from the central part 5.
The speed at the outer edge 6 is slow (and the speed at the outer edge 6 is faster). Therefore, due to this difference in speed, the flying height and flying blade of the magnetic head at the center 5 and the outer edge 6 of the magnetic recording medium also decrease. Although the center portion 5 is small and the outer peripheral edge portion 6 is large, in the magnetic recording medium shown in FIG. Since the thickness of the magnetic head 4 is made thicker on the side of the center portion 5 than on the side of the outer circumferential end portion 6, the floating position of the magnetic head when it is levitated is approximately at the same height over the magnetic recording medium in the radial direction. Considering the position, that is, the distance between the flat magnetic layer 3 that is the lower layer of the protective/lubrication film 4 and the magnetic head, the distance is approximately the same in the radial direction, and the magnetic head is The time it takes for the magnetic recording medium to float and become stable is also approximately the same in relation to the flying height and floating blade.As a result, the C8S characteristics of the magnetic recording medium are made uniform and improved to excellent ones. At the same time, since the flying positions of the magnetic heads are at approximately the same height as described above, the flying characteristics are also made uniform and have excellent characteristics.Also, the distance between the magnetic layer 3 and the magnetic head is Since the distance is the same in the radial direction of the magnetic recording medium, the magnetic recording and reproducing characteristics are also uniform and excellent.
更に、磁気ヘッドの浮上量に応じて磁性層３の上に形成
される保護・潤滑用膜４の厚さを外周端部６の方が中心
部５側よりも薄く形成することにより外周端側において
浮上した磁気ヘッドが大きく突出するということが防止
されているため、この突出するという余計なスペースが
削除され、コンパクト化が達成されている。Furthermore, the thickness of the protective/lubricating film 4 formed on the magnetic layer 3 is made thinner on the outer peripheral edge 6 than on the center 5 side depending on the flying height of the magnetic head. Since the floating magnetic head is prevented from protruding significantly, the extra space caused by this protrusion is eliminated, and compactness is achieved.
次に、以上のように構成され優れた特性を有する第１図
のディスク型磁気記録媒体の製造方法について第２図お
よび第３図を参照して説明する。Next, a method for manufacturing the disk-type magnetic recording medium of FIG. 1 having the above structure and excellent characteristics will be described with reference to FIGS. 2 and 3.
第１図のディスク型磁気記録媒体においては、基板１の
上に下地層２、磁性Ｎ３を順次形成していく製造方法に
ついては従来と同じであり、この磁性１！！３の上に保
護・潤滑用膜４をスロープを描いて、すなわち傾斜させ
て形成するところが従来と異なる製造工程部分である。In the disk-type magnetic recording medium shown in FIG. 1, the manufacturing method of sequentially forming the underlayer 2 and the magnetic layer N3 on the substrate 1 is the same as the conventional method, and the magnetic layer 1! ! The manufacturing process differs from the conventional method in that the protective/lubricating film 4 is formed on the protective/lubricant film 3 in a sloped manner.
従って、この保護・潤滑用膜４をスロープを描くように
磁気記録媒体の中心部５側を厚く、外周端部６側を薄く
形成するのにスパッタリング、すなわちインラインスパ
ック装置を使用した方法について説明する。Therefore, we will explain a method using sputtering, that is, an in-line sputtering device, to form the protective/lubricating film 4 so that it is thick on the center 5 side of the magnetic recording medium and thin on the outer peripheral edge 6 side so as to draw a slope. .
第２図において保護・潤滑用膜がスパッタリングで形成
されるディスク型磁気記録媒体、すなわち基体部はペル
ジャー１１内に設けられた凸金１２の下面に符号１３で
示すように配設される。In FIG. 2, a disk-type magnetic recording medium, ie, a base portion, on which a protective/lubricating film is formed by sputtering is disposed as shown by reference numeral 13 on the lower surface of a convex metal 12 provided in a Pel jar 11.
なお、この基体部１３は上述したように基板１の上に既
に下地１２、磁性層３が形成されているものとする。そ
して、この基体部１３の下方にチリンパ１４を介してス
パッタＳｔＳを対向して配設する。スパッタ′ｒＡ１５
のチョッパ１４との対向面側には近接してスパッタ位置
規制用の制御マスク１６が配設されている。スパッタ源
１５は基体部１３゛の面、すなわち上述したように形成
された磁性Ｎ３の面上に保護・潤滑用ｌ！２４をスパッ
タリングで形成するためのＣ，Ｓｔｏｗまたはフッ素系
の材料からなるターゲット１７を有する。そして、この
ようにペルジャー１１内に構成される各部材はその中心
軸１８を中心に矢印で示すように回転しながらスパッタ
リングされるが、この場合におけるチョッパ１４は第３
図に示すように磁気記録媒体とほぼ同径の円板状に形成
されるとともに、その中央部を中心として星形状の開口
部１４ａが形成されている。この星形状の開口部１４ａ
は中央部を中心に対称的かつ放射状に形成されるととも
に、中央部側が広く外周端部側が狭く形成されている。It is assumed that the base portion 13 has the base 12 and the magnetic layer 3 already formed on the substrate 1 as described above. Sputtered StS is disposed below this base portion 13 to face each other with a chiller 14 interposed therebetween. Sputter'rA15
A control mask 16 for regulating the sputtering position is disposed close to the surface facing the chopper 14 . The sputtering source 15 is provided with protective and lubricating l! It has a target 17 made of C, Stow, or fluorine-based material for forming 24 by sputtering. Each member constructed in the Pelger 11 is thus sputtered while rotating as shown by the arrow around its central axis 18. In this case, the chopper 14 is
As shown in the figure, it is formed into a disk shape with approximately the same diameter as the magnetic recording medium, and a star-shaped opening 14a is formed in the center thereof. This star-shaped opening 14a
are formed symmetrically and radially around the center, and are wide on the center side and narrow on the outer peripheral end side.
このように構成されるスパッタリング装置において、ペ
ルジャー１１内に所定のガスを混入して所望のガス圧に
した後、基台１２を回転させて基体部１３を回転させる
とともに、更にチョッパ１４を回転させながら、ターゲ
ット１７に所定の電圧を印加してスパッタリングを行う
と、スパッタ源１５からの溶融粒子はチョッパ１４を貫
通して基体部１３の表面に吹き付けられて付着すること
になる。そして、この溶融粒子の付着量はチョッパ１４
の開口部１４ａの大きさに応じて中心部側が厚く外周端
部側が薄く形成されることになり、この結果第１図に示
すように保護・潤滑用膜４がスロープを描いて中心部５
側が厚く外周端部６側が薄く形成されるのである。In the sputtering apparatus configured as described above, after a predetermined gas is mixed into the Pel jar 11 to obtain a desired gas pressure, the base 12 is rotated to rotate the base body part 13, and the chopper 14 is further rotated. However, when sputtering is performed by applying a predetermined voltage to the target 17, the molten particles from the sputtering source 15 penetrate the chopper 14, are sprayed onto the surface of the base portion 13, and are attached thereto. The amount of adhered molten particles is determined by the chopper 14.
Depending on the size of the opening 14a, the center portion is thicker and the outer peripheral edge portion is thinner, and as a result, as shown in FIG.
The side is thicker and the outer peripheral end 6 side is thinner.
なお、このように保護・潤滑用膜４を中心部５側が厚（
外周端部６側が薄く形成する方法はスパッタリングに限
定されるものでなく、通常の物理的方法、コーティング
による方法、蒸着による方法等の種々の方法が可能であ
る。コーティングによる方法は基体部１３の外周端部側
の遠心力が強（作用することを利用して中心部側を厚く
外周端部側を薄く形成することが簡単である。In this way, the protective/lubricating film 4 is thicker on the center 5 side (
The method for forming the outer peripheral end 6 side thin is not limited to sputtering, and various methods such as a normal physical method, a coating method, a vapor deposition method, etc. can be used. In the coating method, it is easy to make the center part thicker and the outer peripheral end part thinner by taking advantage of the fact that the centrifugal force on the outer peripheral end side of the base body part 13 is strong.
以上のように構成されるディスク型磁気記録媒体におい
ては、中心部側の保護・潤滑用膜４が厚く形成されてい
るので、全体的に見てＣ８Ｓ特性は改善され、磁気ヘッ
ドの低浮上化が可能になり、磁気記録媒体の周速の変化
に対応した厚さとなっているため、スペーシングロスが
一定化されている。また、中心部側は保護・潤滑用膜４
が厚いのでＣ８Ｓ特性が良く、かつこの部分をＣ３Ｓゾ
ーンまたはランディングゾーンとして使用できるし、ま
たクラッシュの恐れもないようになっている。In the disk-type magnetic recording medium configured as described above, since the protective/lubricating film 4 on the center side is formed thickly, the C8S characteristics are improved overall, and the flying height of the magnetic head is lowered. Since the thickness corresponds to changes in the circumferential speed of the magnetic recording medium, spacing loss is kept constant. In addition, the center side has a protective/lubricating film 4.
Because it is thick, the C8S characteristics are good, and this part can be used as a C3S zone or landing zone, and there is no risk of a crash.
以上説明したように、本発明によれば、磁性膜の上に形
成する保護・潤滑用膜の厚さを中心側の方が外周端側よ
りも厚く形成しているので、ディスク型磁気記録媒体の
中心側と外周端側とにおける該磁気記録媒体と磁気ヘッ
ドとの相対的移動速度の相違による特性の不均一性が補
償されるため、ディスク型磁気記録媒体のＣＳＳ特性、
浮上特性、記録再生特性、スペーシングロスを改善する
ことができる。すなわち、ディスク型磁気記録媒体と磁
気ヘッドとの相対的移動速度の中心側と外周端側との相
違に対応した磁気ヘッドの浮上量および浮上刃の相違に
応じて磁性膜の上に形成される保護・潤滑用膜の厚さを
中心側の方が外周端側よりも厚く形成しているので、浮
上した場合の磁気ヘッドの浮上位置は磁気記録媒体上の
半径方向にわたって略同じ高さ位置、すなわち保護・潤
滑用膜の下層である平坦な磁性層と磁気ヘッドとの間の
距離は半径方向にわたって略同しとなるとともに、この
同じ高さ位置まで磁気へラドが浮上して安定するまでの
時間も上記浮上量および浮上刃に関連して略同−となる
きである、この結果、磁気記録媒体のＣ８Ｓ特性は均一
化されて優れたものに改善されることになるとともに、
磁気へ・７ドの浮上位置は上述したように略同し高さ位
置となるため、浮上特性も均一化されて優れた特性とな
る。また、磁性層と磁気ヘッドとの間の距離も磁気記録
媒体の半径方向にわたって同一距離となるため、磁気記
録再生特性も均一化されて優れたものになる。As explained above, according to the present invention, the thickness of the protective/lubricating film formed on the magnetic film is thicker on the center side than on the outer peripheral edge side, so that the disk-type magnetic recording medium The CSS characteristics of the disk-type magnetic recording medium are
It is possible to improve flying characteristics, recording/reproducing characteristics, and spacing loss. In other words, the magnetic film is formed on the magnetic film according to the difference in the flying height and flying blade of the magnetic head corresponding to the difference in the relative moving speed between the disk-type magnetic recording medium and the magnetic head between the center side and the outer edge side. Since the thickness of the protective/lubrication film is made thicker on the center side than on the outer edge side, the floating position of the magnetic head when it is levitated is at approximately the same height position over the magnetic recording medium in the radial direction. In other words, the distance between the flat magnetic layer that is the lower layer of the protective and lubricating film and the magnetic head is approximately the same in the radial direction, and the distance between the magnetic head and the flat magnetic layer that is the lower layer of the protective/lubricant film is approximately the same in the radial direction, and the distance between the magnetic head and the flat magnetic layer that is the lower layer of the protective/lubricant film is approximately the same in the radial direction. The time will also be approximately the same in relation to the above-mentioned flying height and flying blade.As a result, the C8S characteristics of the magnetic recording medium will be made uniform and improved to excellent ones.
Since the levitation positions of the magnetic 7D are at approximately the same height as described above, the levitation characteristics are also made uniform and have excellent characteristics. Furthermore, since the distance between the magnetic layer and the magnetic head is the same in the radial direction of the magnetic recording medium, the magnetic recording and reproducing characteristics are also uniform and excellent.
更に、磁気へラドの浮上量に応じて磁性層の上に形成さ
れる保護・潤滑用膜の厚さを外周端部の方が中心部側よ
りも薄く形成することにより外周端側において磁気ヘッ
ドが大きく突出するということが防止されているため、
この突出するという余計なスペースが削除され、コンパ
クト化が達成されている。Furthermore, the thickness of the protective/lubricating film formed on the magnetic layer, which is formed on the magnetic layer according to the flying height of the magnetic herad, is thinner at the outer edge than at the center. This prevents the large protrusion of the
This protruding extra space has been removed to achieve compactness.
第１図は本発明の一実施例に係わるディスク型磁気記録
媒体の断面図、
第２図は第１図のディスク型磁気記録媒体を製造するス
バ７タ装置の構成図、
第３図は第２図の装置に使用するチョッパの平面図、
第４図は従来のディスク型磁気記録媒体の断面図である
。
図において、
１・・・・・基板、
２・・・・・下地層、
３・・・・・磁性層、
４・・・・・保護・潤滑用膜、
１４・・・・チョッパ、
１５・・・・スパッタ源である。
第１図
第２図
第３ 図
第４図FIG. 1 is a cross-sectional view of a disk-type magnetic recording medium according to an embodiment of the present invention, FIG. 2 is a block diagram of a subverter apparatus for manufacturing the disk-type magnetic recording medium of FIG. 1, and FIG. FIG. 2 is a plan view of a chopper used in the apparatus, and FIG. 4 is a sectional view of a conventional disk-type magnetic recording medium. In the figure, 1...Substrate, 2...Underlayer, 3...Magnetic layer, 4...Protection/lubrication film, 14...Chopper, 15. ...It is a source of sputtering. Figure 1 Figure 2 Figure 3 Figure 4
Claims (4)
保護および潤滑用の膜を形成したディスク型磁気記録媒
体において、前記保護・潤滑用膜の、厚さを円板状基体
の半径方向に沿って中心側の方が外周端側よりも厚く形
成することを特徴とするディスク型磁気記録媒体。(1) In a disk-type magnetic recording medium in which a magnetic film is formed on a disc-shaped substrate and a protective and lubricating film is formed on the magnetic film, the thickness of the protective and lubricating film is 1. A disk-shaped magnetic recording medium characterized in that the center side of the shaped substrate is thicker than the outer peripheral edge side along the radial direction.
円板状基体の半径方向に沿って中心側の方が外周端側よ
り厚く保護および潤滑用の膜を形成することを特徴とす
るディスク型磁気記録媒体の製造方法。(2) A magnetic film is formed on a disc-shaped base, and a protective and lubricating film is formed on the magnetic film, which is thicker on the center side than on the outer peripheral edge along the radial direction of the disc-shaped base. A method of manufacturing a disk-type magnetic recording medium, characterized in that:
に中心部から外周端側に向かって中心部側が広く外周端
側が狭い開口部を有する円板状のチョッパを前記磁性膜
を形成した基体に対して所定間隔あけて前記円板状基体
と同心円的に設け、前記チョッパを回転させながら該チ
ョッパを介して前記磁性膜上に保護および潤滑用の膜を
スパッタまたは蒸着により形成することを特徴とする特
許請求の範囲第２項記載のディスク型磁気記録媒体の製
造方法。(3) In the step of forming the protective/lubricating film, the magnetic film is formed using a disk-shaped chopper having an opening that is wide on the center side and narrow on the outer peripheral side in the radial direction from the center to the outer peripheral end. forming a protective and lubricating film on the magnetic film by sputtering or vapor deposition while rotating the chopper; A method for manufacturing a disk-type magnetic recording medium according to claim 2, characterized in that:
膜を形成した円板状基体を回転しながら磁性膜上に保護
・潤滑用膜をコーティングすることを特徴とする特許請
求の範囲第２項記載のディスク型磁気記録媒体の製造方
法。(4) The step of forming the protective/lubricating film is characterized in that the protective/lubricating film is coated on the magnetic film while rotating the disc-shaped substrate on which the magnetic film is formed. 3. The method for manufacturing a disk-type magnetic recording medium according to item 2.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7303186A JPS62231428A (en) | 1986-03-31 | 1986-03-31 | Disk type magnetic recording medium and its production |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7303186A JPS62231428A (en) | 1986-03-31 | 1986-03-31 | Disk type magnetic recording medium and its production |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS62231428A true JPS62231428A (en) | 1987-10-12 |
Family
ID=13506572
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP7303186A Pending JPS62231428A (en) | 1986-03-31 | 1986-03-31 | Disk type magnetic recording medium and its production |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS62231428A (en) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0453027A (en) * | 1990-06-20 | 1992-02-20 | Sumitomo Light Metal Ind Ltd | Magnetic disk excellent in durability |
| US6086949A (en) * | 1998-02-25 | 2000-07-11 | International Business Machines Corporation | Thin film protective coating with two thickness regions |
| US6104578A (en) * | 1993-06-29 | 2000-08-15 | International Business Machines Corporation | Magnetic disk and magnetic disk apparatus having an annular start-stop area with a radial downslope |
| JP2006209913A (en) * | 2005-01-31 | 2006-08-10 | Toshiba Corp | Patterned magnetic recording medium, stamper for preparing patterned magnetic recording medium, manufacturing method of patterned magnetic recording medium, and magnetic recording and reproducing apparatus |
-
1986
- 1986-03-31 JP JP7303186A patent/JPS62231428A/en active Pending
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0453027A (en) * | 1990-06-20 | 1992-02-20 | Sumitomo Light Metal Ind Ltd | Magnetic disk excellent in durability |
| US6104578A (en) * | 1993-06-29 | 2000-08-15 | International Business Machines Corporation | Magnetic disk and magnetic disk apparatus having an annular start-stop area with a radial downslope |
| US6086949A (en) * | 1998-02-25 | 2000-07-11 | International Business Machines Corporation | Thin film protective coating with two thickness regions |
| JP2006209913A (en) * | 2005-01-31 | 2006-08-10 | Toshiba Corp | Patterned magnetic recording medium, stamper for preparing patterned magnetic recording medium, manufacturing method of patterned magnetic recording medium, and magnetic recording and reproducing apparatus |
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