JPS59140622A - Production of magnetic head core - Google Patents

Production of magnetic head core

Info

Publication number
JPS59140622A
JPS59140622A JP1503483A JP1503483A JPS59140622A JP S59140622 A JPS59140622 A JP S59140622A JP 1503483 A JP1503483 A JP 1503483A JP 1503483 A JP1503483 A JP 1503483A JP S59140622 A JPS59140622 A JP S59140622A
Authority
JP
Japan
Prior art keywords
core
glass
groove
stuck
thin film
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP1503483A
Other languages
Japanese (ja)
Inventor
Yasuatsu Nishida
西田 安敦
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Home Electronics Ltd
NEC Corp
Original Assignee
NEC Home Electronics Ltd
Nippon Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NEC Home Electronics Ltd, Nippon Electric Co Ltd filed Critical NEC Home Electronics Ltd
Priority to JP1503483A priority Critical patent/JPS59140622A/en
Publication of JPS59140622A publication Critical patent/JPS59140622A/en
Pending legal-status Critical Current

Links

Classifications

    • GPHYSICS
    • G11INFORMATION STORAGE
    • G11BINFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B5/00Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
    • G11B5/127Structure or manufacture of heads, e.g. inductive
    • G11B5/31Structure or manufacture of heads, e.g. inductive using thin films
    • G11B5/3163Fabrication methods or processes specially adapted for a particular head structure, e.g. using base layers for electroplating, using functional layers for masking, using energy or particle beams for shaping the structure or modifying the properties of the basic layers
    • GPHYSICS
    • G11INFORMATION STORAGE
    • G11BINFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B5/00Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
    • G11B5/127Structure or manufacture of heads, e.g. inductive
    • G11B5/31Structure or manufacture of heads, e.g. inductive using thin films
    • G11B5/3103Structure or manufacture of integrated heads or heads mechanically assembled and electrically connected to a support or housing

Abstract

PURPOSE:To improve the workability in inserting a coil winding and to enable formation of a gap to an exact size by forming a joint layer over the entire surface on the joint surface side of a core, removing the joint layer in the part constituting a through-window for inserting the coil winding to expose the core ground surface and adhering the same by glass. CONSTITUTION:A thin film 17 of a ''Sendust'' alloy composed of 6.2wt% Al, 9.6wt% Si, and 84.2wt% Fe is stuck on the joint surface side of base plates 11, 12 composed of high melting glass having high hardness. The thin film 17 is stuck by a high frequency sputtering method in an Ar atmosphere kept at about 10<-2>Torr. SiO2 18 is stuck at about 1,500Angstrom on the film 17. A photoresist 19 is coated thereon except a notched groove 13 and a part 12' and is masked thereon by a photolithographic technique. The base plates are then dipped in an HF- NH4F etching soln. to remove the SiO2 in the groove 13 and the part 12'. Low meling glass 20 is inserted into a hollow groove 14 and after the base plates 11, 12 are sandwiched, the plates are heated in an inert gaseous atmosphere or vacuum to melt and adhere the glass 20 to the part except the groove 13 and the part 12'. A core block assembly 21 is thus obtd.

Description

【発明の詳細な説明】 〔技術分野〕 この発明は、a気記録を行う磁気ヘッドのコア製造方法
に関するもので、詳しくは、コアの接合形成についての
技術である。
DETAILED DESCRIPTION OF THE INVENTION [Technical Field] The present invention relates to a method for manufacturing a core of a magnetic head that performs a-air recording, and more specifically, to a technology for forming a core bond.

〔背景技術〕[Background technology]

一般に、VTRやコンピュータの磁気記録を行わせるた
めの磁気ヘッドは、高記録密度かつ低保磁力特性が要求
され、その強磁性体コアの磁気的ギャップを1μm以下
とし、しかも耐摩耗性が良好なものが必要である。そこ
で従来よりMn −Zn単結晶フェライトの強磁性体を
材質として選定していたが、最近では、記録密度が限界
に達しつつあり、より優れた特性を示すセンダスト合金
に変更され始めている。
In general, magnetic heads for magnetic recording in VTRs and computers are required to have high recording density and low coercive force characteristics, and have a ferromagnetic core with a magnetic gap of 1 μm or less and good wear resistance. something is needed. Therefore, a ferromagnetic material such as Mn--Zn single crystal ferrite has traditionally been selected as the material, but recently, the recording density is reaching its limit, and a change has begun to be made to Sendust alloy, which has better characteristics.

ところで、この磁気ヘッドコアを製作するには、第1図
に示すように、一対のコアブロック1.2を準備して、
その突き合せ゛・接合面側の上隅部8゜4を第2図のよ
うにトラック幅tとなるように薄肉とするとともに、突
き合せ時に111m以下程度のギャップを形成させるた
めに、いずれか一方を砥削し、一方のコアブロックlに
、コア製作後にコイル巻線を押通させる貫通窓を作るた
めに切欠き5を、そして他方のコアプロ、り2の端部に
接着ガラス仮固定用の面取り凹部6を設ける形態とする
ものが多数であった。
By the way, in order to manufacture this magnetic head core, as shown in FIG. 1, a pair of core blocks 1.2 are prepared,
The upper corner 8.4 of the butting surface side is made thin so that it has a track width t as shown in Fig. 2, and in order to form a gap of about 111 m or less when butting, either Grind one side and make a notch 5 in one core block l to make a through window through which the coil winding will be pushed through after the core is made, and glue it to the end of the other core block l for temporarily fixing the glass. Many of them were provided with a chamfered recess 6.

ところが、上記の感慨ヘッドコアは、製作時に次のよう
な問題があった。すなわち、第1図に示した形態のコア
ブロック1.2を接合すると、第3図の通り接着用ガラ
ス7が溶着時に、凹部6より接合部8,9間1.上隅部
3.4間の間隙へ付着するばかりか、貫通窓5′内面へ
も付着してしまい、その後のコイル巻線挿通作業が困難
となる欠点が生じていた。この問題の原因は、コアプロ
、り1゜2がガラス7との濡れ性が非常に悪く、これを
解消するために、突き合せ面に酸化膜10.10を設け
ているからである。しかし、現在、ガラス7によるコア
ブロック1.2の接合には、他に実施回部な手段が見い
出せていない。
However, the above-described head core had the following problems during production. That is, when the core blocks 1.2 of the form shown in FIG. 1 are joined together, as shown in FIG. Not only does it adhere to the gap between the upper corners 3 and 4, but it also adheres to the inner surface of the through window 5', making it difficult to subsequently insert the coil winding. The cause of this problem is that Core Pro 1.2 has very poor wettability with glass 7, and to solve this problem, an oxide film 10.10 is provided on the abutting surfaces. However, at present, no other practical means have been found for joining the core block 1.2 with the glass 7.

〔発明の開示〕[Disclosure of the invention]

この発明は、以上の経緯を考慮して検討の結果提唱され
たものである。つまりこの発明は、コアブロックとガラ
スとの接着性は喪失させることなく、貫通窓内面へのガ
ラス付着を防止する方法である。この発明は、予めコア
の接合面側全面に接合層を形成後、コイル巻線挿通用貫
通窓内面を構成する部分の接合層を、エツチング処理に
より除〜 去してコア地肌を露出させて、ガラス接着させることを
特徴としている。したがって、この発明によれば後述の
実施例から明白な通り単にコイル巻線挿通作業性改善を
図るばかりでなく、感慨的ギャップ寸法設定も正確に形
成できる長所がある。
This invention was proposed as a result of studies in consideration of the above circumstances. In other words, the present invention is a method for preventing glass from adhering to the inner surface of a through window without losing the adhesiveness between the core block and the glass. This invention involves forming a bonding layer on the entire bonding surface side of the core in advance, and then removing the bonding layer on the inner surface of the through-hole for coil winding through an etching process to expose the core surface. It is characterized by being bonded to glass. Therefore, according to the present invention, as will be clear from the embodiments described later, it is possible not only to simply improve the workability of inserting the coil winding, but also to have the advantage of being able to accurately set the gap size.

〔発明を実施するための最良の形態〕[Best mode for carrying out the invention]

第4図〜第10図は、この発明の一実施例を示す磁気へ
1.ドコアの製造工程を説明するものである。まず第4
図は、ビッカース硬度HVが十分大きく高融点ガラスの
基板11.12の斜視図で、それらの突き合せを行わせ
る接合面側に切欠き溝13及び接着ガワス仮固宇用凹溝
14が形成され、一方の基板11のギャップ形成隅部1
5は、突き合せ面16が含まれる平面よりも所望値だけ
離隔した平面に在るように研磨されている。そこで磁気
ヘッドコアを製造するには、はじめに、第5図に示すよ
うに、基板11.12の接合面側に、組成比がAA 6
.2、Si’9.6、Fe34.2各wt%のセンダス
ト合金薄膜17.17を付着させる。ここでセンダスト
合金薄膜17.17は、強磁性体コアとなるもので、1
0−’ TOrr程度のAr雰囲気で高周波スパッタリ
ング法によって所定の膜厚に付着させる。つぎに、第6
図の通りにセンダスト合金薄膜17.17上に、酸化物
材料であるS10゜18.18を薄く約1500λ程度
に付着させる。
FIGS. 4 to 10 show an example of the magnetic field 1. This explains the manufacturing process of docoa. First, the fourth
The figure is a perspective view of substrates 11 and 12 made of high-melting glass with sufficiently high Vickers hardness HV, and a notch groove 13 and a groove 14 for bonding gas are formed on the bonding surface side where they are butted. , gap forming corner 1 of one substrate 11
5 is polished so that it lies on a plane spaced apart by a desired value from the plane in which the abutting surface 16 is included. Therefore, in order to manufacture a magnetic head core, first, as shown in FIG.
.. 2, a sendust alloy thin film 17.17 of each wt% of Si'9.6 and Fe34.2 is deposited. Here, the sendust alloy thin film 17.17 serves as a ferromagnetic core, and 1
The film is deposited to a predetermined thickness by high frequency sputtering in an Ar atmosphere of approximately 0-' TOrr. Next, the sixth
As shown in the figure, an oxide material S10°18.18 is deposited to a thickness of approximately 1500λ on the sendust alloy thin film 17.17.

その後基板11及び12の切欠き溝1B及びその対向部
分12’を残して、紫外線感光性のフォトレジスト19
.19を第7歯のように塗布して、フォトリゾグラフィ
技術によってマスキングシ、HF−NHtF系エツチン
グ液に浸漬することにより第8図の通り、選択的に切欠
き溝18及びその対向部分12′のSin、  を除去
する。そして従来と同様に凹溝14へ低融点ガラス20
を挿入させて、圧着治具等を用いて第9図に示すように
基板11゜12を挾持し、不活性ガス雰囲気又は真空中
で加熱することによって、低融点ガラス20を、切欠き
溝13及びその対向部分12′以外へ溶融接着させて、
第10図に示すコアプロ・ツク組付体21を得る。最後
にこのコアプロ・ツク組付体21を十〜数十77 mの
トラ。ツク幅tの間隔でスライスすれば、磁気へラドコ
アとなる。
After that, leaving the cutout grooves 1B and the opposing portions 12' of the substrates 11 and 12, an ultraviolet-sensitive photoresist 19 is applied.
.. 19 like the seventh tooth, masked by photolithography technique, and selectively cut out the notch groove 18 and its opposing portion 12' as shown in FIG. Sin of, is removed. Then, as before, the low melting point glass 20 is inserted into the groove 14.
The low melting point glass 20 is inserted into the cutout groove 13 by sandwiching the substrates 11 and 12 using a crimping jig or the like as shown in FIG. 9, and heating in an inert gas atmosphere or vacuum. and by melting and adhering it to a portion other than the opposing portion 12′,
A core pro-tsuku assembly 21 shown in FIG. 10 is obtained. Finally, this core pro-tsuku assembly 21 was installed at a distance of 10 to several tens of 77 m. By slicing it at intervals of width t, it becomes a magnetic rad core.

上記の製造工程を経て得られた磁気ヘッドコアは、コイ
ル巻線挿通窓内面となる切欠き溝13及びその対向部分
12′は、エツチング処理によって、センダスト合金薄
膜17の地肌が露出しているので、溶融低融点ガラス2
0が付着せず、逆にそれ以外のSi、0.18 、18
上に良好になじみ付着することになる。しかも、この磁
気へラドコアでは、センダスト合金薄膜17及びSin
、 18の膜厚は、スパッタリング速度制御を行って精
密に設定することができ、センダスト合金薄膜の母気的
ギヤ、。
In the magnetic head core obtained through the above manufacturing process, the notch groove 13 and its opposing portion 12', which form the inner surface of the coil winding window, are etched so that the bare surface of the sendust alloy thin film 17 is exposed. Melting low melting point glass 2
0 does not adhere, and conversely, other Si, 0.18, 18
It blends well and adheres to the top. Moreover, in this magnetic herad core, the Sendust alloy thin film 17 and the Sin
The film thickness of , 18 can be precisely set by controlling the sputtering speed, and the parent air gear of the sendust alloy thin film.

プ間隔をこれらによってほぼ決定することができるO 尚以上の実施例では、接着剤である低融点ガラスとの濡
れ性向上を図る目的で810.を接合層に形成したが、
この発明は、その他にAu、O,やTie、等で形成し
てもよく同様な効果が期待できる。また、この発明は、
コアを薄膜で形成し7たもの以外に、例、t ハ、セン
ダストやパーマロイ合金プロ、りに、ガラスを補強貼着
した場合でもよく、やはり同様な効果がある。
In the above embodiments, the 810. was formed on the bonding layer, but
In this invention, the same effect can be expected even if it is made of other materials such as Au, O, Tie, etc. Moreover, this invention
In addition to forming the core with a thin film, for example, the core may be reinforced with glass such as Sendust or Permalloy alloy, and the same effect can be obtained.

【図面の簡単な説明】[Brief explanation of drawings]

第1図は、従来一般的な磁気へソドコアの組付前の正面
図、第2図はその平面図、第8図はその組付体の正面図
、第4図〜第1θ図は、この発明の一実施例を示す磁気
へソドコアの各製造工程における斜視図或いは正面図で
ある。 11.12・・・・ 裁板、12’、18・・・・・・
貫通窓内面、ト 17・・・・・・コア薄膜(センダル冷金)、18・・
・・・接合層(Sin、 )、20・・・・・・接着ガ
ラス、 21・・・・・・コアブロリク組付体。 第1図 第4図 第2図 第3図 第5図 第6図 第7図 第9図
Fig. 1 is a front view of a conventional general magnetic hesode core before assembly, Fig. 2 is a plan view thereof, Fig. 8 is a front view of the assembled body, and Figs. FIG. 3 is a perspective view or a front view of each manufacturing process of a magnetic hesodo core showing an embodiment of the invention. 11.12... Cutting board, 12', 18...
Inner surface of through window, 17...Core thin film (Sendal cold gold), 18...
... Bonding layer (Sin, ), 20 ... Adhesive glass, 21 ... Corebrolik assembly. Figure 1 Figure 4 Figure 2 Figure 3 Figure 5 Figure 6 Figure 7 Figure 9

Claims (1)

【特許請求の範囲】[Claims] 強磁性体コアの表面に接合層を形成してガラスで接着す
る方法に関して、予めコアの接合面倶(全面に接合層を
形成後、コイル巻線挿通用貫通窓内面を構成する部分の
接合層を、工、チング処理により除去してコア地肌を露
出させて、ガラス接着させることを特徴とする磁気へソ
ドコアの製造方法。
Regarding the method of forming a bonding layer on the surface of a ferromagnetic core and bonding it with glass, the bonding layer is formed on the bonding surface of the core (after forming the bonding layer on the entire surface, the bonding layer is formed on the inner surface of the through-hole for coil winding insertion). A method for manufacturing a magnetic hesode core, characterized in that the core is removed by machining or ching to expose the core surface, and then bonded to glass.
JP1503483A 1983-01-31 1983-01-31 Production of magnetic head core Pending JPS59140622A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1503483A JPS59140622A (en) 1983-01-31 1983-01-31 Production of magnetic head core

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1503483A JPS59140622A (en) 1983-01-31 1983-01-31 Production of magnetic head core

Publications (1)

Publication Number Publication Date
JPS59140622A true JPS59140622A (en) 1984-08-13

Family

ID=11877545

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1503483A Pending JPS59140622A (en) 1983-01-31 1983-01-31 Production of magnetic head core

Country Status (1)

Country Link
JP (1) JPS59140622A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4846948A (en) * 1985-10-07 1989-07-11 Nippon Mining Company, Limited Method of producing magnetic films of Fe-Si-Al alloy

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4846948A (en) * 1985-10-07 1989-07-11 Nippon Mining Company, Limited Method of producing magnetic films of Fe-Si-Al alloy
US4894742A (en) * 1985-10-07 1990-01-16 Nippon Mining Company, Limited Thin-film laminated magnetic heads of Fe-Si-Al alloy

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