JPH0345442B2 - - Google Patents
Info
- Publication number
- JPH0345442B2 JPH0345442B2 JP10792282A JP10792282A JPH0345442B2 JP H0345442 B2 JPH0345442 B2 JP H0345442B2 JP 10792282 A JP10792282 A JP 10792282A JP 10792282 A JP10792282 A JP 10792282A JP H0345442 B2 JPH0345442 B2 JP H0345442B2
- Authority
- JP
- Japan
- Prior art keywords
- magnetic
- glass
- soft magnetic
- magnetic film
- amorphous
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000011521 glass Substances 0.000 claims description 29
- 238000002844 melting Methods 0.000 claims description 10
- 230000008018 melting Effects 0.000 claims description 10
- 238000004519 manufacturing process Methods 0.000 claims description 7
- 239000000696 magnetic material Substances 0.000 claims description 5
- 238000004544 sputter deposition Methods 0.000 claims description 3
- 239000010408 film Substances 0.000 description 12
- 229910000859 α-Fe Inorganic materials 0.000 description 7
- 238000000034 method Methods 0.000 description 5
- 238000005530 etching Methods 0.000 description 4
- 239000000463 material Substances 0.000 description 4
- 238000004804 winding Methods 0.000 description 4
- 125000006850 spacer group Chemical group 0.000 description 3
- 239000010409 thin film Substances 0.000 description 3
- 230000004907 flux Effects 0.000 description 2
- 230000008569 process Effects 0.000 description 2
- 229910001017 Alperm Inorganic materials 0.000 description 1
- 229910004298 SiO 2 Inorganic materials 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 239000013590 bulk material Substances 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 238000002425 crystallisation Methods 0.000 description 1
- 230000008025 crystallization Effects 0.000 description 1
- 238000009792 diffusion process Methods 0.000 description 1
- 238000001312 dry etching Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 238000003672 processing method Methods 0.000 description 1
- 229910000702 sendust Inorganic materials 0.000 description 1
Classifications
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
- G11B5/127—Structure or manufacture of heads, e.g. inductive
Description
【発明の詳細な説明】
本発明は磁気ヘツドおよびその製造方法に関す
る。DETAILED DESCRIPTION OF THE INVENTION The present invention relates to a magnetic head and a method of manufacturing the same.
近年の高密度記録技術の向上は著しいものがあ
るが、その要因として磁気テープの改良が上げら
れ、その保磁力の向上が、磁気ヘツド材料の転換
をせまつている。即ち、現在の短波長記録の磁気
ヘツドの代表としてあげられるビデオ用ヘツドを
取り上げると、現在は、その耐摩性、磁気ギヤツ
プの信頼性の点よりガラスモールドをほどこした
形のフエライトヘツドが主流である。しかし、フ
エライトの最大磁束密度Bmは、たかだか5000ガ
ウスであり、保磁力が1000エルステツドを越える
磁気テープに対しては、コアの磁気飽和が記録能
率の低下をきたしている。ここで提案されている
のが、フエライトよりも最大磁束密度Bmの高い
金属磁性材料である。センダスト、アルパームが
その候補として考えられているが、両者はいずれ
も耐摩耗性が小さいという致命的欠陥を持つてい
る。 High-density recording technology has improved significantly in recent years, and improvements in magnetic tapes have been cited as one of the reasons for this, and improvements in their coercive force are prompting a change in magnetic head materials. In other words, if we look at video heads, which are representative of the current magnetic heads for short wavelength recording, ferrite heads with a glass mold are currently mainstream due to their wear resistance and reliability of the magnetic gap. . However, the maximum magnetic flux density Bm of ferrite is at most 5000 Gauss, and for magnetic tapes with a coercive force exceeding 1000 Oersteds, the magnetic saturation of the core causes a decrease in recording efficiency. What is proposed here is a metallic magnetic material with a higher maximum magnetic flux density Bm than ferrite. Sendust and Alperm are being considered as candidates, but both have the fatal flaw of low wear resistance.
そこで検討されているのが、各種の組成と任意
に選べるアモルフアス磁性材料であり、その素材
自体もフエライトに近い耐摩耗性を有するものが
出現している。しかしアモルフアス磁性材料は、
その作成過程よりバルク材として得られず、薄帯
又は、薄膜状としてしか得られないため、磁気ヘ
ツドに作成することが非常に困難であつた。 Therefore, amorphous magnetic materials with various compositions that can be selected arbitrarily are being considered, and materials that have wear resistance similar to that of ferrite are emerging. However, amorphous magnetic materials
Due to the manufacturing process, it is not possible to obtain it as a bulk material, but only in the form of a ribbon or a thin film, so it has been extremely difficult to manufacture it into a magnetic head.
本発明は、上記従来の問題点に鑑みなされたも
ので軟磁性膜、特にアモルフアス薄膜で磁気ヘツ
ドを製造する方法およびアモルフアス薄膜によつ
て構成した磁気ヘツドを提供するものである。 The present invention has been made in view of the above-mentioned conventional problems, and provides a method for manufacturing a magnetic head using a soft magnetic film, particularly an amorphous thin film, and a magnetic head constructed from the amorphous thin film.
次に本発明の実施例を図面とともに詳細に説明
する。 Next, embodiments of the present invention will be described in detail with reference to the drawings.
先ず、第1図に示す様な、Mn−Zn多結晶フエ
ライトコア1をたんざく状にし、同コア1がU字
状になるように溝加工を行ない、同溝の開口部を
ガラス2で充てんする。 First, as shown in Fig. 1, a Mn-Zn polycrystalline ferrite core 1 is made into a tanzak shape, a groove is cut into the core 1 so that it becomes U-shaped, and the opening of the groove is filled with glass 2. do.
その時、後工程で使用する巻線窓3にはガラス
は充てんされない。そして、コアの開口面4は、
十分平担に研摩を行なう。 At that time, the winding window 3 used in the subsequent process is not filled with glass. The opening surface 4 of the core is
Polish thoroughly and evenly.
次に第2図に示すようにこの開口面4上にCo
−Nbを主成分とするアモルフアス膜5を高周波
スパツタリングにより、例えば30μm程度の厚み
になるよう形成する。 Next, as shown in Fig. 2, Co
- An amorphous film 5 containing Nb as a main component is formed by high frequency sputtering to a thickness of, for example, about 30 μm.
次に第3図に示すようにこのアモルフアス膜5
に、トラツクフオーマツトのマクスを作成し、ド
ライエツチングにより、必要とするトラツク形状
を作成する。すなわち、第3図において、6はエ
ツチングにより取り除かれた穴を示し、この穴6
は、ガラス2の部分にまで貫通している。 Next, as shown in FIG.
First, create a track format mask and use dry etching to create the desired track shape. That is, in FIG. 3, 6 indicates a hole removed by etching, and this hole 6
penetrates to the glass 2 part.
次に、第4図に示すようにこの穴6を充てんす
べく、アモルフアス膜5の結晶化温度より低い温
度で、低融点ガラス7を充てんし、かつアモルフ
アス膜5の上面を被覆(オーバーコート)する。 Next, as shown in FIG. 4, in order to fill the hole 6, a low melting point glass 7 is filled at a temperature lower than the crystallization temperature of the amorphous film 5, and the upper surface of the amorphous film 5 is covered (overcoated). do.
次に、第5図に示すように低融点ガラス7が形
成されたコアブロツク1を中心線に沿つて切断
し、その切断面8を十分平担に研摩し、その研摩
面にSiO2などの非磁性材料層をギヤツプスペー
サ9としてスパツタリングにより形成し、再度切
り離した左右コアを突き合せ、低融点ガラス7の
再溶融により、左右コアを接着する。この時低融
点ガラス7は、エツチング穴6により、低融点ガ
ラスのみでなく、最初モールドしたガラス2の中
へも拡散して行き、ガラス2も左右が再溶融し、
接合強度は増大する。 Next, as shown in FIG. 5, the core block 1 with the low melting point glass 7 formed thereon is cut along the center line, the cut surface 8 is polished sufficiently flat, and the polished surface is coated with a non-containing material such as SiO 2 . A magnetic material layer is formed as a gear spacer 9 by sputtering, the separated left and right cores are butted together again, and the low melting point glass 7 is remelted to bond the left and right cores together. At this time, the low melting point glass 7 diffuses not only into the low melting point glass but also into the initially molded glass 2 through the etching holes 6, and the left and right sides of the glass 2 are remelted.
Bond strength increases.
以後の工程は通常のフエライトのビデオヘツド
の加工法と同様に、チツプ単体に個別切断を行な
い、ヘツドの前面を所定のギヤツプデプスになる
まで研摩を行ない(この場合、ギヤツプデプスは
アモルフアス膜厚に相当する)磁気ヘツドを第6
図に示すように完成させる。 The subsequent process is similar to the processing method for normal ferrite video heads, in which each chip is individually cut and the front surface of the head is polished until it reaches a predetermined gear depth (in this case, the gear depth corresponds to the amorphous film thickness). ) the magnetic head 6th
Complete as shown.
第6図の磁気ヘツドは、一対のコア1,1′の
切欠部を有する端面どうしが接合されて窓部3が
形成され、前記窓部3の開口部側にガラス層2が
充填され、前記ガラス層2の上面に磁気ギヤツプ
用のスペーサ9を有する軟磁性アモルフアス膜5
が形成されたものである。 In the magnetic head shown in FIG. 6, a window 3 is formed by joining the cutout end surfaces of a pair of cores 1 and 1', and a glass layer 2 is filled on the opening side of the window 3. A soft magnetic amorphous film 5 having a spacer 9 for a magnetic gap on the upper surface of the glass layer 2
was formed.
また、第6図より明らかなように、テープ摺動
面はアモルフアス膜5と低融点ガラス7で充てん
されたエツチング穴6とで形成され、テープ摺動
面においてエツチング穴6内の低融点ガラス部が
凹部となり、アモルフアス膜5の上面は凸部とな
るため何んらの支障は生じない。また、最初コア
1の溝の開口部に形成したガラス2上にエツチン
グパターンを形成したため、低融点ガラスの拡散
によりモールドガラス2が再容融し強固な接着が
可能となり、テープ走行時においても、ギヤツプ
崩れの無い信頼性の高いギヤツプを形成すること
が出来る。また巻線窓3は、ガラスにより充てん
されることなく、巻線は容易に行なえる。 Further, as is clear from FIG. 6, the tape sliding surface is formed of an amorphous film 5 and an etched hole 6 filled with low melting point glass 7, and the low melting point glass portion in the etching hole 6 is formed on the tape sliding surface. Since the upper surface of the amorphous film 5 becomes a convex portion and the upper surface of the amorphous film 5 becomes a convex portion, no problem occurs. In addition, since the etching pattern was formed on the glass 2 that was initially formed at the opening of the groove of the core 1, the mold glass 2 was remelted by the diffusion of the low melting point glass, allowing for strong adhesion, even when the tape was running. A highly reliable gap without gap collapse can be formed. Further, the winding window 3 is not filled with glass, and winding can be easily performed.
これらの利点は、U字状コアの溝部の開口部を
ガラスにより充てんし、同開口部をアモルフアス
膜でもつて閉磁路とし、そのガラス部上に、トラ
ツクパターンを形成した本発明の磁気ヘツドの製
造方法を採用することによるもので、以後の分
割、再溶融によるギヤツプ形成時においても支障
が生じない。また、同方法によつて得られた本発
明の磁気ヘツドはテープ摺動面に軟磁性膜よりな
る均質の材料が形成されているとともにその耐久
性にすぐれた強度をもつ磁気ギヤツプを有するも
のである。 These advantages are achieved by manufacturing the magnetic head of the present invention in which the opening of the groove of the U-shaped core is filled with glass, the opening is made of an amorphous film to form a closed magnetic path, and a track pattern is formed on the glass. By adopting this method, there will be no problem during gap formation due to subsequent splitting and remelting. Furthermore, the magnetic head of the present invention obtained by the same method has a homogeneous material made of a soft magnetic film formed on the tape sliding surface, and has a magnetic gap with excellent durability and strength. be.
第1図、第2図、第3図、第4図および第5図
は本発明の一実施例における磁気ヘツドの製造方
法を説明するための斜視図、第6図は本発明の一
実施例による磁気ヘツドの斜視図である。
1……U字状フエライトコア、2……充てんガ
ラス、3……巻線窓、4……アモルフアススパツ
タ面、5……アモルフアス膜、6……エツチング
穴、7……低融点ガラス、8……ギヤツプ面、9
……ギヤツプスペーサ。
1, 2, 3, 4, and 5 are perspective views for explaining a method of manufacturing a magnetic head according to an embodiment of the present invention, and FIG. 6 is an embodiment of the present invention. FIG. DESCRIPTION OF SYMBOLS 1... U-shaped ferrite core, 2... Filled glass, 3... Winding window, 4... Amorphous amorphous sputtered surface, 5... Amorphous amorphous film, 6... Etched hole, 7... Low melting point glass, 8... Gap surface, 9
...Gear spacer.
Claims (1)
接合されて窓部が形成され、前記窓部の開口部側
にガラス層が充填され、前記ガラス層の上面に磁
気ギヤツプを有する軟磁性膜が形成された磁気ヘ
ツド。 2 軟磁性膜が軟磁性アモルフアスよりなること
を特徴とする特許請求の範囲第1項記載の磁気ヘ
ツド。 3 溝の開口部がガラスで充てんされたU字状コ
アに閉磁路を形成するように軟磁性膜を設ける工
程と、前記軟磁性膜にヘツドトラツク幅形成用の
穴を設ける工程と、少なくとも前記軟磁性膜に設
けた穴に低融点ガラスを充てんする工程と、その
後、U字状コアを前記ヘツドトラツク幅形成用の
穴を通る位置から切断分割して一対のコアをつく
る工程と、前記一対のコアの分割面を平面かつ鏡
面の仕上げを行い、磁気ギヤツプ形成面とし、必
要な磁気ギヤツプ幅の厚さに応じたガラスなどの
非磁性材料層を設けた後、前記磁気ギヤツプ形成
面で重ね合わせた後、前記ガラスで1体に再接合
せしめる工程の後、前記磁性膜上から研摩を施
し、ヘツドトラツクパターンを露出せしめたテー
プ摺動面を有することを特徴とする磁気ヘツドの
製造方法。 4 軟磁性膜が軟磁性アモルフアスをスパツタリ
ングすることにより形成されることを特徴とする
特許請求の範囲第3項記載の磁気ヘツドの製造方
法。[Claims] 1. The end surfaces of a pair of cores each having a notch portion are
A magnetic head in which a window is formed by bonding, a glass layer is filled on the opening side of the window, and a soft magnetic film having a magnetic gap is formed on the upper surface of the glass layer. 2. The magnetic head according to claim 1, wherein the soft magnetic film is made of soft magnetic amorphous. 3. A step of providing a soft magnetic film so that the opening of the groove forms a closed magnetic path in a U-shaped core filled with glass, a step of providing a hole for forming a head track width in the soft magnetic film, and a step of providing at least the soft magnetic film with a hole for forming a head track width. a step of filling a hole provided in the magnetic film with low melting point glass, a step of cutting and dividing the U-shaped core from a position passing through the hole for forming the head track width to create a pair of cores, and a step of creating a pair of cores. The divided surface was finished to be flat and mirror-finished to serve as a magnetic gap forming surface, and a layer of non-magnetic material such as glass was provided depending on the thickness of the required magnetic gap width, and then the magnetic gap forming surfaces were overlapped. After that, after the step of rebonding them together with the glass, the magnetic film is polished to have a tape sliding surface with a head track pattern exposed. 4. The method of manufacturing a magnetic head according to claim 3, wherein the soft magnetic film is formed by sputtering soft magnetic amorphous amorphous.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP10792282A JPS58224420A (en) | 1982-06-23 | 1982-06-23 | Magnetic head and its production |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP10792282A JPS58224420A (en) | 1982-06-23 | 1982-06-23 | Magnetic head and its production |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS58224420A JPS58224420A (en) | 1983-12-26 |
JPH0345442B2 true JPH0345442B2 (en) | 1991-07-11 |
Family
ID=14471445
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP10792282A Granted JPS58224420A (en) | 1982-06-23 | 1982-06-23 | Magnetic head and its production |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS58224420A (en) |
Families Citing this family (12)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS61129717A (en) * | 1984-11-26 | 1986-06-17 | Sharp Corp | Production of magnetic head |
JPS62183012A (en) * | 1986-02-05 | 1987-08-11 | Matsushita Electric Ind Co Ltd | Magnetic head and its manufacture |
JPS62212905A (en) * | 1986-03-12 | 1987-09-18 | Matsushita Electric Ind Co Ltd | Magnetic head and its production |
FR2622335B1 (en) * | 1987-10-27 | 1990-01-26 | Thomson Csf | MAGNETIC HEAD FOR READING RECORDING AND METHOD OF MAKING |
US6356419B1 (en) | 1999-07-23 | 2002-03-12 | International Business Machines Corporation | Antiparallel pinned read sensor with improved magnetresistance |
US7023313B2 (en) * | 2003-07-16 | 2006-04-04 | Marvell World Trade Ltd. | Power inductor with reduced DC current saturation |
US7489219B2 (en) | 2003-07-16 | 2009-02-10 | Marvell World Trade Ltd. | Power inductor with reduced DC current saturation |
US7307502B2 (en) | 2003-07-16 | 2007-12-11 | Marvell World Trade Ltd. | Power inductor with reduced DC current saturation |
US7872454B2 (en) | 2003-08-21 | 2011-01-18 | Marvell World Trade Ltd. | Digital low dropout regulator |
US7760525B2 (en) | 2003-08-21 | 2010-07-20 | Marvell World Trade Ltd. | Voltage regulator |
US8324872B2 (en) | 2004-03-26 | 2012-12-04 | Marvell World Trade, Ltd. | Voltage regulator with coupled inductors having high coefficient of coupling |
US7190152B2 (en) | 2004-07-13 | 2007-03-13 | Marvell World Trade Ltd. | Closed-loop digital control system for a DC/DC converter |
-
1982
- 1982-06-23 JP JP10792282A patent/JPS58224420A/en active Granted
Also Published As
Publication number | Publication date |
---|---|
JPS58224420A (en) | 1983-12-26 |
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