JPS59139414A - Substrate positioning device - Google Patents

Substrate positioning device

Info

Publication number
JPS59139414A
JPS59139414A JP58013470A JP1347083A JPS59139414A JP S59139414 A JPS59139414 A JP S59139414A JP 58013470 A JP58013470 A JP 58013470A JP 1347083 A JP1347083 A JP 1347083A JP S59139414 A JPS59139414 A JP S59139414A
Authority
JP
Japan
Prior art keywords
substrate
positioning
positional deviation
image sensor
mark
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP58013470A
Other languages
Japanese (ja)
Inventor
Haruji Nakamura
中村 治司
Yoshinori Wada
義則 和田
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Priority to JP58013470A priority Critical patent/JPS59139414A/en
Publication of JPS59139414A publication Critical patent/JPS59139414A/en
Pending legal-status Critical Current

Links

Classifications

    • GPHYSICS
    • G03PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03FPHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F9/00Registration or positioning of originals, masks, frames, photographic sheets or textured or patterned surfaces, e.g. automatically
    • G03F9/70Registration or positioning of originals, masks, frames, photographic sheets or textured or patterned surfaces, e.g. automatically for microlithography

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Supply And Installment Of Electrical Components (AREA)
  • Control Of Position Or Direction (AREA)

Abstract

PURPOSE:To position a substrate accurately in a high speed, by positioning the substrate preliminarily and detecting its positional deviation with an image sensor to control a positioning table. CONSTITUTION:A substrate 11 is put in a guide groove 12 of a carrying-in part and is carried to a table 14 and is positioned onto a reference face 14a by a pressing piece 15. In case of accurate positioning, a position mark 11a provided preliminarily on the substrate 11 is measured by an image sensor 16 to detect the deviation in the carrying direction, and said table 14 is controlled to correct the position of the substrate 11 in accordance with this positional deviation quantity. With respect to this measurement of the positional deviation, the mark 11a is latched in a shift register 23 by said sensor 16 and shifted successively by a clock signal, and a counter 24 is stopped in the position of said mark 11a, and count counts are used as a measurement signal.

Description

【発明の詳細な説明】 産業上の利用分野 本発明は、プリント配線基板あるいは混成集積回路基板
等の基板を加工したり組立実装する場合に用いることの
できる基板位置決め装置に関するものである。
DETAILED DESCRIPTION OF THE INVENTION Field of the Invention The present invention relates to a board positioning device that can be used when processing, assembling and mounting boards such as printed wiring boards or hybrid integrated circuit boards.

従来例の構成とその問題点 従来における基板位置決め装置の一例を第1図に示す。Conventional configuration and its problems An example of a conventional substrate positioning device is shown in FIG.

この装置では、基板1は搬送ベルト2によって仮位置決
め部3に搬入される、ここで仮位置決めされた基板1は
、真空チャック4によって、吸着され、位置決めテーブ
ル6に移載される。さらに、シリンダー7によってl駆
動される可動片6によシ基準面8に押しつけられること
によシ。
In this apparatus, a substrate 1 is carried into a temporary positioning section 3 by a conveyor belt 2. The substrate 1 temporarily positioned here is sucked by a vacuum chuck 4 and transferred to a positioning table 6. Further, the movable piece 6 driven by the cylinder 7 is pressed against the reference surface 8.

位置決めされる。かくして位置決めされ加工された後の
基板1は、再度真空チャック4により搬出され、搬送ベ
ルト9により次の工程へ搬送される。
Positioned. After being positioned and processed in this manner, the substrate 1 is carried out again by the vacuum chuck 4 and transported to the next step by the transport belt 9.

しかし、このような従来の装置では、基板1が正確な長
方形あるいは正方形である場合には正確に位置決めがで
きるが、実際の基板1は各辺の直角および平行が保証さ
れておらず、特に基板1が小型で一辺の長さが帰かいも
のである場合には誤差が大きくなってしまう。たとえば
、これらの基板1をこの装置で位置決めすると基準面の
いずれの側に辺が当接するかにより位置決め誤差が発生
する。また、この装置であると、基板1の動きが不連続
であり1位置決めに時間がかかる。また。
However, although such conventional devices can accurately position the substrate 1 if it is an accurate rectangle or square, the actual substrate 1 cannot be guaranteed to be perpendicular and parallel on each side, and in particular, If 1 is small and the length of one side is the same, the error will become large. For example, when these substrates 1 are positioned using this device, positioning errors occur depending on which side of the reference surface the sides contact. In addition, with this device, the movement of the substrate 1 is discontinuous, and it takes time for one positioning. Also.

真空チャック4等による持ち換えがあり、搬送の信頼性
が低い。
Reliability of conveyance is low as there is a need to change the conveyance using a vacuum chuck 4 or the like.

発明の目的 本発明は、これらの従来の欠点を解消して、正確に位置
決めができ、しかも高速で高信頼性の位置決め装置を提
供することを目的とする。
OBJECTS OF THE INVENTION An object of the present invention is to eliminate these conventional drawbacks and provide a positioning device that is capable of accurate positioning, high speed, and high reliability.

発明の構成 本発明においては1位置決め基準面とそれに相対した押
し片を有する位置決めテーブルの上方あるいは下方に、
その位置決め基準面と平行な方向における基板の位置ず
れを測定するイメージセンサ−を設け、その測定出力に
より位置決めテーブルを制御するようにすることによっ
て、高精度でかつ高速に位置決めをするこ吉ができ高信
頼性の装置を実現するものである。
Structure of the Invention In the present invention, above or below a positioning table having a positioning reference surface and a pushing piece opposite thereto,
By installing an image sensor that measures the positional deviation of the board in a direction parallel to the positioning reference plane and controlling the positioning table using the measurement output, it is possible to perform positioning with high precision and high speed. This realizes a highly reliable device.

実施例の説明 以下、第2図に本発明の一実施例の基板位置決め装置を
示し説明する。この装置では、基板1は搬入部のガイド
溝12に入り椰V状態で搬送され、搬送フック13の矢
印1了a→17b→17c→17dの動きによって位置
決めテーブル14に搬入される。この時、基板1は押し
片15と押しバネ15aによって基準面14aに押し付
けられ、搬送方向と直角な方向および回転方向の位置決
めがなされる。
DESCRIPTION OF EMBODIMENTS A substrate positioning apparatus according to an embodiment of the present invention will be described below with reference to FIG. In this apparatus, the substrate 1 enters a guide groove 12 in the loading section and is conveyed in a palm V state, and is conveyed to the positioning table 14 by the movement of the conveying hook 13 in the direction of arrows 1→17b→17c→17d. At this time, the substrate 1 is pressed against the reference surface 14a by the pusher piece 15 and the pusher spring 15a, and is positioned in the direction perpendicular to the transport direction and in the rotational direction.

次に、基板11の一部に予め設けられ7ている位置合せ
マーク11aを位置決めテーブルの上方に設置したイメ
ージ七ンサー16で測定するこトニより、搬送方向の位
置ずれを測定ヰする。そして、その測定出力により位置
決めテーブル14を制御1して、その位置ずれ量に応じ
て位置決めテーブル14を矢印14bのごとく補正する
ことにより、上下左右および回転方向について正確にか
つ高速に位置決めをする。
Next, the positional deviation in the transport direction is measured by measuring the positioning mark 11a provided in advance on a part of the substrate 11 with an image sensor 16 installed above the positioning table. Then, the positioning table 14 is controlled 1 based on the measurement output, and the positioning table 14 is corrected as shown by the arrow 14b according to the amount of positional deviation, thereby accurately and quickly positioning the positioning table 14 in the vertical, horizontal, and rotational directions.

第4図にイメージセンサ−16による位置fれ測定のだ
めの回路の構成の一例を示す。基板1上の位置合せマー
ク11aをレンズ21を通して、−次元イメージセンサ
−22の上に投影し、これを電気信号に変換する。この
位置信号をスタート信号のタイミングによりシフトレジ
スター23にラッチし、次にクロック信号によって位置
信号を右方ヘシフトし出力する。同時に、カウンター2
4はスタート信号によりリセットし後、クロックをカウ
ントしてゆく。これは位置信号がシフトレジスター22
から出方され、カウンター24を停止させるまで続けら
れる。この停止した時のカウンター24のカウント内容
を位置決めテーブル14の補正を示す制御用の測定信号
として出力する。
FIG. 4 shows an example of the configuration of a circuit for measuring position f by the image sensor 16. The alignment mark 11a on the substrate 1 is projected onto the -dimensional image sensor 22 through the lens 21, and this is converted into an electrical signal. This position signal is latched in the shift register 23 according to the timing of the start signal, and then shifted to the right according to the clock signal and output. At the same time, counter 2
4, after being reset by a start signal, the clock is counted. This means that the position signal is from the shift register 22.
This continues until the counter 24 is stopped. The count content of the counter 24 at the time of this stop is output as a control measurement signal indicating correction of the positioning table 14.

かくして位置決めをし、所定の加工を終了した基板11
は、搬送フック13の一周期の運動によって、搬出部の
ガイド溝18に送り出される。
The substrate 11 thus positioned and subjected to the prescribed processing
is delivered to the guide groove 18 of the delivery section by one cycle of movement of the transport hook 13.

このようにして、イメージセンサ−16によって基板1
1の位置のずれを検出し、その出刃に応じて位置決めテ
ーブル14を制御することにより、基板11を正確にか
つ高速に正しく位置決めすることができる。
In this way, the substrate 1 is
By detecting the displacement of the position of the substrate 11 and controlling the positioning table 14 according to the edge protrusion, the substrate 11 can be correctly positioned accurately and at high speed.

発明の効果 以上のように、本発明によれば、基板を押し片と基準面
により上下方向と回転方向についてあらかじめ位置決め
し、さらにイメージセンサ−による基板の位置ずれ測定
をによって搬送方向に位置決めできるので、測定方向一
方向に限定することができ、基板を正確に高速で位置決
めすることができるとともに、測定の高速化と設備全体
のコスト低減を実現することができる。
Effects of the Invention As described above, according to the present invention, the substrate can be pre-positioned in the vertical direction and rotational direction using the push piece and the reference surface, and furthermore, it can be positioned in the transport direction by measuring the positional deviation of the substrate using an image sensor. , the measurement direction can be limited to one direction, and the board can be positioned accurately and at high speed, and the measurement speed can be increased and the cost of the entire equipment can be reduced.

【図面の簡単な説明】[Brief explanation of drawings]

第1図は従来例における基板位置決め装置を示す斜視図
、第2図は本発明の一実施例における基板位置決め装置
を示す斜視図、第3図は同装置において位置決めテーブ
ルに搬入された基板の状態を示す平面図、第4図は同装
置に用いられるイメージセンサ−を用いた位置ずれ量測
定装置の構成例を示すブロック図である。 11・・・・・・基板、11a・・・・・・位置合せマ
ーク、14位置決めテーブル、14a・・・・・・基準
面、16・・・・・・押し片、16・・・・・・イメー
ジセンサ−0代理人の氏名 弁理士 中 尾 敏 男 
ほか1名第4図 第6図 手続補正書(方N) 昭和68年6 月76日 2発明の名称 基板位置決め装置 3補正をする者 事件との関係      特  許   出  願  
人住 所  大阪府門真市大字門真1006番地名 称
 (582)松下電器産業株式会社代表者    山 
 下  俊  彦 4代理人 〒571 住 所  大阪府門真市大字門真1006番地松下電器
産業株式会社内 6補正命令の日付 7、補正の内容 図面の図番「第4図」、「第6図」、「第6図j「第7
図」をそれぞれ別。 ように「第1図」、「第2図」、「第3図」。 第4図」と補正します。
Fig. 1 is a perspective view showing a conventional substrate positioning device, Fig. 2 is a perspective view showing a substrate positioning device in an embodiment of the present invention, and Fig. 3 is a state of a substrate carried into a positioning table in the same device. FIG. 4 is a block diagram showing a configuration example of a positional deviation measurement device using an image sensor used in the same device. 11... Board, 11a... Alignment mark, 14 Positioning table, 14a... Reference surface, 16... Push piece, 16...・Name of Image Sensor-0 agent Patent attorney Toshio Nakao
and 1 other person Figure 4 Figure 6 Procedural amendment (Direction N) June 76, 1986 2 Name of the invention Board positioning device 3 Person making the amendment Relationship to the case Patent application
Address 1006 Oaza Kadoma, Kadoma City, Osaka Name (582) Matsushita Electric Industrial Co., Ltd. Representative Yama
Toshihiko Shimo 4 Agent 571 Address Matsushita Electric Industrial Co., Ltd., 1006 Oaza Kadoma, Kadoma City, Osaka Prefecture 6 Date of amendment order 7 Contents of amendment Drawing drawing number "Figure 4", "Figure 6", ``Figure 6j ``7th
Each figure is separate. "Figure 1", "Figure 2", "Figure 3". Figure 4” is corrected.

Claims (1)

【特許請求の範囲】[Claims] 相対して設置された基準面と押し片とを有して単面と平
行な方向における上記基板の位置ずれを光学的に測定す
るイメージセンサ−と、このイメージセンサ−による測
定出力に基いて上記位置決めテーブルを制御する制御手
段とを有する基板位置決め装置。
An image sensor that optically measures the positional deviation of the substrate in a direction parallel to the single surface by having a reference surface and a pushing piece installed opposite each other, and A substrate positioning device having a control means for controlling a positioning table.
JP58013470A 1983-01-28 1983-01-28 Substrate positioning device Pending JPS59139414A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP58013470A JPS59139414A (en) 1983-01-28 1983-01-28 Substrate positioning device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP58013470A JPS59139414A (en) 1983-01-28 1983-01-28 Substrate positioning device

Publications (1)

Publication Number Publication Date
JPS59139414A true JPS59139414A (en) 1984-08-10

Family

ID=11834017

Family Applications (1)

Application Number Title Priority Date Filing Date
JP58013470A Pending JPS59139414A (en) 1983-01-28 1983-01-28 Substrate positioning device

Country Status (1)

Country Link
JP (1) JPS59139414A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6331959A (en) * 1986-07-23 1988-02-10 Seikosha Co Ltd Work positioning device
JPS6457104A (en) * 1987-08-28 1989-03-03 Nikon Corp Measuring apparatus of amount of positional deviation of circular substrate

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6331959A (en) * 1986-07-23 1988-02-10 Seikosha Co Ltd Work positioning device
JPS6457104A (en) * 1987-08-28 1989-03-03 Nikon Corp Measuring apparatus of amount of positional deviation of circular substrate

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