JPS59138933A - 自動レンジ真空計 - Google Patents

自動レンジ真空計

Info

Publication number
JPS59138933A
JPS59138933A JP1294983A JP1294983A JPS59138933A JP S59138933 A JPS59138933 A JP S59138933A JP 1294983 A JP1294983 A JP 1294983A JP 1294983 A JP1294983 A JP 1294983A JP S59138933 A JPS59138933 A JP S59138933A
Authority
JP
Japan
Prior art keywords
range
pressure
switch
lowest
vacuum
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP1294983A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0345333B2 (OSRAM
Inventor
Yoshiichi Tamura
田村　芳一
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Canon Anelva Corp
Original Assignee
Canon Anelva Corp
Anelva Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Canon Anelva Corp, Anelva Corp filed Critical Canon Anelva Corp
Priority to JP1294983A priority Critical patent/JPS59138933A/ja
Publication of JPS59138933A publication Critical patent/JPS59138933A/ja
Publication of JPH0345333B2 publication Critical patent/JPH0345333B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L21/00—Vacuum gauges
    • G01L21/30—Vacuum gauges by making use of ionisation effects
    • G01L21/32—Vacuum gauges by making use of ionisation effects using electric discharge tubes with thermionic cathodes

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Measuring Fluid Pressure (AREA)
JP1294983A 1983-01-31 1983-01-31 自動レンジ真空計 Granted JPS59138933A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1294983A JPS59138933A (ja) 1983-01-31 1983-01-31 自動レンジ真空計

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1294983A JPS59138933A (ja) 1983-01-31 1983-01-31 自動レンジ真空計

Publications (2)

Publication Number Publication Date
JPS59138933A true JPS59138933A (ja) 1984-08-09
JPH0345333B2 JPH0345333B2 (OSRAM) 1991-07-10

Family

ID=11819526

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1294983A Granted JPS59138933A (ja) 1983-01-31 1983-01-31 自動レンジ真空計

Country Status (1)

Country Link
JP (1) JPS59138933A (OSRAM)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS621144U (OSRAM) * 1985-06-20 1987-01-07
JPS63132128A (ja) * 1986-11-21 1988-06-04 Japan Atom Energy Res Inst レンジホ−ルド付オ−トレンジ電離真空計

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS621144U (OSRAM) * 1985-06-20 1987-01-07
JPS63132128A (ja) * 1986-11-21 1988-06-04 Japan Atom Energy Res Inst レンジホ−ルド付オ−トレンジ電離真空計

Also Published As

Publication number Publication date
JPH0345333B2 (OSRAM) 1991-07-10

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