JPS59136964A - Manufacture of thick film resistor - Google Patents

Abstract

PURPOSE:To increase rated power, to improve reliability and to reduce noises by cutting and removing nodes among auxiliary electrodes and main electrodes and resistance value-trimming the nodes in an electrode, in which the auxiliary electrodes are set up to a pair of the main electrodes and a resistor arranged between the main electrodes and which is constituted as two terminal resistors. CONSTITUTION:When the resistance value of length l1-3 of a resistor 5 between a main electrode 1 and an auxiliary electrode 3 is R3, the resistance value of length l3-4 of the resistor 5 between auxiliary electrodes 3 and 4 R2 and the resistance value of length l2-4 of the resistor 5 between the auxiliary electrode 4 and a main electrode 2 R1, the ratios of each resistance value are determined by length l2-4, l3-4 and l1-3. R2, R3 are short-circuited by each electrode connecting section 6, 7 under an initial state, and a resistance value between the main electrodes 1, 2 is represented in R1. Resistance values can be brought to R1+R2 or R1+R3 or R1+R2+R3 by cutting the electrode connecting section 6 or the electrode connecting section 7 or both the electrode connecting sections 6, 7 on a resistance value-trimming, and the resistance values can be changed at three stages.

Description

DETAILED DESCRIPTION OF THE INVENTION (Industrial Application Field 9) The present invention relates to a method for manufacturing a thick film resistor for electronic circuit components.

(Conventional configuration and its problems) In recent years, thick film processes have been introduced in the field of consumer electronics, and many electronic components are being manufactured that take advantage of the characteristics of thick films. Among these, demand for thick-film resistors is large, with demands for smaller size and higher performance. A conventional thick film resistor manufacturing method will be described below.

FIG. 1 is a simple process flowchart of a conventional method for manufacturing a thick film resistor. FIG. 2 is a model diagram of a redundant state of a conventional resistor, in which 11 and 12 are electrodes, 13 is a resistor, and 14 is a mink groove with a resistance value of 1-IJ created by a laser device. Also, in the past, resistance value trimming was sometimes carried out by the land blasting method;
As shown in the figure, the shaded area J5 shows how the resistor is removed by sandblasting.

A method for manufacturing the thick Z resistor constructed as described above will now be described.

The basic manufacturing method is shown in Figure 1, Manufacturing Process Flowchart 1.
・However, if the first stage is the state of printing electrodes on the substrate and drying → firing → printing and drying the resistor → firing, the variation in resistance value in this state is generally about ±20%. However, as the resistor becomes smaller due to its size and area, the fluctuation width becomes larger and becomes approximately ±30%. In general, it is difficult to use electronic circuit components whose resistance value must be within ±5% of the desired resistance value, and especially when high precision is required, it must be within ±2%. This is the current situation.

By the way, in the first stage state, there is a variation of about ±30 factors, so the general distribution in this state is shown in FIG. In this figure, the desired resistance value is 10. , is expressed as a coefficient of O, but as can be seen from the distribution, it is distributed between a coefficient of 40 and 100%, and the average is approximately around a coefficient of 70. In order to adjust the resistance value of the first stage resistor having such a distribution to the desired resistance value, there is a second stage of resistance value trimming, in which the resistance value of the first stage is increased to the desired resistance value. I have to let it happen.

In general, the relationship between the resistance value and shape of a thick film resistor is as shown in Figure 5, where the width of the resistor is defined as the interval between the w1 electrodes, and t is the width of the resistor, and the unit area resistance including the thickness of the resistor is defined as It is known that if ρ is the resistance value R, the relational expression R-ρ×□ is given (however, the thickness t is included in ρ as a constant).

1. In order to make the resistance near 40% obtained in the first step to the desired resistance value of 100,
It must be changed by a factor of five. If this is determined from the above relational expression, the shape of the resistor must have a width of -71-. This situation is shown in FIG. 6, and the shaded portion 16 must be removed or disabled in this way.

However, this is theoretical; in reality, the resistance value is trimmed by a laser trimming method or a Zant blast method, so that the width of the remaining resistor becomes even narrower than the theoretical value. This situation is shown in A1 3 in Figure 2.
Shown in B of the figure.

In this way, in the conventional thick film resistor manufacturing method, it is necessary to make the resistor extremely thin by trimming the resistance value.
Since l'i was not achieved, (1) the rated power is significantly limited.

(22) Since it locally becomes extremely thin, current and flux increase occurs, reducing reliability.

(3) Since it becomes extremely thin locally, the noise becomes large and the noise characteristics of the used transducer are deteriorated.

There were drawbacks such as.

(From IJ, LI of I) The present invention solves the above-mentioned conventional drawbacks, and can achieve an increase in the rated power of thick film resistors, higher reliability, lower resistance, and lower noise. The object of the present invention is to provide a method for manufacturing a thick film resistor.

(Structure 9 of the Invention The present invention provides a thick film resistor in which at least one auxiliary electrode is provided on a pair of main electrodes and a resistor disposed between the main electrodes, and this auxiliary electrode is connected to any main electrode. connected 2
When trimming the resistance value of something configured as a terminal resistor, the connection point between this auxiliary IF and the main electrode is cut and removed to complete the resistance value trimming, or after cutting and division, the resistor is removed and the resistance value trimming is performed. This is a method for manufacturing a thick film resistor characterized by the following.

(Description of Embodiment) FIG. 7 is a diagram showing an embodiment of the present invention, in which 1.2 is the main electrode of the resistor, 3 and 4 are auxiliary electrodes, 5 is the resistor, and 6, 7
1 shows the connection portion between the auxiliary electrode and the main electrode, and this state is the state up to the firing process in FIG. 1, which is a manufacturing process diagram of a thick film resistor.

FIG. 8 shows a state in which the resistance value has been trimmed from the state shown in FIG.
The cutting groove 1o indicates the trimming groove of the resistor 5.

The operation of this embodiment configured as above will be explained. Resistance value R3 of the length tl-3 of the resistor 5 located between the main electrode] and the auxiliary 1L pole: 3 in the size W antibody 5, the auxiliary electrode 3
The resistance value of the length t3-4 of the resistor 5 located between and 4 is I
E2. If the resistance value of the length t2-4 of the resistor 5 between the auxiliary electrode 4 and the main electrode 2 is R1, the ratio of each resistance value is t2-4・t3-4・tl- Sarel determined by the length of 6. KokoteIdt2-4:13. :1l-3=l: 0.
The explanation will be made assuming that the setting is set at 2:01>J".At this time, the ratio of resistance values is R1:R2:R3=1:0.2:
0.1, but in the initial state R21R3 is short-circuited by each electrode connection part 6, 7, and the main electrode 1
, 2 is R1. Next, the resistance value 1・I
J Mink, by cutting the electrode connection part 6 or electrode connection part 7, or both electrode connection parts 6 and 7, the resistance value is R] 10R2, or R, 10R3, or Rl+R2
+R3, and the resistance value can be changed in three steps. If the initial resistance value R1 is 70% of the desired resistance value, by cutting the electrode connection parts 6 and 7. C,
The resistance value is R1 + R2 + R3 = 70 coefficient + (70 coefficient x 0.
2) + (70 x 01) = 91 and 99 coefficients can be obtained by trimming the resistor 5 to obtain the desired resistance value.

FIG. 8 shows this state, and the desired resistance value can be obtained with a very small amount of trimming.

In this way, the resistance value can be brought close to a desired resistance value simply by cutting the electrode connection portion, and it is also possible to change the resistance value to a desired resistance value. Further, FIG. 9 shows the manufacturing distribution of resistance values when the electrode connection portion 6 according to the present invention is simply cut off. In this figure, a is the same as the conventional manufacturing distribution shown in FIG. 4, and g is the distribution according to the present invention. As is clear from this figure,
It is possible to make the average value much closer to the desired resistance value than in the conventional example.

(Effects of the Invention) According to the present invention, by cutting the electrode connection portion of the auxiliary electrode, it is possible to approach the desired resistance value without cutting and removing the resistor. Resistance value trimming is possible by cutting.

(2) Since the resistor body is trimmed after the manufacturing distribution has been made extremely close to the desired resistance value, the amount of cutting and removal of the resistor can be small.

Electrically, this effect is as follows: (1) Since there are no locally thin parts in the resistor, the rated power can be increased.

(2) Reliability is improved because current concentration is eliminated.

In this case, there is no deterioration of current noise at all.

In this practical example, two auxiliary electrodes are used, but by providing a large number of auxiliary electrodes, it is possible to more precisely control the resistance value.

[Brief explanation of drawings]

Figure 1 is a manufacturing process diagram of a conventional thick film resistor, Figure 2 is a model diagram of a completed conventional resistor, Figure 3 is a model diagram of a resistor produced using the same sandblasting method, and Figure 4 is a diagram of the conventional initial resistance value. Fig. 5 is a conventional resistor model diagram, Fig. 6 is a conventional resistor trimming theoretical model diagram, Fig. 7 is a diagram showing an embodiment according to the present invention, and Fig. 8 is a diagram showing the same resistance value trimming. FIG. 9, which is a diagram showing a later example, is a manufacturing distribution diagram of resistance values of the present invention. ■, 2... Main electrode, 3, 4... Auxiliary electrode, 5...
Resistor, 6, 7... Electrode connection part, 8.9... Cutting groove of electrode connection part, 10... Trimming groove of resistor. Figure 1 Figure 2 Figure 3 Figure 4 Figure 5 Figure 6] 268- Figure 9 40 60 80 100 (%) AffiA
JL tobeki, raft inkstone

Claims (2)

[Claims] (1) A method for manufacturing a thick film resistor in which a desired resistance value is obtained by printing a resistor and a conductive electrode on a substrate, baking it, and then removing or cutting a portion of the resistor to perform so-called resistance value trimming. At least one auxiliary electrode is provided inside the two main electrodes, and this auxiliary electrode and the main mold 4
After arbitrarily connecting the resistor to the sand and printing and firing it so that the entire resistor becomes two terminal electrodes, when trimming one side of the resistor, the desired resistance value deviation value of the resistance value before resistance value trimming is determined. A method for manufacturing a thick film resistor, which comprises cutting the connection portion between the auxiliary electrode and the main electrode, which have been pre-frozen and frozen, and then trimming the resistor. (2) In a method for manufacturing a thick film resistor in which a resistor and a conductive electrode are printed on a substrate, fired, and then resistance value trimmed to obtain a desired resistance value, at least one or more resistors are printed on the inside of two main electrodes. An auxiliary electrode is provided, and the auxiliary electrode and the main electrode are connected as desired, and the entire resistor is printed so that it has two terminal electrodes. After firing, the resistance value is trimmed during resistance value trimming. A method for manufacturing a thick film resistor, which comprises trimming a resistor by cutting a connection between an auxiliary electrode and a main electrode, which are connected in advance according to a desired resistance value deviation value from a previous resistance value.