JPS59136953A - Composite element - Google Patents

Composite element

Info

Publication number
JPS59136953A
JPS59136953A JP1113983A JP1113983A JPS59136953A JP S59136953 A JPS59136953 A JP S59136953A JP 1113983 A JP1113983 A JP 1113983A JP 1113983 A JP1113983 A JP 1113983A JP S59136953 A JPS59136953 A JP S59136953A
Authority
JP
Japan
Prior art keywords
resin
elements
strain
force
conductor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP1113983A
Other languages
Japanese (ja)
Inventor
Kazuhisa Wada
和田 一久
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fuji Electric Co Ltd
Original Assignee
Fuji Electric Co Ltd
Fuji Electric Manufacturing Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fuji Electric Co Ltd, Fuji Electric Manufacturing Co Ltd filed Critical Fuji Electric Co Ltd
Priority to JP1113983A priority Critical patent/JPS59136953A/en
Publication of JPS59136953A publication Critical patent/JPS59136953A/en
Pending legal-status Critical Current

Links

Classifications

    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L25/00Assemblies consisting of a plurality of individual semiconductor or other solid state devices ; Multistep manufacturing processes thereof
    • H01L25/03Assemblies consisting of a plurality of individual semiconductor or other solid state devices ; Multistep manufacturing processes thereof all the devices being of a type provided for in the same subgroup of groups H01L27/00 - H01L33/00, or in a single subclass of H10K, H10N, e.g. assemblies of rectifier diodes
    • H01L25/04Assemblies consisting of a plurality of individual semiconductor or other solid state devices ; Multistep manufacturing processes thereof all the devices being of a type provided for in the same subgroup of groups H01L27/00 - H01L33/00, or in a single subclass of H10K, H10N, e.g. assemblies of rectifier diodes the devices not having separate containers
    • H01L25/065Assemblies consisting of a plurality of individual semiconductor or other solid state devices ; Multistep manufacturing processes thereof all the devices being of a type provided for in the same subgroup of groups H01L27/00 - H01L33/00, or in a single subclass of H10K, H10N, e.g. assemblies of rectifier diodes the devices not having separate containers the devices being of a type provided for in group H01L27/00
    • H01L25/0655Assemblies consisting of a plurality of individual semiconductor or other solid state devices ; Multistep manufacturing processes thereof all the devices being of a type provided for in the same subgroup of groups H01L27/00 - H01L33/00, or in a single subclass of H10K, H10N, e.g. assemblies of rectifier diodes the devices not having separate containers the devices being of a type provided for in group H01L27/00 the devices being arranged next to each other
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L24/00Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
    • H01L24/01Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto

Abstract

PURPOSE:To reduce strain-force applied to each element even when size is enlarged, and to apply strain-force uniformly to the elements by forming spaces not communicated with the surfaces of the elements and a conductor in a resin layer. CONSTITUTION:Spaces 12 are formed in regions, in which there is no element 4, 5 and common wiring conductor 3 or drawing conductor 8, through resin shells 11, and connecting sections for a buried resin 10 are reduced substantially. Consequently, a range of the resin 10 applying strain-force to the elements 5 is limited to not the whole resin but a region of (A) substantially, and strain- force is reduced. Strain-force applied to the elements can be equalized symmetrically because the shapes of the buried resins 10 surrounding each element 4, 5 can be brought close to a symmetry by properly varying the shape of a space section in a resin layer by adjusting the shape of a vessel 9.

Description

【発明の詳細な説明】 本発明は複数個の回路素子が内部で組立配線され樹脂封
止された複合素子に関する。
DETAILED DESCRIPTION OF THE INVENTION The present invention relates to a composite element in which a plurality of circuit elements are internally assembled and wired and sealed with resin.

このような複合素子は、金属もしくはセラミック等の基
板上にサイリスタ、ダイオードなど複数の半導体素子チ
ップが装着され、これらの半導体素子は共通に接続され
る電極もしくは単独にとり出される電極を備え、予め保
護容器等を介することなく直接ζこ樹脂モールドベして
1個の容器に収′容されたものである。この複合素子は
、複数個の半導体素子を含み、しかも信頼性に関しては
1個の半導体素子と同等もしくはそれ以上であることが
望まれる。
In such composite devices, multiple semiconductor device chips such as thyristors and diodes are mounted on a substrate made of metal or ceramic, and these semiconductor devices are equipped with electrodes that are connected in common or electrodes that can be taken out individually, and are protected in advance. The resin is directly molded into a single container without using a container or the like. This composite element includes a plurality of semiconductor elements, and is desired to have reliability equal to or higher than that of a single semiconductor element.

第1図はこの種の複合素子の一例を示し、金属からなる
冷却板1の上に接着された絶縁板2の上の共通配線3に
素子チップ4および5が下部電極6によって固着され上
部電極7および配線3には端部が外部端子となる引出し
導体8が接続されている。冷却板1および各素子を囲む
容器外壁9により形成される内部空間に埋込樹脂10が
充てんされている。しかしこのような複合素子は次のよ
うな欠点を有する。
FIG. 1 shows an example of this type of composite element, in which element chips 4 and 5 are fixed by a lower electrode 6 to a common wiring 3 on an insulating plate 2 bonded to a cooling plate 1 made of metal, and an upper electrode 7 and the wiring 3 are connected to a lead-out conductor 8 whose end becomes an external terminal. An embedding resin 10 is filled in an internal space formed by the cooling plate 1 and the container outer wall 9 surrounding each element. However, such a composite element has the following drawbacks.

(1)複合される素子の大きさが大きくなり、また素子
数が増えるにつれて充てんされる樹脂量が増大し、この
ため硬化時における樹脂の膨張、収縮により素子に加わ
る機械的歪力が増大し、素子の信頼性を損なう。
(1) As the size of the composite element increases and the number of elements increases, the amount of resin filled increases, and as a result, the mechanical strain applied to the element increases due to expansion and contraction of the resin during curing. , impairing the reliability of the device.

(2)素子間の電極配線が複雑となるとともに、素子t
こ加わる樹脂を介しての熱的2機械的歪力が場所的に不
均一となり、複合素子の良品率、信頼性を低くする。
(2) The electrode wiring between elements becomes complicated, and the
Thermal and mechanical strain forces applied through the resin become uneven locally, lowering the yield rate and reliability of the composite element.

このため、例えば20ysmX20πm角形のような大
きな寸法の素子を2個以上含む大容量複合素子を構成す
ることは従来不可能であった。
For this reason, it has conventionally been impossible to construct a large-capacity composite element including two or more large-sized elements, such as a 20ysm x 20πm square.

本発明は上述の欠点を除き、信頼性の高い複合素子を大
容量に対するものを含めて提供することを目的とする。
An object of the present invention is to eliminate the above-mentioned drawbacks and provide a highly reliable composite device including one for large capacity.

この目的は、一つの基板上に複数の回路素子が固定され
、各素子およびそれに接続される導体の外部端子部分を
除いた部分が樹脂層により封止されるものにおいて、樹
脂層の内部に素子および導体の表面に通じない空間が設
けられることによって達成される。
The purpose of this is to fix multiple circuit elements on one substrate, and to seal the parts of each element and the conductor connected to them with a resin layer, except for the external terminals. This is achieved by providing a space that does not communicate with the surface of the conductor.

以下図を引用して本発明の実施例について説明する。第
2図において第1図と共通の部分には同一の符号が付さ
れている。この複合素子では第1図において埋込み用の
樹脂10が充てんされていたところの、素子4,5およ
び共通配線導体3あるいは引出し導体8の存在しない領
域に樹脂殻11を介して空間12が設けられており、埋
込樹脂10の連結部分が実質的に小さくなっている。こ
の結果、例えば第2図の素子5に歪力を及ぼす樹脂10
の一範囲は樹脂全体でなく、実質的にAの領域ζこ限定
される。このため、各素・子に加わる歪力は低減される
。また、樹脂層中の空間部分の形状を容器9の形状を調
整することにより適宜変更して各素子4,5をとり囲む
埋込樹脂10の形状を対称的に、もしくは対称に近付け
るよう(こすることができるので素子に加わる歪力を対
称に、すなわち均一にすることができる。
Embodiments of the present invention will be described below with reference to the drawings. In FIG. 2, parts common to those in FIG. 1 are given the same reference numerals. In this composite element, a space 12 is provided through a resin shell 11 in an area where the elements 4 and 5 and the common wiring conductor 3 or the lead-out conductor 8 are not present, where the resin 10 for embedding is filled in FIG. Therefore, the connecting portion of the embedding resin 10 is substantially reduced. As a result, for example, the resin 10 exerts a strain on the element 5 in FIG.
The range of is not the entire resin, but is substantially limited to the area ζ of A. Therefore, the strain force applied to each element is reduced. In addition, the shape of the space in the resin layer is appropriately changed by adjusting the shape of the container 9, so that the shape of the embedded resin 10 surrounding each element 4, 5 is made symmetrical or close to symmetrical. Therefore, the strain force applied to the element can be made symmetrical, that is, uniform.

第3図(a) 、 (b)は本発明によりこのような空
間を形成する方法の一例を示し、容器外壁9に空間12
を有する部分13を結合させ、それ以外の部分14に樹
脂10を注入することによる。第4図(a) 、 (b
) 。
FIGS. 3(a) and 3(b) show an example of a method of forming such a space according to the present invention, in which a space 12 is formed on the outer wall 9 of the container.
This is done by bonding the portions 13 having the above and injecting the resin 10 into the other portions 14. Figure 4 (a), (b
).

(C)は別の方法を示し、内部が中空になった樹脂殻1
5を容器2の中に落とし込み、樹脂10を注入すること
による。樹脂殻15および第2図の樹脂殻11は埋込樹
脂と同じ材質であることが好まし10 埋込樹脂層の厚さは素子に対する湿気の侵入を防ぐため
に必要な厚さにさB、電力用複合素子の場合5朋以上で
あることが好ましい。しかし湿気の影響を防ぐために本
発明により設けられる空間には乾燥空気を封入すること
が望ましい。その場合、第2図あるいは第3図に示す開
いた空間12は、その中の気体を乾燥空気で置換した後
蓋によって密閉することが望ましい。
(C) shows another method, a hollow resin shell 1
5 into the container 2 and inject the resin 10. It is preferable that the resin shell 15 and the resin shell 11 in FIG. In the case of a composite element, it is preferable that the number is 5 or more. However, in order to prevent the influence of moisture, it is desirable to fill the space provided by the invention with dry air. In that case, it is desirable that the open space 12 shown in FIG. 2 or 3 be sealed with a lid after the gas therein is replaced with dry air.

以上述べたように本発明は複合素子の素子および内部配
線導体の存在しない部分の埋込樹脂をその埋込表面より
低い位置で除去して空間を形成するもので、これにより
寸法の大きな素子を用(、>たり、素子数を多くしたた
め複合素子全体の寸法が大きくなっても、各素子に加わ
る歪力は寸法の小さな複合素子の如く小さく、また素子
に対して均一に加わるようにすることができ、複合素子
のイ言頼性を向上させる。さらに埋込樹脂の一部が気体
で置換されているため、複合素子の重量が軽くなるとい
う付加的な効果が得られ、大容量複合素子において特に
その効果は大きい。
As described above, the present invention creates a space by removing the embedding resin in the parts of the composite element where the elements and internal wiring conductors are not present at a position lower than the embedding surface. Even if the overall size of the composite element increases due to the increase in the number of elements, the strain force applied to each element should be as small as a composite element with small dimensions, and be applied uniformly to the element. This improves the reliability of the composite element.Furthermore, since part of the embedded resin is replaced with gas, the additional effect of reducing the weight of the composite element is achieved, making it possible to create a large-capacity composite element. The effect is particularly large.

【図面の簡単な説明】[Brief explanation of the drawing]

第1図は従来の複合素子の一例を示す断面図、第2図は
本発明の一実施例による複合素子の断面断面図である。 1・・冷却板、2・・絶縁板、3・・共通配線、4,5
・・素子チップ、8・・・引出し導体、9 ・容器、1
0・・・埋込樹脂、12・・空間。
FIG. 1 is a sectional view showing an example of a conventional composite element, and FIG. 2 is a sectional view of a composite element according to an embodiment of the present invention. 1...Cooling plate, 2...Insulating plate, 3...Common wiring, 4,5
・Element chip, 8 ・Output conductor, 9 ・Container, 1
0...embedding resin, 12...space.

Claims (1)

【特許請求の範囲】[Claims] 1)一つの基板上に複数の回路素子が固定され、各素子
およびそれに接続される導体の外部端子部分を除いた部
分が樹脂層により封止されるものにおいて、樹脂層の内
部に素子および導体に通じない空間が設けられたことを
特徴とする複合素子。
1) In a circuit board in which multiple circuit elements are fixed on one substrate, and the parts of each element and the conductor connected to it except for the external terminal parts are sealed with a resin layer, the elements and conductors are inside the resin layer. A composite element characterized by having a space that does not lead to.
JP1113983A 1983-01-25 1983-01-25 Composite element Pending JPS59136953A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1113983A JPS59136953A (en) 1983-01-25 1983-01-25 Composite element

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1113983A JPS59136953A (en) 1983-01-25 1983-01-25 Composite element

Publications (1)

Publication Number Publication Date
JPS59136953A true JPS59136953A (en) 1984-08-06

Family

ID=11769684

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1113983A Pending JPS59136953A (en) 1983-01-25 1983-01-25 Composite element

Country Status (1)

Country Link
JP (1) JPS59136953A (en)

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61193471A (en) * 1985-02-22 1986-08-27 Hitachi Ltd Semiconductor device
JPH02130866A (en) * 1988-11-10 1990-05-18 Fuji Electric Co Ltd Semiconductor device
EP2144484A1 (en) * 2008-07-08 2010-01-13 Siemens Aktiengesellschaft Device with a casing and method for manufacturing the same
JP2017183656A (en) * 2016-03-31 2017-10-05 株式会社豊田自動織機 Semiconductor device
JP2017183657A (en) * 2016-03-31 2017-10-05 株式会社豊田自動織機 Semiconductor device

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61193471A (en) * 1985-02-22 1986-08-27 Hitachi Ltd Semiconductor device
JPH0351299B2 (en) * 1985-02-22 1991-08-06 Hitachi Ltd
JPH02130866A (en) * 1988-11-10 1990-05-18 Fuji Electric Co Ltd Semiconductor device
EP2144484A1 (en) * 2008-07-08 2010-01-13 Siemens Aktiengesellschaft Device with a casing and method for manufacturing the same
JP2017183656A (en) * 2016-03-31 2017-10-05 株式会社豊田自動織機 Semiconductor device
JP2017183657A (en) * 2016-03-31 2017-10-05 株式会社豊田自動織機 Semiconductor device

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