JPS5913676A - Bonded body of ceramic member and metal member and manufacture - Google Patents

Abstract

(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.

Description

DETAILED DESCRIPTION OF THE INVENTION [Technical Field of the Invention 1] The present invention relates to a joined body of a ceramic member and a metal member, and a method for manufacturing the same.

[Technical complications and other problems with the invention] Generally, as a method of joining a metal member to a ceramic member, as shown in FIG. A method is currently being used to avoid bonding by cutting through 43. Yono,, Relamic part is especially ulli of nitride and carbide properties! In the case of a chloride-based material, J shown in the cross-sectional view of Fig. 12, for example, a single-mouthed stepped portion 1a+ of the ceramic member 1, the gravity that forms,
A recess 2a is formed in the metal member 2 to match the step 1a, or the step 1a and the recess 2a are formed in reverse, and these recesses and recesses are joined together to form a joint. Even if you avoid it, you stay four in a row.

However, in the conventional methods J and C, since the coefficients of thermal expansion of the ceramic member and the metal member are different, the former method, J3 and J4, had the disadvantage that shearing force was generated at the joint surface, making the joint unstable.

In the method of joining, stress is likely to concentrate in the Jit part of the ceramic closure due to the difference in coefficient of thermal expansion, and stress tends to concentrate in the Jit part of the ceramic closure. In the case of 1), tension horns act in the direction of peeling at room temperature and in a state where the crystallinity has returned to 1.

``Object of the Invention'' The present invention solves these drawbacks. To provide a joined body J3 of a ceramic member and a metal part +A, in which stress due to the difference in coefficient of thermal expansion between the ceramic member and the metal member acts in the joining direction and has less stress concentration on the ceramic member, and a method for manufacturing the same. The purpose is to

[Summary of the Invention] The bonded body of the present invention includes a ceramic member having a bonding surface having a trapezoidal cross section and a metal part l having a bonding surface having a shape that matches the bonding surface. The method of the present invention is characterized in that a U ramic member having a trapezoidal cross-section joining surface is fitted with a C-joint, and a flat 1! ’C mating J with a slight distance from the 1st surface
The method is characterized in that a metal member is fitted into the recessed portion of the metal member, and the four parts are heated while the joint surface is fitted, and the gap is filled by thermal expansion of both members to join them.

Ceramic members C applied to the present invention include carbides such as silicon nitride, aluminum nitride, silica-based butane fluorides, couronic carbide, and titanium carbide, and borides of 1 and 1 small lanthanum carbides. Non-oxide type heramic j> J,
Oxide systems such as silicon oxide and alumina 1! These materials contain sintering aids such as oxidized metals and the like.

This invention (1) The shape of the ramic part H is defined as a trapezoidal joint surface. Note that the trapezoidal shape here refers to a cross section that is similar to a trapezoidal shape. Therefore, η In addition to trapezoidal shapes, it also includes pyramids or cones with the tip cut off to create a spindle shape.

The metal C applied to the present invention is copper, iron, 1.1/
Examples include intermediates, alloys, or mixtures of Niracle, Shirizoden, silver, cobalt, aluminum, etc. The shape (or shape that fits the joint surface of the ceramic member).

In the present invention, metal members are bonded to the sloped surfaces of these ceramic members at a slight distance from the flat portions of the top portions (15 and 11) and the bottom portions. When bonding, it is desirable to apply pressure from both ends. No. Practically speaking, it is highly preferable to place both parts on the 1st floor so that the upper member does not follow the gap created by thermal expansion due to gravity.

In addition, as a joining method, the convex surface of the ceramic member is pre-metalized, nickel plated, and the metal member is brazed.Although it is also possible to use the brazing method, the following method can be used to directly connect the ceramic member and the metal member. It is desirable to join.

In other words, the metal member is surface-treated with a binder such as oxygen, or the metal member contains a binder Lj (this is placed in contact with the ceramic member V, and heated in an inert gas such as nitrogen gas). d1, or binder.

When using a metal member that does not contain carbon or has not been treated with a binder, it is desirable to place the metal portion 44 in contact with the ceramic member and heat it in a gas atmosphere containing the binder.

The binder used in the present invention is one that forms a high alloy with metal, and includes oxygen, oxygen, phosphorus, silicon, and the like. These are selected as appropriate depending on the type of metal (a3) and the compatibility (U).For example, when the metal is copper, iron, or rim (the bonding agent is oxygen, ζ is suitable, and 9I is suitable for the use of normium.

, 1.1. (heated while avoiding contact between the opening of the metal part and the metal member). Suitable C.Example λ(, 1' When the metal is copper (-") 106) j:ll-C.

:1,k and the lamic member is non-oxide based such as silicon nitride1
′! In the case of Ramitsuku, will you fit the ceramic parts? (7
It is preferable to heat the metal part (A) to avoid contact with the metal part (A) containing a bonding agent (surface treatment or bonding agent). Contains oxides in ceramic parts!
Ru.

cL (1) The reason why the method of avoiding contact with the J8 is preferable is the above ().
There is a disadvantage that the bonding state partially deteriorates, and the method (" requires at least two heat treatments, whereas the method (" requires at least two heat treatments,
1617; This is because the three-stage lifting platform requires only one heat treatment.

[Embodiments of the invention” Next, embodiments of the present invention will be described.

FIG. 3 is a side view of an embodiment of the joined body of the present invention. In the figure, J5 shows a ceramic member 4 made of aluminum or the like with a trapezoidal step 1a formed thereon, and a metal member made of Tanopip copper or the like having four parts sized to fit into the ceramic member 4. It's been done. FIGS. 4 and 5 show another embodiment C'.

FIG. 6 is a perspective view for explaining the method of the present invention, and shows the slope 4b of the trapezoidal step /la of the ceramic member 4, and the top and bottom of the step. The metal member 5 is fitted with the concave portion 5a at a distance of 6 from the flat surface and heated.

By heating (metal thermally expands, it follows along the inclined surface 4a, so the gap is filled and a good bonding surface is obtained.

FIG. 7 shows a perspective view of the case where the cylindrical members are bonded and covered. Note that the symbols are the same as in FIG. 6.

(Effects of the Invention 1 As explained below, the bonded body of the present invention follows the thermal expansion of the metal along the inclined surface, so the stress increases, 4, /J cooling?) 11, -4 If tension is applied to the ramic part H (41-C) a stable joined body is obtained.

[Brief explanation of the drawing]

Figures 1 and 2 include a top view of a conventional joined body;
Figures 4 and 4 are small side views of an embodiment of the conjugated body of the present invention, and Figures 6 and 7 are perspective views of the method of the present invention, taken from a person with +11 brightness. 1.4... Ceramic member 2.5)...
......Metal member 4a...Step part/Ib......Slope 1)a...
・・・・・・・・・Concave part (5・・・・・・・・・・・・
...Gap < 7317) Representative Patent Attorney Kensuke Norichika (and 1 other person) Figure 1 Figure 2 1d2 Figure 3 Figure 4 Figure 5 Figure 6

Claims (1)

[Scope of Claims] (1) A relamic part opening having a concave or trapezoidal joint surface and a metal member having a joint surface having a shape that matches the joint surface, the respective surfaces being fitted together. A joined body with a metal member such as a ceramic member made by joining together. (2) A ceramic member with a bonding surface having a trapezoidal cross section h, and a slight distance d5 between the flat surface at the top and the above trapezoidal inclined surface.
8. A method for producing a combined ceramic member and a metal member, characterized in that the metal member on the right side of the fitting recess is fitted with the recess on the joint surface and then heated and joined. <3) A method for manufacturing a joined body of a ceramic member and a metal member according to claim 211', in which the gap between the ceramic member C and the metal part 4A is filled (joined) by thermal expansion due to heating. (/l ) The metal part +A contains a binder, and the method for manufacturing a joined body of a ceramic member and a metal member according to claim 2 or 3, wherein the metal part +A contains a binder and is directly joined to the ceramic member by the binder. (5) The metal member is surface-treated with a binder ('a method for manufacturing a joined body of a ceramic member and a metal member according to claim 2 or 3, in which the metal member is directly joined to the ceramic member. (6) ) A method for manufacturing a joined body of a ceramic member and a metal member according to any one of claims 2 to 5, which comprises joining the ceramic member and the metal member while applying a pressing force. 7) The pressing force is gravity h' (method for manufacturing a bonded body according to claim 6).