JPS59136639A - 塵埃濃度の測定法と測定器 - Google Patents
塵埃濃度の測定法と測定器Info
- Publication number
- JPS59136639A JPS59136639A JP1084783A JP1084783A JPS59136639A JP S59136639 A JPS59136639 A JP S59136639A JP 1084783 A JP1084783 A JP 1084783A JP 1084783 A JP1084783 A JP 1084783A JP S59136639 A JPS59136639 A JP S59136639A
- Authority
- JP
- Japan
- Prior art keywords
- gas
- light
- measured
- light emitting
- partition plate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000000428 dust Substances 0.000 title claims abstract description 43
- 238000000034 method Methods 0.000 title claims description 8
- 238000005192 partition Methods 0.000 claims abstract description 65
- 238000005259 measurement Methods 0.000 claims abstract description 35
- 238000007599 discharging Methods 0.000 claims description 2
- 210000000988 bone and bone Anatomy 0.000 claims 2
- 239000000463 material Substances 0.000 abstract 1
- 239000004065 semiconductor Substances 0.000 description 5
- 238000004140 cleaning Methods 0.000 description 3
- 230000003287 optical effect Effects 0.000 description 3
- 238000010586 diagram Methods 0.000 description 2
- 238000000691 measurement method Methods 0.000 description 2
- 238000009423 ventilation Methods 0.000 description 2
- 238000007796 conventional method Methods 0.000 description 1
- 230000002093 peripheral effect Effects 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
- G01N21/47—Scattering, i.e. diffuse reflection
- G01N21/49—Scattering, i.e. diffuse reflection within a body or fluid
- G01N21/53—Scattering, i.e. diffuse reflection within a body or fluid within a flowing fluid, e.g. smoke
- G01N21/532—Scattering, i.e. diffuse reflection within a body or fluid within a flowing fluid, e.g. smoke with measurement of scattering and transmission
Landscapes
- Physics & Mathematics (AREA)
- Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
- General Physics & Mathematics (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Optical Measuring Cells (AREA)
- Investigating Or Analysing Materials By Optical Means (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1084783A JPS59136639A (ja) | 1983-01-26 | 1983-01-26 | 塵埃濃度の測定法と測定器 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1084783A JPS59136639A (ja) | 1983-01-26 | 1983-01-26 | 塵埃濃度の測定法と測定器 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS59136639A true JPS59136639A (ja) | 1984-08-06 |
JPH0358056B2 JPH0358056B2 (enrdf_load_stackoverflow) | 1991-09-04 |
Family
ID=11761740
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP1084783A Granted JPS59136639A (ja) | 1983-01-26 | 1983-01-26 | 塵埃濃度の測定法と測定器 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS59136639A (enrdf_load_stackoverflow) |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS63111654U (enrdf_load_stackoverflow) * | 1987-01-12 | 1988-07-18 | ||
JP2008234416A (ja) * | 2007-03-22 | 2008-10-02 | Nohmi Bosai Ltd | 煙感知器 |
KR20120106702A (ko) * | 2009-07-07 | 2012-09-26 | 엑스트랄리스 테크놀로지 리미티드 | 챔버 상태 |
-
1983
- 1983-01-26 JP JP1084783A patent/JPS59136639A/ja active Granted
Cited By (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS63111654U (enrdf_load_stackoverflow) * | 1987-01-12 | 1988-07-18 | ||
JP2008234416A (ja) * | 2007-03-22 | 2008-10-02 | Nohmi Bosai Ltd | 煙感知器 |
KR20120106702A (ko) * | 2009-07-07 | 2012-09-26 | 엑스트랄리스 테크놀로지 리미티드 | 챔버 상태 |
JP2012532386A (ja) * | 2009-07-07 | 2012-12-13 | エックストラリス・テクノロジーズ・リミテッド | チャンバコンディション |
US9111427B2 (en) | 2009-07-07 | 2015-08-18 | Xtralis Technologies Ltd | Chamber condition |
Also Published As
Publication number | Publication date |
---|---|
JPH0358056B2 (enrdf_load_stackoverflow) | 1991-09-04 |
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