JPS59135654U - semiconductor pressure transducer - Google Patents
semiconductor pressure transducerInfo
- Publication number
- JPS59135654U JPS59135654U JP3006483U JP3006483U JPS59135654U JP S59135654 U JPS59135654 U JP S59135654U JP 3006483 U JP3006483 U JP 3006483U JP 3006483 U JP3006483 U JP 3006483U JP S59135654 U JPS59135654 U JP S59135654U
- Authority
- JP
- Japan
- Prior art keywords
- semiconductor pressure
- pressure transducer
- glass stand
- base
- conversion element
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Abstract
(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.
Description
第１図は本考案の一実施例を示す断面図、第２図は第１
図の実施例を用いた圧力変換器の全体構成を示す断面図
、第３図Ａ、 Ｂは各部の材質・特性および寸法の規定
方法を説明するための図、第４図は本考案の他の実施例
を示す断面図である。
１・・・ガラスチューブ（ガラス台）、２・・・基盤、
３・・・圧力センサ（半導体圧力変換素子）、６・・・
ろう材。Fig. 1 is a sectional view showing one embodiment of the present invention, and Fig. 2 is a cross-sectional view showing an embodiment of the present invention.
A cross-sectional view showing the overall configuration of a pressure transducer using the embodiment shown in the figure, Figures 3A and 3B are diagrams for explaining the method of specifying the materials, characteristics, and dimensions of each part, and Figure 4 is a diagram showing the method for specifying the materials, characteristics, and dimensions of each part. FIG. 1...Glass tube (glass stand), 2...Base,
3... Pressure sensor (semiconductor pressure conversion element), 6...
Brazing material.
Claims (1)
の半導体圧力変換素子を載置したガラス台と、このガラ
ス台を固定したコバール材からなる基盤とを有し、上記
ガラス台は基盤に対しろう材により直接固着したことを
特徴とする半導体圧力変換器。It has a semiconductor pressure conversion element made of silicon single crystal as a base material, a glass stand on which the semiconductor pressure conversion element is mounted, and a base made of Kovar material to which the glass stand is fixed, and the glass stand is attached to the base. A semiconductor pressure transducer characterized by being directly fixed with a brazing material.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3006483U JPS59135654U (en) | 1983-03-02 | 1983-03-02 | semiconductor pressure transducer |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3006483U JPS59135654U (en) | 1983-03-02 | 1983-03-02 | semiconductor pressure transducer |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS59135654U true JPS59135654U (en) | 1984-09-10 |
Family
ID=30160936
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP3006483U Pending JPS59135654U (en) | 1983-03-02 | 1983-03-02 | semiconductor pressure transducer |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS59135654U (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH02141635A (en) * | 1988-11-22 | 1990-05-31 | Nippon Denso Co Ltd | Structure for attaching semiconductor type pressure sensor for high pressure |
| JPH0463042U (en) * | 1990-10-05 | 1992-05-29 | ||
| JPH11153501A (en) * | 1997-11-20 | 1999-06-08 | Yamatake Corp | Semiconductor pressure converter |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS53125879A (en) * | 1977-04-08 | 1978-11-02 | Toyoda Chuo Kenkyusho Kk | Pressure converter |
-
1983
- 1983-03-02 JP JP3006483U patent/JPS59135654U/en active Pending
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS53125879A (en) * | 1977-04-08 | 1978-11-02 | Toyoda Chuo Kenkyusho Kk | Pressure converter |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH02141635A (en) * | 1988-11-22 | 1990-05-31 | Nippon Denso Co Ltd | Structure for attaching semiconductor type pressure sensor for high pressure |
| JPH0463042U (en) * | 1990-10-05 | 1992-05-29 | ||
| JPH11153501A (en) * | 1997-11-20 | 1999-06-08 | Yamatake Corp | Semiconductor pressure converter |
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