JPS5913412A - Package structure of oscillator - Google Patents

Abstract

PURPOSE:To obtain an oscillator of high quality by incorporating and sealing an oscillation element and then adjusting the frequency of the sealed oscillation element from the external by laser trimming means. CONSTITUTION:A package consists of a glass tube 33 into which YAG laser is transmitted and a pair of terminal boards (external terminals) 34, 35 obtained by plating nickel on copper plates 34, 35. The oscillation element 32 is obtained by coating T-shaped electrode patterns 37, 38 on the opposed main surfaces of an LiTaO3 piezoelectric plate 36 and forming terminal electrodes 39, 40 like thick films on both end parts of the length direction. The oscillation element 32 is inserted into the glass tube 33 along its center axis without contacting with the glass tube 33 and the terminal electrodes 39, 40 of the element 32 are connected through a conductive bonding agent to the inside surfaces of terminal boards 34, 35 air-tightly jointed with the opening ends of the glass tube 33 through a bonding agent 41 for sealing. Consequently, prescribed high frequency field can be impressed to the electrode patterns 37, 38 through the terminal boards 34, 35 and the frequency adjustment of the sealed oscillation element 32 is executed by irradiating the YAG laser to the electrode patterns 7, 38 to remove a part of the patterns and reduce its mass.

Description

DETAILED DESCRIPTION OF THE INVENTION (a) Technical Field of the Invention The present invention relates to a package structure for a vibrator, and more particularly to a package structure in which a vibrating element is internally sealed and then its frequency can be adjusted from the outside by laser trimming means.

(b) Background of the technology When a suitable electrode pattern is applied to a piezoelectric material such as ice crystal or LiTaQ, and an alternating current electric field is applied to the electrode pattern, the piezoelectric material generates a stress with a frequency equal to the applied electric charge, and When the frequency of the applied electric field matches the natural frequency of the piezoelectric material, it resonates and produces strong vibrations.

Since the resonator that utilizes this phenomenon is small and has high performance,
Although it is widely used as an oscillation circuit or filter for communication devices, it requires adjustment to obtain a desired resonant frequency and a package that holds the vibrating element in a closed space.

(e) Prior art and problems Figures 1 and 2 are side cross-sections of a vibrator with a built-in vibrating element in a typical package with a conventional configuration, and Figure 3 is a diagram for explaining a strip-type vibrating element. .

In FIG. 1, 1 is a SIP type vibrator, 2 is a vibrating element, the package is constructed by hermetically bonding a metal case 5 to a substrate 4 provided with a pair of hermetic terminals 3, and the element 2
The electrode pattern 6 torn on each of the opposing principal surfaces is 1
It is connected to each terminal 3 via a pair of wires 7.

In FIG. 2, 11 is a chip type sensor, 12 is a strip type vibrating element, and the package is a ceramic substrate 1.
3 and a ceramic case 14 hermetically sealed, the electrode pattern 1 is adhered to each of the opposing main surfaces of the element 12.
5 connects one opposing end of the element 12 with electrodes 16 formed respectively, and a pair of conductor patterns 17 attached to the surface of the substrate 13 and connecting the 7 opposing electrodes 16.
Exposed to the outside of the package.

In FIG. 3, A is a perspective view, the opening is a diagram for explaining the magnitude of thickness-shear vibration, 21 is a strip type vibrating element, 22 is a LiTa0. Single crystal Xri, horizontal cut 9
The skewered piezoelectric plate 23 shows electrode patterns attached to each of the opposing main surfaces of the piezoelectric plate 22. The piezoelectric plate 22 with a thickness of H has a rectangular shape with the main surface perpendicular to the crystal X axis, and an electrode pattern 23 with a length t is attached to the entire width in order to eliminate anharmonic vibration. When a high frequency electric field is applied, the element 21 vibrates through its thickness in the direction of the arrow in FIG.

It is difficult to obtain a desired frequency in such a J-dynamic element 21 (and 2.12) using only a manufacturing technique such as cutting out the piezoelectric plate 22 and forming the electrode pattern 23 (and 6° 15). . Therefore, the mass that adjusts the frequency
The loading (massloading') method includes a method in which the mass of the electrode pattern is increased by means such as plating or vapor deposition, and a method in which the mass of the electrode pattern is reduced by using a YAG laser or the like. However, in the past, even though the frequency was adjusted using the above-mentioned method, it was necessary to complete the adjustment before the case was sealed in the package, and there was a drawback that the frequency shift could not be adjusted after the case was hermetically sealed. there were.

(d) Object of the Invention The present invention aims to provide a high-quality vibrator that eliminates the above-mentioned drawbacks.

(e) Structure of the Invention The above object is to provide an insulated tube made of glass or the like through which a YAG laser passes through, an electrode pattern for applying an electric field is adhered thereto, a vertical vibration element is built in, and each end of the insulated tube has a corresponding one. This is achieved by a vibrator package structure in which an external terminal connected to the electrode pattern and holding the element is hermetically sealed, and the electrode pattern extends substantially along the length direction of the insulating tube.

(f) Examples of the invention Hereinafter, the present invention will be explained in detail using the drawings.

4 is a side sectional view of a strip type vibrator according to an embodiment of the present invention, FIG. 5 is an exploded perspective view of the vibrator, and FIG. 6 is a modification of the terminal plate shown in FIG. 4. Side sectional view, 7th
The figure is a sectional side view of an IJ knob type moving element according to another embodiment of the present invention.

In FIGS. 4 and 5, 31 is a pendulum, 32 is a strip-type vibrating element, and the package is a glass tube 33 through which the YAG laser passes and a pair of nickel-plated copper plates. (External terminal) Consists of 34.35. In the vibrating element 32, T-shaped electrode patterns 37 and 38 are adhered to the opposing main surfaces of a LiTaO3 piezoelectric plate 36, respectively, and terminal electrodes 39 and 40 are formed as thick films at both lengthwise ends.

Terminal electrodes 39 and 40 of the element 32 are attached to the inner surfaces of the terminal plates 34 and 35, which are hermetically sealed to the open end of the glass tube 33 via the conductive adhesive (for example, silver paste) 42.
are connected to each other. As a result, electrode pattern 3
A predetermined high frequency electric field can be applied to 7 and 38 via the terminal plates 34 and 35. The frequency of the sealed vibrating element 32 can be adjusted by applying a YAG laser to the electrode patterns 37 and 38 through the entire glass tube 33. This is carried out by removing a portion of the electrode patterns 37 and 38 by irradiation and reducing the mass of one or both of the electrode patterns 37 and 38.

In FIG. 6, the φ:M terminal (external + Q terminal) 45 used in place of the terminals 8i and 35 in FIG. The material (41) is hermetically sealed. Therefore, in the vibrator 31 of FIG. 4, the vibrating element 32 and the glass tube 33 are
l must be the same length, but by using terminal #45, the glass tube 33 is shorter than the element 32.
It can be short, facilitates glass tube processing and device assembly work, and has the advantage of increasing the strength of the glass tube sealing portion.

In FIG. 7, the package of the vibrator 51 containing the aforementioned vibrating element 32 is a ceramic substrate 5 which is rectangular in plan view.
2, a glass lid body 53 that is hermetically sealed to the surface of the substrate 52 to form a cavity with a semicircular cross section, and a sealing adhesive 56 at both ends of the opening of the insulating tube, which is composed of the substrate 52 and the lid portion τ having the same length. It is composed of a pair of terminals 8i (external terminals) 54 and 55 that are hermetically connected to each other through the terminals. However, the lid body 53
is made of glass through which the YAG laser can pass through, the ri1 daughter plates 54 and 55 are conductors that have been treated to resist corrosion by applying nickel plating to copper plates, etc., and the element terminals 39 and 40 are made of a terminal plate using a conductive adhesive 57. 54 and 55, respectively.

Therefore, a predetermined high frequency electric field is applied to the electrode patterns 37 and 38 of the element 32 via the terminal plates 54 and 55, and the frequency adjustment is performed by reducing the mass of the electric standard pattern 37 using a YAG laser.

(g) Detailed Description of the Invention According to the present invention, it is possible to adjust the frequency of the vibrating element enclosed in the package, and the effect of making the vibrator high quality is remarkable. At the same time, the packages are made of materials cheaper than conventional ones, and include a chip type package as shown in the example and an SIP type package such as the one in which external leads are formed protruding from the terminal plate of the example (hereinafter referred to as the terminal plate to be prepared). It has the effect of being easy to select and create by changing it.

[Brief explanation of the drawing]

Figure 1 is a side sectional view showing a SIP type vibrator with a conventional configuration, Figure 2 is a side sectional view showing a chip type vibrator with a conventional configuration, and Figure 3 is a side sectional view showing a chip type vibrator with a conventional configuration.
The figure is a diagram for explaining a strip type vibrating element, Figure 4 is a side sectional view of a strip type vibrator according to an embodiment of the present invention, and Figure 5 is an exploded perspective view of the vibrator shown in Figure 4. , FIG. 6 is a side sectional view showing a modification of the terminal plate shown in FIG. 4,
FIG. 7 is a side sectional view of a strip type vibrator according to another embodiment of the present invention. However, in the figure, 1, 11, 21, 51 are vibrators,
2, 12, 22.32 are vibration elements, 6゜15.23.3
'7.38 is an electrode) turn, 33 is a glass tube (insulating tube), 34, 35, 45, 54゜55 is a terminal e<external terminal), 41.56 is an adhesive for airtight sealing, 42.57 52 represents a conductive adhesive, 52 represents a ceramic substrate, and 53 represents a glass lid. Akira 1 Diagram I Akira 2 Diagram 1 is f7 Diagram 3 (4) Mutual j (B) 4th Fukken 52 3rd Da 62 N7 Diagram

Claims (1)

[Claims] A vibrating element having an electrode pattern for applying an electric field attached thereto is built into an insulating tube made of glass or the like through which laser light can pass, and each end of the insulating tube is connected to the electrode pattern to hold the element. 4? Make sure that the external terminals are hermetically sealed and that the electrode pattern runs substantially along the length of the insulating tube. The characteristic package structure of the resonator.