JPS5913322A - 半導体装置の製造方法 - Google Patents

半導体装置の製造方法

Info

Publication number
JPS5913322A
JPS5913322A JP57122027A JP12202782A JPS5913322A JP S5913322 A JPS5913322 A JP S5913322A JP 57122027 A JP57122027 A JP 57122027A JP 12202782 A JP12202782 A JP 12202782A JP S5913322 A JPS5913322 A JP S5913322A
Authority
JP
Japan
Prior art keywords
region
diffusing
layer
semiconductor substrate
type
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP57122027A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6354212B2 (enExample
Inventor
Takeshi Suzuki
荘史 鈴木
Shigeki Sakuraba
桜庭　茂樹
Katsumi Akabane
赤羽根　克己
Tadashi Sakagami
阪上　正
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP57122027A priority Critical patent/JPS5913322A/ja
Publication of JPS5913322A publication Critical patent/JPS5913322A/ja
Publication of JPS6354212B2 publication Critical patent/JPS6354212B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H10P32/12—
    • H10P32/171—

Landscapes

  • Thyristors (AREA)
  • Mechanical Treatment Of Semiconductor (AREA)
JP57122027A 1982-07-15 1982-07-15 半導体装置の製造方法 Granted JPS5913322A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP57122027A JPS5913322A (ja) 1982-07-15 1982-07-15 半導体装置の製造方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP57122027A JPS5913322A (ja) 1982-07-15 1982-07-15 半導体装置の製造方法

Publications (2)

Publication Number Publication Date
JPS5913322A true JPS5913322A (ja) 1984-01-24
JPS6354212B2 JPS6354212B2 (enExample) 1988-10-27

Family

ID=14825774

Family Applications (1)

Application Number Title Priority Date Filing Date
JP57122027A Granted JPS5913322A (ja) 1982-07-15 1982-07-15 半導体装置の製造方法

Country Status (1)

Country Link
JP (1) JPS5913322A (enExample)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60145660A (ja) * 1984-01-09 1985-08-01 Mitsubishi Electric Corp 半導体装置の製造方法
JPS6260259A (ja) * 1985-09-05 1987-03-16 オイペック・オイロペーイッシェ・ゲゼルシャフト・フュール・ライスツングスハルプライター・エムベーハー・ウント・コンパニイ・コマンディートゲゼルシャフト 非対称サイリスタ及びその製法

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60145660A (ja) * 1984-01-09 1985-08-01 Mitsubishi Electric Corp 半導体装置の製造方法
JPS6260259A (ja) * 1985-09-05 1987-03-16 オイペック・オイロペーイッシェ・ゲゼルシャフト・フュール・ライスツングスハルプライター・エムベーハー・ウント・コンパニイ・コマンディートゲゼルシャフト 非対称サイリスタ及びその製法

Also Published As

Publication number Publication date
JPS6354212B2 (enExample) 1988-10-27

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