JPS59132118A - 光照射装置 - Google Patents

光照射装置

Info

Publication number
JPS59132118A
JPS59132118A JP526383A JP526383A JPS59132118A JP S59132118 A JPS59132118 A JP S59132118A JP 526383 A JP526383 A JP 526383A JP 526383 A JP526383 A JP 526383A JP S59132118 A JPS59132118 A JP S59132118A
Authority
JP
Japan
Prior art keywords
temperature
air
cooling
cooling air
bulb
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP526383A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6355857B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html
Inventor
Tatsumi Hiramoto
立躬 平本
Tetsuharu Arai
荒井　徹治
Hiroshi Shimizu
洋 清水
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Ushio Denki KK
Ushio Inc
Original Assignee
Ushio Denki KK
Ushio Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ushio Denki KK, Ushio Inc filed Critical Ushio Denki KK
Priority to JP526383A priority Critical patent/JPS59132118A/ja
Publication of JPS59132118A publication Critical patent/JPS59132118A/ja
Publication of JPS6355857B2 publication Critical patent/JPS6355857B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
    • H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Furnace Details (AREA)
JP526383A 1983-01-18 1983-01-18 光照射装置 Granted JPS59132118A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP526383A JPS59132118A (ja) 1983-01-18 1983-01-18 光照射装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP526383A JPS59132118A (ja) 1983-01-18 1983-01-18 光照射装置

Publications (2)

Publication Number Publication Date
JPS59132118A true JPS59132118A (ja) 1984-07-30
JPS6355857B2 JPS6355857B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1988-11-04

Family

ID=11606338

Family Applications (1)

Application Number Title Priority Date Filing Date
JP526383A Granted JPS59132118A (ja) 1983-01-18 1983-01-18 光照射装置

Country Status (1)

Country Link
JP (1) JPS59132118A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2004514269A (ja) * 2000-04-20 2004-05-13 東京エレクトロン株式会社 熱処理システム
WO2007059027A3 (en) * 2005-11-11 2007-07-19 Dsg Technologies Thermal processing system, components, and methods
JP2016132596A (ja) * 2015-01-20 2016-07-25 トヨタ自動車株式会社 単結晶製造装置

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0462048U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) * 1990-10-02 1992-05-27

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2004514269A (ja) * 2000-04-20 2004-05-13 東京エレクトロン株式会社 熱処理システム
WO2007059027A3 (en) * 2005-11-11 2007-07-19 Dsg Technologies Thermal processing system, components, and methods
JP2016132596A (ja) * 2015-01-20 2016-07-25 トヨタ自動車株式会社 単結晶製造装置

Also Published As

Publication number Publication date
JPS6355857B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1988-11-04

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