JPS59131509A - 炭化けい素の製造方法 - Google Patents

炭化けい素の製造方法

Info

Publication number
JPS59131509A
JPS59131509A JP58005761A JP576183A JPS59131509A JP S59131509 A JPS59131509 A JP S59131509A JP 58005761 A JP58005761 A JP 58005761A JP 576183 A JP576183 A JP 576183A JP S59131509 A JPS59131509 A JP S59131509A
Authority
JP
Japan
Prior art keywords
gas
plasma flame
silicon carbide
raw material
plasma
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP58005761A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6359967B2 (enrdf_load_stackoverflow
Inventor
Haruo Okamoto
岡本　治男
Motoyuki Yamada
素行 山田
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Shin Etsu Chemical Co Ltd
Original Assignee
Shin Etsu Chemical Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Shin Etsu Chemical Co Ltd filed Critical Shin Etsu Chemical Co Ltd
Priority to JP58005761A priority Critical patent/JPS59131509A/ja
Publication of JPS59131509A publication Critical patent/JPS59131509A/ja
Publication of JPS6359967B2 publication Critical patent/JPS6359967B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Carbon And Carbon Compounds (AREA)
JP58005761A 1983-01-17 1983-01-17 炭化けい素の製造方法 Granted JPS59131509A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP58005761A JPS59131509A (ja) 1983-01-17 1983-01-17 炭化けい素の製造方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP58005761A JPS59131509A (ja) 1983-01-17 1983-01-17 炭化けい素の製造方法

Publications (2)

Publication Number Publication Date
JPS59131509A true JPS59131509A (ja) 1984-07-28
JPS6359967B2 JPS6359967B2 (enrdf_load_stackoverflow) 1988-11-22

Family

ID=11620104

Family Applications (1)

Application Number Title Priority Date Filing Date
JP58005761A Granted JPS59131509A (ja) 1983-01-17 1983-01-17 炭化けい素の製造方法

Country Status (1)

Country Link
JP (1) JPS59131509A (enrdf_load_stackoverflow)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6311513A (ja) * 1986-06-30 1988-01-19 Agency Of Ind Science & Technol 焼結密度の高い炭化ケイ素粒子の製造方法
US5876683A (en) * 1995-11-02 1999-03-02 Glumac; Nicholas Combustion flame synthesis of nanophase materials

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5632316A (en) * 1979-08-20 1981-04-01 Nippon Telegr & Teleph Corp <Ntt> Manufacture of sic superfine particle
JPS56127709A (en) * 1980-03-10 1981-10-06 Hitachi Ltd Fine powder synthesizing furnace

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5632316A (en) * 1979-08-20 1981-04-01 Nippon Telegr & Teleph Corp <Ntt> Manufacture of sic superfine particle
JPS56127709A (en) * 1980-03-10 1981-10-06 Hitachi Ltd Fine powder synthesizing furnace

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6311513A (ja) * 1986-06-30 1988-01-19 Agency Of Ind Science & Technol 焼結密度の高い炭化ケイ素粒子の製造方法
US5876683A (en) * 1995-11-02 1999-03-02 Glumac; Nicholas Combustion flame synthesis of nanophase materials

Also Published As

Publication number Publication date
JPS6359967B2 (enrdf_load_stackoverflow) 1988-11-22

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