JPS59122086A - Solid-state image pickup device - Google Patents
Solid-state image pickup deviceInfo
- Publication number
- JPS59122086A JPS59122086A JP57232308A JP23230882A JPS59122086A JP S59122086 A JPS59122086 A JP S59122086A JP 57232308 A JP57232308 A JP 57232308A JP 23230882 A JP23230882 A JP 23230882A JP S59122086 A JPS59122086 A JP S59122086A
- Authority
- JP
- Japan
- Prior art keywords
- image pickup
- light
- solid
- light transmissive
- metallized
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- H—ELECTRICITY
- H04—ELECTRIC COMMUNICATION TECHNIQUE
- H04N—PICTORIAL COMMUNICATION, e.g. TELEVISION
- H04N23/00—Cameras or camera modules comprising electronic image sensors; Control thereof
- H04N23/50—Constructional details
- H04N23/54—Mounting of pick-up tubes, electronic image sensors, deviation or focusing coils
Landscapes
- Engineering & Computer Science (AREA)
- Multimedia (AREA)
- Signal Processing (AREA)
- Solid State Image Pick-Up Elements (AREA)
- Transforming Light Signals Into Electric Signals (AREA)
Abstract
Description
【発明の詳細な説明】
〔発明の分野〕
本発明は、COD等の固体撮像装置に係り、特に固体撮
像装置の外囲器に関する。DETAILED DESCRIPTION OF THE INVENTION [Field of the Invention] The present invention relates to a solid-state imaging device such as a COD, and more particularly to an envelope of a solid-state imaging device.
一般に、光電変換機能を有する固体撮像装置のパッケー
ジは、第1図および第2図に示すような構成をとる。す
なわち、セラミック容器1の内部底面に形成された導電
性メタライズ部に導電性接着材5を介して撮像素子3が
接着されており、この撮像素子3の電極とメタライズ配
線7とは、ボンディングワイヤ6により接続されている
。一方、撮像素子3の保護および光入射のために透明ガ
ラス板2が接着材4を介して容器開口部に固着、封止さ
れている。Generally, a package of a solid-state imaging device having a photoelectric conversion function has a configuration as shown in FIGS. 1 and 2. That is, the image sensor 3 is bonded to a conductive metallized portion formed on the inner bottom surface of the ceramic container 1 via a conductive adhesive 5, and the electrodes of the image sensor 3 and the metallized wiring 7 are connected to each other by bonding wires 6. connected by. On the other hand, a transparent glass plate 2 is fixed and sealed to the opening of the container via an adhesive 4 in order to protect the image sensor 3 and allow light to enter.
上述したような従来の固体撮像装置においては、セラミ
ック容器内部に撮像素子を接着した後、ボンディングワ
イヤにより電極の配線を行うため、透明ガラス板と撮像
素子の光入射面との間に空間が生じることは避けられな
い。そのため、透明ガラス板足付着したゴミや汚れなど
による素子特性への悪影響が生ずる。たとえば、透明ガ
ラス板を接着封止する以前に混入したゴミなどは封止後
移動する可能性があり、このため撮像特性の再現性が悪
くなったり、また、使用する光学系によって異った特性
を示す等の問題が生ずる。In conventional solid-state imaging devices as described above, electrodes are wired using bonding wires after the imaging element is bonded inside the ceramic container, which creates a space between the transparent glass plate and the light incident surface of the imaging element. That is inevitable. Therefore, dust and dirt adhering to the transparent glass plate have an adverse effect on the device characteristics. For example, dust that got mixed in before the transparent glass plate was sealed with adhesive may move after the glass is sealed, which may cause poor reproducibility of imaging characteristics or characteristics that may differ depending on the optical system used. Problems such as showing the
さらにまた、上述の従来型固体撮像装置においては、光
入射面の位置精度が悪(なるという欠点が))る。すな
わち、従来の固体撮像装置の製造は、撮像索子の接着、
ボンデインワイヤの接続、および透明ガラス板の接着、
という工程順で行われ、さらに透明ガラス板の接着は、
通常高温炉を通過させるなどの加熱処理により行われて
いるため、透明ガラス板の接着工程時に撮像素子の接着
材が溶解する場合がある。そのため素子に接続されたボ
ンディングワイヤの張力によって素子の位置が移動し5
、光入射面の位S−精度が悪くなるという問題がある。Furthermore, in the conventional solid-state imaging device described above, the positional accuracy of the light incident surface is poor. In other words, manufacturing of conventional solid-state imaging devices involves adhesion of imaging cords,
Connection of bond-in wires and adhesion of transparent glass plates,
The following process steps are followed, and the adhesion of the transparent glass plate is
Since this is usually done by heat treatment such as passing through a high-temperature furnace, the adhesive of the image sensor may melt during the process of bonding the transparent glass plate. Therefore, the position of the element moves due to the tension of the bonding wire connected to the element.
, there is a problem that the S-accuracy deteriorates as the light incidence surface approaches.
本発明は、上述の点に鑑みてなされたものであり、素子
特性の向上と光入射面の位置設定の高精度化が図られた
固体撮像装置°を提供することを目的とする。The present invention has been made in view of the above-mentioned points, and an object of the present invention is to provide a solid-state imaging device in which element characteristics are improved and positioning of a light incident surface is made highly accurate.
本発明は、撮像素子の保護および封止のための光透過性
体上にメタライズパターンを形成し、該撮像素子の光入
射面に上記光透過性体を密着固定することにより上記目
的を達成するものである。The present invention achieves the above object by forming a metallized pattern on a light-transmitting body for protecting and sealing an image sensor, and closely fixing the light-transparent body to the light incident surface of the image sensor. It is something.
すなわち、本発明の固体撮像装置は、メタライズパター
ンが形成された光透過性体と光入射面に電極が形成され
た撮像素子とが、前記メタライズパターンと前記撮像索
子の電極とを導電性接着材により接着することにより一
体化されてなることを特徴とするものである。That is, in the solid-state imaging device of the present invention, a light-transmitting body on which a metallized pattern is formed and an image sensor on which an electrode is formed on a light incident surface, the metallized pattern and the electrode of the imaging cord are electrically bonded together. It is characterized by being integrated by adhering with materials.
以下、本発明の一実施例について、図面を参照して説明
する。まず、第3図に、本発明で用いるメタライズパタ
ーンの形成さねた光透漫性体の平面図を示す。本図に示
すように、固体撮像装置の光入射面に設けられる光透過
性体2aの素子が接着される側の面にはメタライズパタ
ーンが形成されており、このメタライズパターンは、撮
像素子の電極(パッド)と同1−配列の電極群9とこの
電極9と接続された配線群10およびこの配線群10と
接続しさらに外部配線との接続に用いる接続用電極群1
1からなる。また、電極群9には導電性接着材12が設
けられ、この接着材12を介して撮像素子のパッドが接
続固着される。光透過性体としては、ガラス板やプラス
チック板を用い得る。接着材としては、Ag 、 Au
の微粉末を含む導電性エポキシ樹脂等が用いられ得る。An embodiment of the present invention will be described below with reference to the drawings. First, FIG. 3 shows a plan view of a light-transmissive body on which a metallized pattern used in the present invention is formed. As shown in this figure, a metallized pattern is formed on the surface of the light-transmissive body 2a provided on the light incident surface of the solid-state imaging device to which the elements are bonded, and this metallized pattern is formed on the electrodes of the imaging device. (pad), a group of electrodes 9 having the same arrangement, a group of wiring 10 connected to this electrode 9, and a group of connecting electrodes 1 connected to this group of wiring 10 and used for connection with external wiring.
Consists of 1. Further, a conductive adhesive 12 is provided on the electrode group 9, and a pad of an image sensor is connected and fixed via this adhesive 12. A glass plate or a plastic plate can be used as the light-transmitting body. As adhesive materials, Ag, Au
A conductive epoxy resin containing fine powder may be used.
第4図に、本発明の固体撮像装置の断面図を示す。本図
に示すように、撮像素子3のパッドと光透過性体2aの
メタライズ部とが、導電性w:着材12により接着固定
され、撮像素子と光透過性体とが一体化されている。撮
像索子と光透過性体との固着は、まず、素子のパッドと
接続すべき所望のメタライズ部に導電性接着材を設け、
接着部分が一致するように素子を配置し、次いで熱圧着
により上記光透過性体のメタライズ部と撮像索子のパッ
ドとを接着することにより行い得る。たとえば、素子の
パッドに合致するように光透過性体を載置し固定した後
に、高温炉を通過させて導電性接着材を融解し、これに
よりパッドとメタライズ部を接着することができる。FIG. 4 shows a cross-sectional view of the solid-state imaging device of the present invention. As shown in this figure, the pad of the image sensor 3 and the metallized portion of the light-transmitting body 2a are adhesively fixed with a conductive material 12, and the image sensor and the light-transparent body are integrated. . To fix the imaging probe and the light-transmitting body, first, a conductive adhesive is applied to the desired metallized portion to be connected to the pad of the element.
This can be done by arranging the elements so that the bonded portions coincide, and then bonding the metallized portion of the light-transmitting body and the pad of the imaging cord by thermocompression bonding. For example, after a light-transmitting body is placed and fixed so as to match the pad of the element, the conductive adhesive is melted by passing it through a high-temperature furnace, thereby bonding the pad and the metallized portion.
さらに、撮像素子の保護および機械的強度の向上を目的
として、樹脂材14により撮像素子3の周辺を固定封止
することが好ましい。Furthermore, for the purpose of protecting the image sensor and improving mechanical strength, it is preferable to fix and seal the periphery of the image sensor 3 with a resin material 14.
上記のような構成とすることにより、撮像素子と光透過
性体との一体化が達成される。With the above configuration, integration of the image sensor and the light-transmitting body is achieved.
本発明の固体撮像装置は、メタライズパターンの形成さ
れた光透過性体と撮像素子とが、導電性接着材を介して
一体的に固着されているので、撮像素子の光入射面と光
透過性体との間の空間が解消され、ゴミの付着、汚れに
起因する素子特性の低下を防止できる。さらに、素子の
電極とメタライズ部との接続が、導電性接着材を用いて
固着一体化してなされているので、光軸中心への素子の
設定の高精度化を図ることができる。さらにまた、撮像
装置の内部に不用の空間がt(くなるので装置を小型化
し得るという効果がある。In the solid-state imaging device of the present invention, the light-transmitting body on which the metallized pattern is formed and the imaging element are integrally fixed via a conductive adhesive. The space between the device and the body is eliminated, and it is possible to prevent deterioration of device characteristics due to the adhesion of dust and dirt. Furthermore, since the electrodes of the element and the metallized portion are connected integrally using a conductive adhesive, it is possible to achieve high accuracy in setting the element at the center of the optical axis. Furthermore, since the unnecessary space inside the imaging device is reduced to t, there is an effect that the device can be made smaller.
第1図および第2図は、各々従来の固体SP装置の断面
図および平面図であり、第3図は本発明の撮像装置にお
ける光透過性体の平面図であり、第4図は本発明の固体
撮像装置の断面図である。
1・・・セラミック容器、2・・・透明ガラス板、2a
・・・光透過性体、3・・・撮像素子、4,5・・・接
着材、6・・・ボンディングワイヤ、7・・・メタライ
ズ配線、8・・・リード、9・・・電極、10・・・配
線、11・・・外部接続用電極、12・・・導電性接着
材、13・・・光軸中心、14・・・樹脂材。
出願人代理人 猪 股 清図面の浄書(内
容に変更なし)
51 図
も 2 m
氾3 図
手続補正書(方式)
%式%
1、事件の表示
昭和57年特許願第232308号
2、発明の名称
固体撮像装置
3、補正をする者
事件との関係 特許出願人
(307)東京芝浦電気株式会社
委任状及び明細書、図面
、補正の内容
(1)委任状を別紙の通り補正する。1 and 2 are a cross-sectional view and a plan view of a conventional solid-state SP device, respectively, FIG. 3 is a plan view of a light-transmitting body in an imaging device of the present invention, and FIG. 4 is a plan view of a conventional solid-state SP device. FIG. 2 is a cross-sectional view of a solid-state imaging device. 1... Ceramic container, 2... Transparent glass plate, 2a
... Light-transmitting body, 3 ... Image pickup element, 4, 5 ... Adhesive material, 6 ... Bonding wire, 7 ... Metallized wiring, 8 ... Lead, 9 ... Electrode, DESCRIPTION OF SYMBOLS 10... Wiring, 11... External connection electrode, 12... Conductive adhesive, 13... Optical axis center, 14... Resin material. Applicant's agent Kiyoshi Inomata Engraving of the drawing (no change in content) 51 Figure also 2 m Flood 3 Draft procedure amendment (method) % formula % 1. Indication of the case 1982 Patent Application No. 232308 2. Invention Name: Solid-state imaging device 3, person making the amendment Relationship to the case Patent applicant (307) Tokyo Shibaura Electric Co., Ltd. Power of attorney, specification, drawings, and contents of amendments (1) The power of attorney is amended as shown in the attached sheet.
Claims (1)
射面に電極が形成された撮像素子とが、前記メタライズ
パターンと前記撮像素子の電極とを導電性接着材により
接着することにより一体化されてなることを特徴とする
固体撮像装置。 2、前記光透過性体がガラス板である、特許請求の範囲
第1項記載の固体撮像装置。[Scope of Claims] 1. A light-transmissive body on which a metallized pattern is formed and an image sensor on which an electrode is formed on a light incident surface, the metallized pattern and the electrode of the image sensor are bonded together using a conductive adhesive. A solid-state imaging device characterized by being integrated by. 2. The solid-state imaging device according to claim 1, wherein the light-transmitting body is a glass plate.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP57232308A JPS59122086A (en) | 1982-12-27 | 1982-12-27 | Solid-state image pickup device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP57232308A JPS59122086A (en) | 1982-12-27 | 1982-12-27 | Solid-state image pickup device |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS59122086A true JPS59122086A (en) | 1984-07-14 |
Family
ID=16937165
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP57232308A Pending JPS59122086A (en) | 1982-12-27 | 1982-12-27 | Solid-state image pickup device |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS59122086A (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
FR2570909A1 (en) * | 1984-09-26 | 1986-03-28 | Rca Corp | MOUNTING PASTILLE OF SEMICONDUCTOR IMAGER |
-
1982
- 1982-12-27 JP JP57232308A patent/JPS59122086A/en active Pending
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
FR2570909A1 (en) * | 1984-09-26 | 1986-03-28 | Rca Corp | MOUNTING PASTILLE OF SEMICONDUCTOR IMAGER |
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