JPS59115314U - 熱式質量流量計 - Google Patents

熱式質量流量計

Info

Publication number
JPS59115314U
JPS59115314U JP964383U JP964383U JPS59115314U JP S59115314 U JPS59115314 U JP S59115314U JP 964383 U JP964383 U JP 964383U JP 964383 U JP964383 U JP 964383U JP S59115314 U JPS59115314 U JP S59115314U
Authority
JP
Japan
Prior art keywords
flow rate
thermal mass
mass flow
flow meter
rate detection
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP964383U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0138494Y2 (enExample
Inventor
康夫 森
落合　洋
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Tokyo Keiso Co Ltd
Original Assignee
Tokyo Keiso Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tokyo Keiso Co Ltd filed Critical Tokyo Keiso Co Ltd
Priority to JP964383U priority Critical patent/JPS59115314U/ja
Publication of JPS59115314U publication Critical patent/JPS59115314U/ja
Application granted granted Critical
Publication of JPH0138494Y2 publication Critical patent/JPH0138494Y2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Measuring Volume Flow (AREA)
JP964383U 1983-01-25 1983-01-25 熱式質量流量計 Granted JPS59115314U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP964383U JPS59115314U (ja) 1983-01-25 1983-01-25 熱式質量流量計

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP964383U JPS59115314U (ja) 1983-01-25 1983-01-25 熱式質量流量計

Publications (2)

Publication Number Publication Date
JPS59115314U true JPS59115314U (ja) 1984-08-03
JPH0138494Y2 JPH0138494Y2 (enExample) 1989-11-17

Family

ID=30141099

Family Applications (1)

Application Number Title Priority Date Filing Date
JP964383U Granted JPS59115314U (ja) 1983-01-25 1983-01-25 熱式質量流量計

Country Status (1)

Country Link
JP (1) JPS59115314U (enExample)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102011120899B4 (de) * 2011-12-12 2015-08-20 Karlsruher Institut für Technologie Verfahren und Verwendung einer Vorrichtung zur Bestimmung des Massenstroms eines Fluids

Also Published As

Publication number Publication date
JPH0138494Y2 (enExample) 1989-11-17

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