JPS59115314U - Thermal mass flow meter - Google Patents

Thermal mass flow meter

Info

Publication number
JPS59115314U
JPS59115314U JP964383U JP964383U JPS59115314U JP S59115314 U JPS59115314 U JP S59115314U JP 964383 U JP964383 U JP 964383U JP 964383 U JP964383 U JP 964383U JP S59115314 U JPS59115314 U JP S59115314U
Authority
JP
Japan
Prior art keywords
flow rate
thermal mass
mass flow
flow meter
rate detection
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP964383U
Other languages
Japanese (ja)
Other versions
JPH0138494Y2 (en
Inventor
康夫 森
落合　洋
Original Assignee
東京計装株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 東京計装株式会社 filed Critical 東京計装株式会社
Priority to JP964383U priority Critical patent/JPS59115314U/en
Publication of JPS59115314U publication Critical patent/JPS59115314U/en
Application granted granted Critical
Publication of JPH0138494Y2 publication Critical patent/JPH0138494Y2/ja
Granted legal-status Critical Current

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  • Measuring Volume Flow (AREA)

Abstract

(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.

Description

【図面の簡単な説明】[Brief explanation of the drawing]

Ｐ　　　第１図及び第２図は、本考案に係る熱式質量流
眩　　置針の概略図である。第３図乃至第６図は流量検
［出パイプめ端面形状の各実施例を示す図である。 ｊ　　　図中、１・・・パイプ、２・・・ヒーター、３
，４・・・温二　　度センサー、５・・・温度差検出部
、６・・・突出部、７Σ　　・・・バイパス管、８・・
・絞り。 ニ 補正　昭５８．　５．２６ 図面の簡単な説明を次のように補正する。 明細書第５頁第８行の「第６図」を「第５図」と補正す
る。P Figures 1 and 2 are schematic diagrams of a thermal mass flow indicator according to the present invention. FIGS. 3 to 6 are diagrams showing embodiments of the shape of the end face of the flow rate detection pipe. j In the diagram, 1...pipe, 2...heater, 3
, 4...Temperature sensor, 5...Temperature difference detection section, 6...Protrusion part, 7Σ...Bypass pipe, 8...
・Aperture. 2. Correction 1982. 5.26 The brief description of the drawings is amended as follows. "Fig. 6" on page 5, line 8 of the specification is corrected to "Fig. 5."

Claims (1)

【実用新案登録請求の範囲】[Scope of utility model registration request] ヒーターを備えていて、このヒーターを挾む２点に温度
センサーが配されている流量検出パイフ内を流体が流れ
、かつ前記２点の各温度の差を杉出して流体の質量流量
を測定する熱式質量流量腎において、前記流量検出パイ
プをして、内向突Ｈ部を形成せしめたものとしたり偏平
形状のもの番ｚ形成することにより、流量検出パイプ内
壁面とｄ体との実質的接触面積を大ならしめるようにし
ｔ熱式質量流量計。Fluid flows through a flow rate detection tube that is equipped with a heater and temperature sensors are placed at two points between the heaters, and the mass flow rate of the fluid is measured by measuring the difference in temperature between the two points. In the thermal mass flow rate sensor, the flow rate detection pipe is formed with an inward protrusion H or is formed into a flat shape, so that substantial contact between the inner wall surface of the flow rate detection pipe and the d body is achieved. Thermal mass flowmeter is designed to increase the area.
JP964383U 1983-01-25 1983-01-25 Thermal mass flow meter Granted JPS59115314U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP964383U JPS59115314U (en) 1983-01-25 1983-01-25 Thermal mass flow meter

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP964383U JPS59115314U (en) 1983-01-25 1983-01-25 Thermal mass flow meter

Publications (2)

Publication Number Publication Date
JPS59115314U true JPS59115314U (en) 1984-08-03
JPH0138494Y2 JPH0138494Y2 (en) 1989-11-17

Family

ID=30141099

Family Applications (1)

Application Number Title Priority Date Filing Date
JP964383U Granted JPS59115314U (en) 1983-01-25 1983-01-25 Thermal mass flow meter

Country Status (1)

Country Link
JP (1) JPS59115314U (en)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102011120899B4 (en) * 2011-12-12 2015-08-20 Karlsruher Institut für Technologie Method and use of a device for determining the mass flow of a fluid

Also Published As

Publication number Publication date
JPH0138494Y2 (en) 1989-11-17

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