JPS59114467A - Amplifier circuit for measuring dc weak current - Google Patents

Amplifier circuit for measuring dc weak current

Info

Publication number
JPS59114467A
JPS59114467A JP57224393A JP22439382A JPS59114467A JP S59114467 A JPS59114467 A JP S59114467A JP 57224393 A JP57224393 A JP 57224393A JP 22439382 A JP22439382 A JP 22439382A JP S59114467 A JPS59114467 A JP S59114467A
Authority
JP
Japan
Prior art keywords
circuit
input
resistor
measuring
amplifier
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP57224393A
Other languages
Japanese (ja)
Other versions
JPH0480340B2 (en
Inventor
Noboru Okamoto
昇 岡本
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
ART DENSHI KOGYO KK
Original Assignee
ART DENSHI KOGYO KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by ART DENSHI KOGYO KK filed Critical ART DENSHI KOGYO KK
Priority to JP57224393A priority Critical patent/JPS59114467A/en
Publication of JPS59114467A publication Critical patent/JPS59114467A/en
Publication of JPH0480340B2 publication Critical patent/JPH0480340B2/ja
Granted legal-status Critical Current

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  • Amplifiers (AREA)
  • Measurement Of Current Or Voltage (AREA)
  • Tests Of Electronic Circuits (AREA)

Abstract

PURPOSE:To suppress an unnecessary AC component and to enable the extension of a lead wire of an input terminal side, by providing a bridge circuit for suppressing AC to an input side. CONSTITUTION:An amplifier circuit for measuring a DC weak current is constituted of a circuit A to be measured, an input circuit part B and an amplifier circuit C while the AC bridge circuit of the input circuit part B constituted of variable resistance VR1, resistances R1, R2 and condensers C1, C2. In addition, resistance R3 is connected to the condenser C2 in parallel. When the AC component in voltage induced between points a, b adjusts the variable resistance VR1 to take the balance of a bridge, voltage comes to almost zero between points c, d, and the input of an operation amplifier OP1 also comes to almost zero. As a result, the extension of the lead wire between T1-T3, T2-T4 of a measuring input terminal side is enabled.

Description

【発明の詳細な説明】 本発明は真空装置等に用いられる電離真空針の微弱イオ
ン電流を測定する回路等に適した直流微弱電流測定用増
幅回路に関する。
DETAILED DESCRIPTION OF THE INVENTION The present invention relates to an amplifier circuit for measuring a direct current weak current, which is suitable for a circuit for measuring a weak ion current of an ionization vacuum needle used in a vacuum device or the like.

従来、微弱なlμA以下の電流は演算増幅器等により増
幅して測定しており、その測定回路には演算増幅器を1
個または2〜3個組合せたインスツルメンテーションア
ンプを使用している。これ等、増幅回路は入力が平衡回
路の場合、同相除去比が非常に高く、入力に混入する交
流電力線より誘導により混入するハムおよび高周波ノイ
ズを充分に除去できる特長を持っている。
Conventionally, weak currents of less than 1μA have been amplified and measured using operational amplifiers, etc., and the measurement circuit includes one operational amplifier.
One or a combination of two or three instrumentation amplifiers are used. These amplifier circuits have a very high common-mode rejection ratio when the input is a balanced circuit, and have the feature of being able to sufficiently remove hum and high-frequency noise that is introduced by induction from the AC power line that enters the input.

しかし、測定回路として、入力が不平衡の場合も多くあ
り、この場合には誘導ハム、ノイズによりマスキングさ
れ測定が不能となるので前置増幅器等を被測定物に直結
し、かつ充分に入力回路をシールドして、あるレベルま
で増幅してからのち主増幅器に入力して測定する方法が
取られる。
However, in many cases, the input of the measurement circuit is unbalanced, and in this case it is masked by induced hum and noise, making measurement impossible. The method used is to shield the signal, amplify it to a certain level, and then input it to the main amplifier for measurement.

この方法を用い多量の被測定物を短時間内にシーケンシ
ャルに測定する場合、前置増幅器を被測定物の数量だけ
用意し、かつ高いレヘルの処で切換え順次測定すること
になる。しかしこの方法では、前置増幅器の数が多く、
装置全体も大きくなり、さらにコストの面でも高いもの
になる。また、精度の点では前置増幅器の誤差が測定値
にランダムに入ってくるなどの欠点もある。
When using this method to sequentially measure a large number of objects to be measured within a short period of time, preamplifiers corresponding to the number of objects to be measured are prepared, and the preamplifiers are switched at high levels to sequentially measure them. However, this method requires a large number of preamplifiers;
The entire device becomes larger and also becomes more expensive. In addition, in terms of accuracy, there are also drawbacks such as errors in the preamplifier randomly entering the measured values.

本発明の目的は上述の欠点を改善し、被測定物に直結す
る前置増幅器なしに、1台の測定増幅器で微弱電流を測
定できるようにした直流微弱電流測定用増幅回路を提供
することにある。
The purpose of the present invention is to improve the above-mentioned drawbacks and to provide an amplifier circuit for measuring weak DC currents, which can measure weak currents with a single measurement amplifier without the need for a preamplifier directly connected to the object to be measured. be.

前記目的を達成するために本発明による直流微弱電流測
定用増幅回路は被測定回路接続用端子間に、一方の経路
は第1の抵抗と第2の抵抗(測定回路グランド側の抵抗
)!、他方の経路は第1のコンデンサと第2のコンデン
サ(測定回路グランド側のコンデンサ)で構成された交
流ブリッジ回路を接続し、一方の経路の中点および他方
の経路の中点をそれぞれ演算増幅器の反転入力端子およ
び非反転入力端子に接続し、さらに前記第2のコンデン
サに並列に第3の抵抗を接続し、交流的に前記交流ブリ
ッジ回路を平衡化し、かつ、測定回路グランド側の被測
定回路接続用端子から演算増幅器の反転入力端子までの
直流抵抗と非反転入力端子までの直流抵抗を一致させた
入力回路を付加して第2の抵抗の両端に生じた微弱電流
による電位降下を演算増幅器の直流電圧入力となるよう
に構成しである。
In order to achieve the above object, the amplifier circuit for measuring direct current weak current according to the present invention is provided between terminals for connecting the circuit to be measured, and one path is connected to a first resistor and a second resistor (resistance on the ground side of the measuring circuit). , the other path connects an AC bridge circuit consisting of a first capacitor and a second capacitor (capacitor on the measurement circuit ground side), and connects the midpoint of one path and the midpoint of the other path to an operational amplifier, respectively. A third resistor is connected in parallel to the second capacitor, and the AC bridge circuit is balanced in an alternating current manner. By adding an input circuit that matches the DC resistance from the circuit connection terminal to the inverting input terminal of the operational amplifier and the DC resistance to the non-inverting input terminal, calculate the potential drop due to the weak current generated across the second resistor. It is configured to be a DC voltage input to the amplifier.

前記構成によれば従来の測定回路に比べ、経済的で、装
置が小形、かつ扱いが容易と−なり本発明の目的は完全
に達成される。
According to the above configuration, compared to conventional measuring circuits, it is economical, the device is small, and it is easy to handle, so that the object of the present invention is completely achieved.

以下、図面を参照して本発明をさらに詳しく説明する。Hereinafter, the present invention will be explained in more detail with reference to the drawings.

第1図は本発明による直流微弱電流測定用増幅回路の実
施例を示す測定回路図である。Aの部分は被測定回路、
Bの部分は入力回路部、Cの部分は通常の増幅回路をそ
れぞれ示している。
FIG. 1 is a measurement circuit diagram showing an embodiment of an amplifier circuit for measuring direct current weak current according to the present invention. Part A is the circuit under test,
Part B shows an input circuit section, and part C shows a normal amplifier circuit.

本分明は入力回路部に特徴があるので、その部分を中心
に説明する。図において、’r、−’r3..T2−T
 、は被測定回路の入力端子を示している。交流ブリッ
ジ回路は可変抵抗VR,および抵抗R1よりなる第1の
抵抗と、第2の抵抗R2と第1のコンデンサC1と、第
2のコンデンサC2とから構成されている。さらにコン
デンサC2に並列に第3の抵抗R3が接続されている。
Since the present invention is characterized by the input circuit section, the explanation will focus on that part. In the figure, 'r, -'r3. .. T2-T
, indicates the input terminal of the circuit under test. The AC bridge circuit includes a variable resistor VR, a first resistor consisting of a resistor R1, a second resistor R2, a first capacitor C1, and a second capacitor C2. Further, a third resistor R3 is connected in parallel to the capacitor C2.

a−b点間に誘起した電圧の自交流分は可変抵抗VR1
を調整してブリッジのバランスを取るとc−d点間は略
0とケリ、演算増幅器OP1の入力も略0となる。
The self-current component of the voltage induced between points a and b is variable resistor VR1.
When the bridge is balanced by adjusting , the value between points c and d becomes approximately 0, and the input to operational amplifier OP1 also becomes approximately 0.

直流分については演算増幅器op、の非反転入力端子側
(+)には抵抗R3を通してb点の電位が印加され、反
転入力端子側(−)にはb点に対するC点の電位すなわ
ち抵抗R2に流れた電流によって生じた電圧が印加され
るのと等しくなるので直流電流を測定することができる
Regarding the DC component, the potential at point b is applied to the non-inverting input terminal (+) of the operational amplifier op through resistor R3, and the potential at point C relative to point b, that is, resistor R2, is applied to the inverting input terminal (-). Since the voltage generated by the flowing current is equal to the applied voltage, direct current can be measured.

第1図の回路は、入力1nAとすると、出力を100m
Vの電圧に変換増幅する回路の例であり、最大1.99
9VのディジタルポルトメータDVMを接続することに
よりo、oi〜19.99nAまで測定できる。
The circuit in Figure 1 has an output of 100 m when the input is 1 nA.
This is an example of a circuit that converts and amplifies the voltage of V, and the maximum voltage is 1.99
By connecting a 9V digital portometer DVM, it is possible to measure o, oi to 19.99nA.

前記回路で直流電流の入力を確保するためコンデンサC
2に抵抗R3が並列接続されるので、交流ブリッジのバ
ランスをとるためにコンデンサc2のリアクタンスXc
2と抵抗R3の紙尻値をX c 2〈〈R3なる関係に
し、交流電力周波数50Hzまたは60Hzにおけるコ
ンデンサc2のリアクタンスをR3の1/1o以下とす
る必要がある。
Capacitor C is used to ensure DC current input in the circuit.
2 is connected in parallel with resistor R3, so in order to balance the AC bridge, reactance Xc of capacitor c2 is
It is necessary to set the relationship between X c 2 and the paper end value of resistor R3 as X c 2<<R3, and to set the reactance of capacitor c2 at 50 Hz or 60 Hz of AC power frequency to 1/1o or less of R3.

全体のシステムの応答速度が許すならばコンデンサC2
は抵抗R3に対し充分大きい容量を選べばそれだけ、交
流分の抑圧比が良好となる。
Capacitor C2 if the overall system response speed allows
The more a sufficiently large capacitance is selected for the resistor R3, the better the AC component suppression ratio will be.

上記回路において演算増幅器oP1の大刀例のバランス
用抵抗は、抵抗R2と交流ブリッジ回路の中点Cと演算
増幅器op、の反転入力端子の間に挿入されている抵抗
R5の和および抵抗R3となるのでR2+R5=R3に
なるように選ぶ。
In the above circuit, the balancing resistor of the operational amplifier oP1 is the sum of the resistor R2, the resistor R5 inserted between the midpoint C of the AC bridge circuit, and the inverting input terminal of the operational amplifier op, and the resistor R3. Therefore, choose so that R2+R5=R3.

演算増幅器の入力バランス抵抗はIOKΩ前後またはそ
れ以上の抵抗を選ぶことが普通であるが、第1図のnA
の測定の場合では、R2=R3=IMΩとしR5は省略
して直結としている。また演算増幅器OP1としてはバ
イアス電流ヵ月pAクラスの演算増幅器を選定する必要
がある。
Normally, the input balance resistor of an operational amplifier is selected to be around IOKΩ or more, but nA in Figure 1
In the case of measurement, R2=R3=IMΩ, and R5 is omitted and connected directly. Further, as the operational amplifier OP1, it is necessary to select an operational amplifier with a bias current of pA class.

もし、測定電流が1μ八オーダであれば前記回路でR2
=IKΩとすることができるのでR2+R5=R3=l
 OKΩ とするのが良い。この場合当然VR,,R,もIKΩ前
後としてコンデンサCI +  C2も3.3μF以上
に選ぶことになる。その場合の例を第2図に示しである
。なお、T3  a間の抵抗R4はコンデンサC,,C
2が被測定回路に対し直接負荷となるのを防ぐために挿
入したものである。
If the measured current is on the order of 1 μ8, R2
= IKΩ, so R2+R5=R3=l
It is better to set it to OKΩ. In this case, VR, , and R are naturally selected to be around IKΩ, and the capacitor CI + C2 is also selected to be 3.3 μF or more. An example of this case is shown in FIG. Note that the resistance R4 between T3a is the capacitor C,,C
2 was inserted to prevent it from becoming a direct load on the circuit under test.

演算増幅器○P1以下後段の回路では所定の増幅動作を
行い演算増幅器OP2よりディジタルメータDVMに入
力微弱電流に対応した出力が供給される。各演算増幅器
におけるVDD、Vssは電源。
The circuits downstream of the operational amplifier ○P1 perform a predetermined amplification operation, and the operational amplifier OP2 supplies an output corresponding to the input weak current to the digital meter DVM. VDD and Vss in each operational amplifier are power supplies.

^UTOOFF 5IETは自動オフセット零回路をそ
れぞれ示している。
^UTOOFF 5IET each shows an automatic offset zero circuit.

本図において被測定回路は被測定物1にその被測定物の
条件に応じた電流を直流電源DCPSより供給するよう
に構成されている。このような被測定回路において回路
のグランドを0点に取るような場合、b点は測定回路の
みの擬似的なグランドとなるが、この場合はVDD、V
SSの電源を含めてフローティングすればよく本考案の
回路に影響を与えることはない。
In this figure, the circuit under test is configured to supply a current to the object under test 1 according to the conditions of the object to be measured from a direct current power source DCPS. In such a circuit under test, if the ground of the circuit is set to 0 point, point b becomes a pseudo ground only for the measurement circuit, but in this case, VDD, V
As long as it is floating including the SS power supply, it will not affect the circuit of the present invention.

本発明に基づく回路を使用した場合、測定入力端子側の
T1−T3.T2−T4間は一般の絶縁電線を数m〜数
10m伸ばしても全く問題な(測定が可能である。ただ
しこの場合、浮遊容量が問題となる。すなわち、金波測
定回路の直流電源DCPSの出力をIOVとし、回路電
流1nAとすると回路抵抗は10の10乗Ωとなり、仮
に200pFの浮遊容量があるとすると時定数は2 s
ecとなる。この浮遊容量の変動が過渡現象を起こして
測定値に影響を与える。したがって浮遊容量を安定化さ
せるためにシールド線を使用した方が良い。
When using the circuit according to the present invention, T1-T3 on the measurement input terminal side. There is no problem at all even if a general insulated wire is stretched several meters to several tens of meters between T2 and T4 (measurement is possible. However, in this case, stray capacitance becomes a problem. In other words, the output of the DC power supply DCPS of the gold wave measurement circuit If IOV is IOV and the circuit current is 1 nA, the circuit resistance is 10 to the 10th power Ω, and if there is a stray capacitance of 200 pF, the time constant is 2 s.
It becomes ec. This variation in stray capacitance causes a transient phenomenon that affects the measured value. Therefore, it is better to use shielded wires to stabilize stray capacitance.

微弱電流を測定する目的で通常の増幅器の不平衡入力回
路にシールド線を使用してもその長さが長い場合不要交
流骨を充分除去することはできない。
Even if shielded wires are used in the unbalanced input circuit of an ordinary amplifier for the purpose of measuring weak currents, unnecessary AC bones cannot be sufficiently removed if the wires are long.

以上、詳しく説明したように本発明によれば不平衡入力
の直流微弱電流測定増幅回路において、入力側に交流を
抑圧するブリッジ回路を設けることにより、不要交流骨
を充分に(40d b以上)抑圧できるので、入力端子
側のリード線を延長す゛ることが可能になる。そのため
被測定部を第1図回路のように例えば50〜100個接
続し、スイッチSW、〜SWnにより順次切換えること
により短時間に多数の被測定物を測定することが可能と
なる。
As explained in detail above, according to the present invention, in the unbalanced input direct current weak current measurement amplifier circuit, by providing a bridge circuit for suppressing alternating current on the input side, unnecessary alternating current bones can be sufficiently suppressed (40 db or more). This makes it possible to extend the lead wire on the input terminal side. Therefore, it is possible to measure a large number of objects in a short time by connecting, for example, 50 to 100 parts to be measured as in the circuit shown in FIG. 1 and switching them sequentially using switches SW to SWn.

【図面の簡単な説明】 第1図は本発明による直流微弱電流測定用増幅回路の実
施、例を示す図、第2図は入力回路を示す回路図であ暮
。 11〜1n・・・被測定物 SW1〜SWn・・・スイッチ R1〜RIO・・・抵抗 VR,〜■R5・・・可変抵抗 01〜C4・・・コンデンサ 01′、C2°・・・コンデンサ(無極性)DCPS・
・・直流電源 DVM・・・ディジクルポルトメータ OPI + OF2・・・演算増幅器 特許出願人 アート電子工業株式会社 代理人 弁理士  井 ノ ロ  壽
BRIEF DESCRIPTION OF THE DRAWINGS FIG. 1 is a diagram showing an example of an amplifier circuit for measuring direct current weak current according to the present invention, and FIG. 2 is a circuit diagram showing an input circuit. 11-1n...Object to be measured SW1-SWn...Switch R1-RIO...Resistance VR, ~■R5...Variable resistor 01-C4...Capacitor 01', C2°...Capacitor ( Non-polar) DCPS・
...DC power supply DVM...Digicle portometer OPI + OF2...Operation amplifier Patent applicant Art Electronics Co., Ltd. Agent Patent attorney Hisashi Inoro

Claims (1)

【特許請求の範囲】[Claims] 被測定回路接続用端子間に、一方の経路は第1の抵抗と
第2の抵抗で、他方の経路は第1のコンデンサと第2の
コンデンサで構成された交流ブリッジ回路を接続し、一
方の経路の中点および他方の経路の中点をそれぞれ演算
増幅器の反転入力端子および非反転入力端子に接続し、
さらに前記第2のコンデンサに並列に第3の抵抗を接続
し、交流的に前記交流ブリッジ回路を平衡化し、かつ、
1511)窓回路グランド側の被測定回路接続用端子か
ら演算増幅器の反転入力端子までの直流抵抗と非反転入
力端子までの直流抵抗を一致させた入力回路を有し、第
2の抵抗の両端に生じた直流電圧を直流電圧入力とする
ことを特徴とする直流微弱電流測定用増幅回路。
An AC bridge circuit consisting of a first resistor and a second resistor on one path and a first capacitor and a second capacitor on the other path is connected between the terminals for connecting the circuit under test. connecting the midpoint of the path and the midpoint of the other path to an inverting input terminal and a non-inverting input terminal of the operational amplifier, respectively;
Further, a third resistor is connected in parallel to the second capacitor to balance the AC bridge circuit in terms of AC, and
1511) Window circuit It has an input circuit in which the DC resistance from the circuit under test connection terminal on the ground side to the inverting input terminal of the operational amplifier matches the DC resistance to the non-inverting input terminal, and An amplifier circuit for measuring direct current weak current, characterized in that the generated direct current voltage is used as a direct current voltage input.
JP57224393A 1982-12-21 1982-12-21 Amplifier circuit for measuring dc weak current Granted JPS59114467A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP57224393A JPS59114467A (en) 1982-12-21 1982-12-21 Amplifier circuit for measuring dc weak current

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP57224393A JPS59114467A (en) 1982-12-21 1982-12-21 Amplifier circuit for measuring dc weak current

Publications (2)

Publication Number Publication Date
JPS59114467A true JPS59114467A (en) 1984-07-02
JPH0480340B2 JPH0480340B2 (en) 1992-12-18

Family

ID=16813041

Family Applications (1)

Application Number Title Priority Date Filing Date
JP57224393A Granted JPS59114467A (en) 1982-12-21 1982-12-21 Amplifier circuit for measuring dc weak current

Country Status (1)

Country Link
JP (1) JPS59114467A (en)

Also Published As

Publication number Publication date
JPH0480340B2 (en) 1992-12-18

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