JPS5911439U - 半導体ウエフアの加熱装置 - Google Patents

半導体ウエフアの加熱装置

Info

Publication number
JPS5911439U
JPS5911439U JP10603182U JP10603182U JPS5911439U JP S5911439 U JPS5911439 U JP S5911439U JP 10603182 U JP10603182 U JP 10603182U JP 10603182 U JP10603182 U JP 10603182U JP S5911439 U JPS5911439 U JP S5911439U
Authority
JP
Japan
Prior art keywords
wafer
semiconductor wafer
heating device
semiconductor
transfer mechanism
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP10603182U
Other languages
English (en)
Japanese (ja)
Other versions
JPS6342528Y2 (enExample
Inventor
大沢　光明
長沢　和男
Original Assignee
エム・セテツク株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by エム・セテツク株式会社 filed Critical エム・セテツク株式会社
Priority to JP10603182U priority Critical patent/JPS5911439U/ja
Publication of JPS5911439U publication Critical patent/JPS5911439U/ja
Application granted granted Critical
Publication of JPS6342528Y2 publication Critical patent/JPS6342528Y2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Drying Of Solid Materials (AREA)
  • Application Of Or Painting With Fluid Materials (AREA)
  • Reciprocating Conveyors (AREA)
JP10603182U 1982-07-13 1982-07-13 半導体ウエフアの加熱装置 Granted JPS5911439U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP10603182U JPS5911439U (ja) 1982-07-13 1982-07-13 半導体ウエフアの加熱装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10603182U JPS5911439U (ja) 1982-07-13 1982-07-13 半導体ウエフアの加熱装置

Publications (2)

Publication Number Publication Date
JPS5911439U true JPS5911439U (ja) 1984-01-24
JPS6342528Y2 JPS6342528Y2 (enExample) 1988-11-08

Family

ID=30248294

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10603182U Granted JPS5911439U (ja) 1982-07-13 1982-07-13 半導体ウエフアの加熱装置

Country Status (1)

Country Link
JP (1) JPS5911439U (enExample)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61256721A (ja) * 1985-05-10 1986-11-14 Toshiba Corp 基板加熱装置

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS472738U (enExample) * 1971-01-27 1972-08-31
JPS5335906U (enExample) * 1976-09-03 1978-03-29
JPS54149471A (en) * 1978-05-16 1979-11-22 Nec Corp Object moving unit

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS472738U (enExample) * 1971-01-27 1972-08-31
JPS5335906U (enExample) * 1976-09-03 1978-03-29
JPS54149471A (en) * 1978-05-16 1979-11-22 Nec Corp Object moving unit

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61256721A (ja) * 1985-05-10 1986-11-14 Toshiba Corp 基板加熱装置

Also Published As

Publication number Publication date
JPS6342528Y2 (enExample) 1988-11-08

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