JPS59112425A - Magnetic recording medium - Google Patents
Magnetic recording mediumInfo
- Publication number
- JPS59112425A JPS59112425A JP57223212A JP22321282A JPS59112425A JP S59112425 A JPS59112425 A JP S59112425A JP 57223212 A JP57223212 A JP 57223212A JP 22321282 A JP22321282 A JP 22321282A JP S59112425 A JPS59112425 A JP S59112425A
- Authority
- JP
- Japan
- Prior art keywords
- magnetic
- layer
- vapor deposition
- base
- reel
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000002184 metal Substances 0.000 claims description 24
- 229910052751 metal Inorganic materials 0.000 claims description 24
- 239000010409 thin film Substances 0.000 claims description 17
- 229910000531 Co alloy Inorganic materials 0.000 claims description 4
- 238000010438 heat treatment Methods 0.000 abstract description 14
- 238000001704 evaporation Methods 0.000 abstract description 9
- 230000008020 evaporation Effects 0.000 abstract description 9
- 238000007740 vapor deposition Methods 0.000 abstract description 9
- 229910020630 Co Ni Inorganic materials 0.000 abstract description 6
- 229910002440 Co–Ni Inorganic materials 0.000 abstract description 6
- 229910045601 alloy Inorganic materials 0.000 abstract description 5
- 239000000956 alloy Substances 0.000 abstract description 5
- 238000000034 method Methods 0.000 abstract description 5
- 238000000137 annealing Methods 0.000 abstract description 2
- 229910002904 Bi-Co Inorganic materials 0.000 abstract 3
- 238000001771 vacuum deposition Methods 0.000 abstract 1
- 238000000151 deposition Methods 0.000 description 9
- 230000008021 deposition Effects 0.000 description 7
- 238000005259 measurement Methods 0.000 description 3
- 239000011230 binding agent Substances 0.000 description 2
- 230000008859 change Effects 0.000 description 2
- 239000010408 film Substances 0.000 description 2
- 230000004907 flux Effects 0.000 description 2
- 239000004952 Polyamide Substances 0.000 description 1
- 239000004962 Polyamide-imide Substances 0.000 description 1
- 239000004642 Polyimide Substances 0.000 description 1
- 230000008901 benefit Effects 0.000 description 1
- 238000010549 co-Evaporation Methods 0.000 description 1
- 229910017052 cobalt Inorganic materials 0.000 description 1
- 239000010941 cobalt Substances 0.000 description 1
- GUTLYIVDDKVIGB-UHFFFAOYSA-N cobalt atom Chemical compound [Co] GUTLYIVDDKVIGB-UHFFFAOYSA-N 0.000 description 1
- 230000000052 comparative effect Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 239000002241 glass-ceramic Substances 0.000 description 1
- 230000006872 improvement Effects 0.000 description 1
- 239000006247 magnetic powder Substances 0.000 description 1
- 150000002739 metals Chemical class 0.000 description 1
- 239000003973 paint Substances 0.000 description 1
- 238000000053 physical method Methods 0.000 description 1
- 229920002647 polyamide Polymers 0.000 description 1
- 229920002312 polyamide-imide Polymers 0.000 description 1
- -1 polyethylene terephthalate Polymers 0.000 description 1
- 229920000139 polyethylene terephthalate Polymers 0.000 description 1
- 239000005020 polyethylene terephthalate Substances 0.000 description 1
- 229920001721 polyimide Polymers 0.000 description 1
- 229920006254 polymer film Polymers 0.000 description 1
- 230000004044 response Effects 0.000 description 1
- 238000005245 sintering Methods 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
- 238000005292 vacuum distillation Methods 0.000 description 1
- 238000007738 vacuum evaporation Methods 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
Classifications
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
- G11B5/62—Record carriers characterised by the selection of the material
- G11B5/64—Record carriers characterised by the selection of the material comprising only the magnetic material without bonding agent
- G11B5/66—Record carriers characterised by the selection of the material comprising only the magnetic material without bonding agent the record carriers consisting of several layers
- G11B5/672—Record carriers characterised by the selection of the material comprising only the magnetic material without bonding agent the record carriers consisting of several layers having different compositions in a plurality of magnetic layers, e.g. layer compositions having differing elemental components or differing proportions of elements
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
- G11B5/84—Processes or apparatus specially adapted for manufacturing record carriers
- G11B5/85—Coating a support with a magnetic layer by vapour deposition
Landscapes
- Magnetic Record Carriers (AREA)
Abstract
Description
【発明の詳細な説明】
本発明は磁気記録媒体、特に非磁性支持体上にＣｏまた
はＣｏ−Ｎｉ金属磁性薄膜を形成してなる磁気記録媒体
に係る。DETAILED DESCRIPTION OF THE INVENTION The present invention relates to a magnetic recording medium, and particularly to a magnetic recording medium in which a Co or Co--Ni metal magnetic thin film is formed on a non-magnetic support.
従来一般の磁気記録媒体は、針状の磁性粉と高分子結合
剤を主体とする磁性塗料を非磁性支持体上に塗布して磁
性層を形成する。Conventionally, in general magnetic recording media, a magnetic layer is formed by applying a magnetic paint mainly composed of acicular magnetic powder and a polymeric binder onto a non-magnetic support.
これに対してＣｏ 、Ｆ＠ｒ Ｎｉの磁性金属或いはこ
れらの合金を真空蒸着、ス・母ツタリング、或いはイオ
ンシレーティング等のいわゆるフィジカル・ペーノＪ？
−・デポジション技術によって非磁性支持体上に金属磁
性薄膜を形成するようにした金属薄膜型磁気記録媒体が
脚光を浴びるに至っている。On the other hand, magnetic metals such as Co, F@rNi, or their alloys are deposited using so-called physical methods such as vacuum evaporation, sintering, or ion silating.
-Metal thin film type magnetic recording media, in which a metal magnetic thin film is formed on a nonmagnetic support using a deposition technique, have come into the spotlight.
この金属薄膜型磁気記録媒体は、前述した塗布型の磁気
記録媒体におけるように、非磁性の高分子結合剤が用い
られないことから高い残留磁束密度が得られ、またその
磁性層を極めて薄く形成することができることから高出
力且つ短波長応答性に優れているという利点がある。This metal thin film magnetic recording medium does not use a non-magnetic polymeric binder, unlike the coating-type magnetic recording media mentioned above, so it can obtain a high residual magnetic flux density, and the magnetic layer is formed extremely thin. It has the advantage of high output and excellent short wavelength response.
しかし々から、ｃｏ等の磁性金属を単に非磁性支持体上
に例えば蒸着しただけでは大きな抗磁力を有する磁性層
を得ることは難しい。However, it is difficult to obtain a magnetic layer having a large coercive force by simply depositing a magnetic metal such as cobalt on a non-magnetic support.
この種の金属磁性層において高抗磁力を有する磁性層を
形成する方法としては、斜め蒸着法によるものが考えら
れているが、この場合蒸着効率が低く生産性に劣るとい
う欠点がある。As a method for forming a magnetic layer having a high coercive force in this type of metal magnetic layer, an oblique vapor deposition method has been considered, but this method has the drawback of low vapor deposition efficiency and inferior productivity.
このような斜め蒸着によらず、はぼ垂直蒸着によっても
高い抗磁力を示し、且つ高い角型比を有する金属薄膜型
磁気記録媒体が、本出願人によって先に提供された。こ
の磁気記録媒体は、非磁性支持体上に下地層としてＢｉ
薄膜を被着した後、これの上にＣＯ等の蒸着膜による金
属磁性薄膜を形成するものである。The present applicant has previously provided a metal thin film type magnetic recording medium that exhibits high coercive force and has a high squareness ratio not only by such oblique deposition but also by vertical deposition. This magnetic recording medium has Bi as an underlayer on a non-magnetic support.
After the thin film is deposited, a metal magnetic thin film is formed thereon by vapor deposition of CO or the like.
本発明においてはこの種金属薄膜型磁気記録媒体におい
てその耐久性の向上を図るものである。The present invention aims to improve the durability of this type of metal thin film magnetic recording medium.
すなわち、本発明においては、第１図に示すように非磁
性支持体（１）上に下地層として特にＢｌ −Ｃ。That is, in the present invention, as shown in FIG. 1, Bl-C is particularly used as an underlayer on a non-magnetic support (1).
の合金層（２）を厚さ５００Ｘ以下に形成し、これの上
に金属磁性薄膜（３）のｃｏまたはＣｏ−Ｎｉの金属薄
膜を形成する。An alloy layer (2) is formed to have a thickness of 500X or less, and a metal thin film of Co or Co--Ni as a metal magnetic thin film (3) is formed thereon.
非磁ｉ 支持体（１）は、ポリエチレンテレフタレート
、ポリアミド、ポリアミドイミド９、ポリイミド等の高
分子フィルム、ガラスセラミック、或いは表面を酸化し
た金属板等を用いることができる。As the non-magnetic support (1), a polymer film such as polyethylene terephthalate, polyamide, polyamideimide 9, polyimide, glass ceramic, or a metal plate with an oxidized surface can be used.
下地層のＢ １−Ｃｏ合金層（２）は、連続膜或いは不
連続膜のいずれの状態で被着されてもよいものであるが
、これがあまシ厚くなると抗磁力Ｈａの向上を阻害する
ものであシ、この厚さは５００１以下にとどめるべきで
あることを確めた。また、このＢ１−Ｃ０合金層（２）
におけるＣＱの導入量は１．０〜１０重量俤の範囲に選
定する。すなわちＣｏの導入量が１．０重量％未満では
耐久性の向上の効果がほとんど生じないものであシ、１
０重量％を越えると抗磁力Ｈａの上昇が鈍ってくること
を確めた。The base layer B1-Co alloy layer (2) may be deposited as either a continuous film or a discontinuous film, but if it becomes too thick, it will inhibit the improvement of the coercive force Ha. It was confirmed that this thickness should be kept below 5001 mm. In addition, this B1-C0 alloy layer (2)
The amount of CQ introduced is selected within the range of 1.0 to 10 wt. In other words, if the amount of Co introduced is less than 1.0% by weight, there is almost no effect of improving durability.
It was confirmed that when the content exceeds 0% by weight, the increase in coercive force Ha slows down.
このような本発明構成による磁気記録媒体は第２図にそ
の構成を示す真空蒸溜装置を用いることによって形成し
得る。すなわち、この装置においては、金属キャンαυ
が設けられ、これを繞って非磁性支持体（１）が、リー
ルαり及びα罎間に走行するようになされる。キャンα
■に対向してＢ１−Ｃｏ蒸着源α→と、Ｃｏ若しくはＣ
ｏ−Ｎ１蒸着源（ト）が配置される。The magnetic recording medium according to the structure of the present invention can be formed by using a vacuum distillation apparatus whose structure is shown in FIG. That is, in this device, the metal can αυ
is provided, and a non-magnetic support (1) is made to run between the reel and the reel over this. Can α
B1-Co evaporation source α→ and Co or C
An o-N1 evaporation source (g) is arranged.
αＱは蒸着源α→及びα→よシの各金属蒸気流を相互に
遮蔽する遮蔽板で、両蒸着源σ→及び（ハ）間から金属
キャン０１）の前方に渡って設けられる。αηは、各蒸
着源α→及びαりと金属キャンαめとの間に配置された
シャッターである。また、一方のリールα■の周辺には
、加熱ラング等よシなる加熱手段（ｌが設けられ、更に
キャンαめとリール（６）との間の非磁性支持体（１）
がキャンａ◇よシ離間した位置においてこれを加熱する
加熱ランプないしは加熱ヒーター等よシなる加熱手段−
が配置され、更に非磁性支持体（１）がキャンαηの外
周を繞って接触する位置において蒸着源α→及びα→に
よる蒸着位置よυ互いに外側位置に対向して同様の加熱
ランプないしは加熱ヒーターよシなる加熱手段Ｈ及び（
イ）が配置されて夫々キャン（１１）を繞ってこれに接
する非磁性支持体（１）を加熱するようになされる。αQ is a shielding plate that mutually shields the metal vapor flows from the evaporation sources α→ and α→yoshi, and is provided from between both the evaporation sources σ→ and (c) to the front of the metal can 01). αη is a shutter placed between each deposition source α→ and α and the metal can α. Further, a heating means (l) such as a heating rung is provided around one reel α■, and a non-magnetic support (1) is provided between the reel α and the reel (6).
A heating means such as a heating lamp or a heating heater is used to heat the can at a position that is far apart.
are arranged, and furthermore, at a position where the non-magnetic support (1) surrounds and contacts the outer periphery of the can αη, a similar heating lamp or heating is applied to the evaporation positions by the evaporation sources α→ and α→ υ facing each other at outer positions. Heating means H such as a heater and (
A) is arranged so as to heat the non-magnetic support (1) which surrounds and is in contact with the can (11).
このような装置によって非磁性支持体（１）上に下地層
（２）と金属磁性薄膜（３）との形成を行い且つアニー
ル処理を施す。すなわち、先ずリール０埠上に非磁性支
持体（１）が巻装された状態でリール０■から他方のリ
ールα］へとキャンαηを繞って非磁性支持体（１）を
移行させつつ蒸着源α→及びα啼から夫々非磁性支持体
（１）上に夫々の蒸着を同時に、したがって支持体（１
）上においては順次重ねて蒸着する。すなわち、先ず非
磁性支持体（１）上に蒸着源０４からのＢ１−Ｃｏ合金
の蒸着、従って下地層（２）が形成され、これの上に蒸
着源α→からのＣｏまたはＣｏ−Ｎｉの蒸着、従って金
属磁性薄膜（３）が形成されてリール（２）に巻取られ
る。この場合、キャン（１］）は温水での加熱がなされ
るが、キャンαめに沿って移行する非磁性支持体（１）
の各層（２）及び（３）の蒸着がなされる部分の温度は
、加熱手段Ｈ及びに）によって１００〜１５０℃程度に
加熱されてその蒸着が行われる。このようにしく５）
て下地層（２）と金属磁性薄膜（３）が形成されてリー
ル０埠上に巻取ったテープは、次にこのリール（６）か
ら再び他方のリール（ロ）にキャンα■を繞って巻き戻
す。Using such an apparatus, a base layer (2) and a metal magnetic thin film (3) are formed on a nonmagnetic support (1), and annealing treatment is performed. That is, first, with the non-magnetic support (1) wound on reel 0, the non-magnetic support (1) is transferred from reel 0 to the other reel α by following the can αη. The respective evaporations from the evaporation sources α→ and α on the non-magnetic support (1) are carried out simultaneously and therefore on the support (1).
) are deposited one on top of the other. That is, first, the B1-Co alloy is deposited from the deposition source 04 on the non-magnetic support (1), thus forming the base layer (2), and on top of this, Co or Co-Ni is deposited from the deposition source α→. A metal magnetic thin film (3) is deposited and wound onto a reel (2). In this case, the can (1) is heated with hot water, but the non-magnetic support (1) that moves along the can
The temperature of the portion where the layers (2) and (3) are deposited is heated to about 100 to 150° C. by heating means H and 2). In this way, the underlayer (2) and the metal magnetic thin film (3) are formed on the tape wound onto the reel 0, and the tape is then reeled from this reel (6) to the other reel (b). Cover and rewind Can α■.
このとき蒸着源α→及びαυよシの蒸着は停止させて、
主として加熱手段Ｈｅ１Ｉによって加熱処理をなし、下
地層（２）及び金属薄膜磁性層（３）を有する非磁性支
持体（１）を蒸着時の基板温度よシ高い所要温度で所要
時間加熱させてアニール処理を施し、高抗磁力化処理を
行う。At this time, the deposition from the deposition sources α→ and αυ is stopped,
Heat treatment is performed mainly by heating means He1I, and the non-magnetic support (1) having the underlayer (2) and the metal thin film magnetic layer (3) is annealed by heating at a required temperature higher than the substrate temperature at the time of vapor deposition for a required time. Treatment is performed to increase coercive force.
このようにして得た本発明による磁気記録媒体（試料１
〜３）と比較例ないしは従来例（試料４〜６）の夫々の
磁気的特性、特に抗磁力Ｈａと耐久性すなわち出力変化
の測定結果を表１に示す。ここに耐久性の測定は、家庭
用ＶＴＲにおいて３分間の長さの各試料テープを１００
回繰り返し走行させた後の出力変化を測定したもので、
ここに抗磁力Ｈｅは７５００ｅ以上要求され、また耐久
性は一３ｄＢ以上であることが実用上の磁気記録媒体に
おいて望まれるものであシ、表１から本発明による試料
１〜３のものは、これらの条件を満足している。The magnetic recording medium according to the present invention thus obtained (Sample 1
Table 1 shows the measurement results of the magnetic properties, especially the coercive force Ha, and the durability, that is, the output change, of the samples 3) and comparative examples or conventional examples (samples 4 to 6). Here, durability measurements were made by testing 100 samples of each sample tape with a length of 3 minutes on a home VTR.
This is a measurement of the output change after repeated driving.
Here, the coercive force He is required to be 7500e or more, and the durability is desired to be 13 dB or more in a practical magnetic recording medium.From Table 1, samples 1 to 3 according to the present invention are as follows. These conditions are satisfied.
（６） またこれら試料１〜６の各構成は表２に列記する。(6) Moreover, each structure of these samples 1-6 is listed in Table 2.
表 １
表 ２
上述したところから明らかなように、本発明によれば、
高飽和磁束密度を有する金属磁性薄膜型磁気記録媒体に
おいて、その耐久性を高めることができ、しかも高い抗
磁力を呈することができるので、ビデオテープ、オーデ
ィオテーフ等の磁気記録媒体に適用して好適なものであ
る。Table 1 Table 2 As is clear from the above, according to the present invention,
Metal magnetic thin film magnetic recording media with high saturation magnetic flux density can improve their durability and exhibit high coercive force, making them suitable for use in magnetic recording media such as video tapes and audio tapes. It is something.
第１図は本発明による磁気記録媒体の路線的拡大断面図
、第２図は本発明による磁気記録媒体を得る装置の一例
の構成図である。
（１）は非磁性支持体、（２）はＢ１−Ｃｏ合金の下地
層、（３）はＣｏまたはＣｏ−Ｎｉ金属磁性薄膜である
。FIG. 1 is an enlarged sectional view of a magnetic recording medium according to the present invention, and FIG. 2 is a configuration diagram of an example of an apparatus for obtaining a magnetic recording medium according to the present invention. (1) is a nonmagnetic support, (2) is a B1-Co alloy underlayer, and (3) is a Co or Co-Ni metal magnetic thin film.
Claims (1)
に被着形成し、これの上にＣＯまたはＣｏ−Ｎ１金属磁
性薄膜を形成してなる磁気記録媒体。A magnetic recording medium comprising a B1-Co alloy layer deposited on a non-magnetic support to a thickness of 500X or less, and a CO or Co-N1 metal magnetic thin film formed thereon.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP57223212A JPS59112425A (en) | 1982-12-20 | 1982-12-20 | Magnetic recording medium |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP57223212A JPS59112425A (en) | 1982-12-20 | 1982-12-20 | Magnetic recording medium |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS59112425A true JPS59112425A (en) | 1984-06-28 |
Family
ID=16794544
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP57223212A Pending JPS59112425A (en) | 1982-12-20 | 1982-12-20 | Magnetic recording medium |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS59112425A (en) |
-
1982
- 1982-12-20 JP JP57223212A patent/JPS59112425A/en active Pending
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| JPS6122852B2 (en) | ||
| JPH0833998B2 (en) | Method of manufacturing magnetic recording medium | |
| GB2129832A (en) | Magnetic recording media | |
| US3700500A (en) | Magnetic films having a predetermined coercivity | |
| JPS59112425A (en) | Magnetic recording medium | |
| JPS6313256B2 (en) | ||
| KR930006588B1 (en) | Magnetic medium | |
| JPS6353721A (en) | Preparation of thin oxide film | |
| JPS6057211B2 (en) | Manufacturing method of magnetic recording media | |
| JPS59157828A (en) | Magnetic recording medium | |
| JPS60201521A (en) | Magnetic recording medium | |
| JPH0430171B2 (en) | ||
| JPH04102308A (en) | Manufacture of fe-si-al-based alloy magnetic film | |
| JPS60140542A (en) | Production of magnetic recording medium | |
| JPS63146417A (en) | Soft magnetic thin film | |
| JPH07111773B2 (en) | Magnetic recording medium | |
| JPS5816512A (en) | Magnetic recording medium | |
| JPS5857628A (en) | Flexible magnetic recording medium | |
| JPH0512646A (en) | Perpendicular magnetic recording medium | |
| JPH03171426A (en) | Production of magnetic recording medium | |
| JPS59112438A (en) | Manufacture of magnetic recording medium | |
| JPS60167122A (en) | Production of thin metallic film type magnetic recording medium | |
| JPS62102414A (en) | Magnetic recording medium | |
| JPS6022713A (en) | Magnetic head for vertical magnetic recording | |
| JPS586117A (en) | Manufacture of flexible magnetic recording substance |