JPS59111011A - 磁気抵抗素子を具える磁気検出器 - Google Patents
磁気抵抗素子を具える磁気検出器Info
- Publication number
- JPS59111011A JPS59111011A JP57221138A JP22113882A JPS59111011A JP S59111011 A JPS59111011 A JP S59111011A JP 57221138 A JP57221138 A JP 57221138A JP 22113882 A JP22113882 A JP 22113882A JP S59111011 A JPS59111011 A JP S59111011A
- Authority
- JP
- Japan
- Prior art keywords
- elements
- magnetoresistive
- film
- magnetic
- resistance
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000000059 patterning Methods 0.000 claims abstract description 8
- 239000000758 substrate Substances 0.000 abstract description 14
- 238000001514 detection method Methods 0.000 abstract description 12
- 230000000694 effects Effects 0.000 abstract description 8
- 239000011521 glass Substances 0.000 abstract description 4
- 230000035945 sensitivity Effects 0.000 abstract description 2
- 238000009413 insulation Methods 0.000 abstract 1
- 229920002120 photoresistant polymer Polymers 0.000 description 16
- 239000004020 conductor Substances 0.000 description 12
- 238000000034 method Methods 0.000 description 10
- 238000010586 diagram Methods 0.000 description 9
- 238000004519 manufacturing process Methods 0.000 description 7
- 238000005530 etching Methods 0.000 description 6
- 239000010931 gold Substances 0.000 description 5
- 229910052710 silicon Inorganic materials 0.000 description 5
- 239000010703 silicon Substances 0.000 description 5
- KRHYYFGTRYWZRS-UHFFFAOYSA-N Fluorane Chemical compound F KRHYYFGTRYWZRS-UHFFFAOYSA-N 0.000 description 4
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 4
- 238000000151 deposition Methods 0.000 description 4
- 238000001312 dry etching Methods 0.000 description 4
- 239000002184 metal Substances 0.000 description 4
- 229910052751 metal Inorganic materials 0.000 description 4
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 3
- 229910052737 gold Inorganic materials 0.000 description 3
- 230000005415 magnetization Effects 0.000 description 3
- 238000001039 wet etching Methods 0.000 description 3
- 229910002555 FeNi Inorganic materials 0.000 description 2
- 239000004642 Polyimide Substances 0.000 description 2
- 150000002222 fluorine compounds Chemical class 0.000 description 2
- 230000017525 heat dissipation Effects 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 150000004767 nitrides Chemical class 0.000 description 2
- 229910000889 permalloy Inorganic materials 0.000 description 2
- 229920001721 polyimide Polymers 0.000 description 2
- 239000004593 Epoxy Substances 0.000 description 1
- PEDCQBHIVMGVHV-UHFFFAOYSA-N Glycerine Chemical compound OCC(O)CO PEDCQBHIVMGVHV-UHFFFAOYSA-N 0.000 description 1
- 229910001030 Iron–nickel alloy Inorganic materials 0.000 description 1
- 239000002253 acid Substances 0.000 description 1
- 239000000919 ceramic Substances 0.000 description 1
- 238000005260 corrosion Methods 0.000 description 1
- 230000007797 corrosion Effects 0.000 description 1
- 230000008878 coupling Effects 0.000 description 1
- 238000010168 coupling process Methods 0.000 description 1
- 238000005859 coupling reaction Methods 0.000 description 1
- 230000008021 deposition Effects 0.000 description 1
- 238000006073 displacement reaction Methods 0.000 description 1
- 229920001971 elastomer Polymers 0.000 description 1
- 239000000806 elastomer Substances 0.000 description 1
- 238000010894 electron beam technology Methods 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 239000012212 insulator Substances 0.000 description 1
- 238000003754 machining Methods 0.000 description 1
- 239000012528 membrane Substances 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 230000010363 phase shift Effects 0.000 description 1
- 238000001259 photo etching Methods 0.000 description 1
- 239000011148 porous material Substances 0.000 description 1
- 230000001737 promoting effect Effects 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 150000003376 silicon Chemical class 0.000 description 1
- 239000002689 soil Substances 0.000 description 1
- 238000000992 sputter etching Methods 0.000 description 1
- 238000007740 vapor deposition Methods 0.000 description 1
- 239000002023 wood Substances 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B7/00—Measuring arrangements characterised by the use of electric or magnetic techniques
- G01B7/02—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring length, width or thickness
- G01B7/023—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring length, width or thickness for measuring distance between sensor and object
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Transmission And Conversion Of Sensor Element Output (AREA)
- Measuring Magnetic Variables (AREA)
- Magnetic Heads (AREA)
- Hall/Mr Elements (AREA)
Priority Applications (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP57221138A JPS59111011A (ja) | 1982-12-17 | 1982-12-17 | 磁気抵抗素子を具える磁気検出器 |
| US06/473,250 US4616281A (en) | 1982-03-10 | 1983-03-08 | Displacement detecting apparatus comprising magnetoresistive elements |
| DE3308404A DE3308404C2 (de) | 1982-03-10 | 1983-03-09 | Vorrichtung zur Messung einer Relativverschiebung |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP57221138A JPS59111011A (ja) | 1982-12-17 | 1982-12-17 | 磁気抵抗素子を具える磁気検出器 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS59111011A true JPS59111011A (ja) | 1984-06-27 |
| JPH0130409B2 JPH0130409B2 (enrdf_load_stackoverflow) | 1989-06-20 |
Family
ID=16762050
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP57221138A Granted JPS59111011A (ja) | 1982-03-10 | 1982-12-17 | 磁気抵抗素子を具える磁気検出器 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS59111011A (enrdf_load_stackoverflow) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4835509A (en) * | 1986-07-29 | 1989-05-30 | Nippondenso Co., Ltd. | Noncontact potentiometer |
| JPH0486577A (ja) * | 1990-07-30 | 1992-03-19 | F M C:Kk | 磁気抵抗効果型磁気センサ |
| CN102073023A (zh) * | 2009-11-19 | 2011-05-25 | Nxp股份有限公司 | 磁场传感器 |
| CN109654989A (zh) * | 2019-01-09 | 2019-04-19 | 西安建筑科技大学 | 一种电阻位移传感器 |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS50133117U (enrdf_load_stackoverflow) * | 1974-04-16 | 1975-11-01 | ||
| JPS5337204A (en) * | 1976-06-11 | 1978-04-06 | Babcock & Wilcox Ltd | Boiler for use in ship |
-
1982
- 1982-12-17 JP JP57221138A patent/JPS59111011A/ja active Granted
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS50133117U (enrdf_load_stackoverflow) * | 1974-04-16 | 1975-11-01 | ||
| JPS5337204A (en) * | 1976-06-11 | 1978-04-06 | Babcock & Wilcox Ltd | Boiler for use in ship |
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4835509A (en) * | 1986-07-29 | 1989-05-30 | Nippondenso Co., Ltd. | Noncontact potentiometer |
| JPH0486577A (ja) * | 1990-07-30 | 1992-03-19 | F M C:Kk | 磁気抵抗効果型磁気センサ |
| CN102073023A (zh) * | 2009-11-19 | 2011-05-25 | Nxp股份有限公司 | 磁场传感器 |
| US8587299B2 (en) | 2009-11-19 | 2013-11-19 | Nxp B.V. | Magnetic field sensor |
| CN109654989A (zh) * | 2019-01-09 | 2019-04-19 | 西安建筑科技大学 | 一种电阻位移传感器 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0130409B2 (enrdf_load_stackoverflow) | 1989-06-20 |
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