JPS59102141U - イオン化装置 - Google Patents
イオン化装置Info
- Publication number
- JPS59102141U JPS59102141U JP20161182U JP20161182U JPS59102141U JP S59102141 U JPS59102141 U JP S59102141U JP 20161182 U JP20161182 U JP 20161182U JP 20161182 U JP20161182 U JP 20161182U JP S59102141 U JPS59102141 U JP S59102141U
- Authority
- JP
- Japan
- Prior art keywords
- metal
- ionization device
- cathode
- permanent magnet
- airtight container
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Physical Or Chemical Processes And Apparatus (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP20161182U JPS59102141U (ja) | 1982-12-27 | 1982-12-27 | イオン化装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP20161182U JPS59102141U (ja) | 1982-12-27 | 1982-12-27 | イオン化装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS59102141U true JPS59102141U (ja) | 1984-07-10 |
| JPS6331703Y2 JPS6331703Y2 (enExample) | 1988-08-24 |
Family
ID=30427105
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP20161182U Granted JPS59102141U (ja) | 1982-12-27 | 1982-12-27 | イオン化装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS59102141U (enExample) |
-
1982
- 1982-12-27 JP JP20161182U patent/JPS59102141U/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6331703Y2 (enExample) | 1988-08-24 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| JPS59102141U (ja) | イオン化装置 | |
| JPS59107473U (ja) | イオンビ−ム照射装置 | |
| JPS60113367U (ja) | 蒸着用坩堝 | |
| JPS59128140U (ja) | 真空バルブ | |
| JPH022895U (enExample) | ||
| JPS5974659U (ja) | イオン注入装置のイオン発生装置 | |
| JPS58195953U (ja) | 電子ビ−ム管 | |
| JPS597551U (ja) | マグネトロン | |
| JPS5861461U (ja) | スパツタリング装置 | |
| JPS5856871U (ja) | 多極式アルミニウム電解炉の遮磁構造 | |
| JPS5891179U (ja) | 低エネルギ−荷電粒子線のスピン状態分析器 | |
| JPS60162337U (ja) | 真空遮断器 | |
| JPS5917560U (ja) | 鉛蓄電池の極板 | |
| JPS60143770U (ja) | 電子衝撃型蒸着装置 | |
| JPS58113955U (ja) | 固定陽極型x線管 | |
| JPS58186550U (ja) | 電子ビ−ム管 | |
| JPS6140003U (ja) | アイソレ−タの整合用コイルの形状 | |
| JPS60136464U (ja) | 電子銃 | |
| JPS61214399A (ja) | 中性粒子入射装置 | |
| JPS5881854U (ja) | X線管 | |
| JPS5873550U (ja) | 電子ビ−ム管の集電極冷却装置 | |
| JP2001133346A5 (enExample) | ||
| JPS5973362U (ja) | フラツシユガン | |
| JPS58187941U (ja) | サ−マルリ−ドスイツチ | |
| JPH0355651U (enExample) |