JPS5896871A - 真空蒸着装置の溶融金属蒸発炉 - Google Patents
真空蒸着装置の溶融金属蒸発炉Info
- Publication number
- JPS5896871A JPS5896871A JP19368281A JP19368281A JPS5896871A JP S5896871 A JPS5896871 A JP S5896871A JP 19368281 A JP19368281 A JP 19368281A JP 19368281 A JP19368281 A JP 19368281A JP S5896871 A JPS5896871 A JP S5896871A
- Authority
- JP
- Japan
- Prior art keywords
- furnace
- zinc
- heater
- rate
- vapor deposition
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000001771 vacuum deposition Methods 0.000 title abstract description 4
- 238000010438 heat treatment Methods 0.000 claims abstract description 12
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims abstract description 11
- 229910052799 carbon Inorganic materials 0.000 claims abstract description 11
- 238000007738 vacuum evaporation Methods 0.000 claims description 2
- HCHKCACWOHOZIP-UHFFFAOYSA-N Zinc Chemical compound [Zn] HCHKCACWOHOZIP-UHFFFAOYSA-N 0.000 abstract description 22
- 239000011701 zinc Substances 0.000 abstract description 22
- 229910052725 zinc Inorganic materials 0.000 abstract description 22
- 238000007740 vapor deposition Methods 0.000 abstract description 13
- 229910000831 Steel Inorganic materials 0.000 abstract description 7
- 239000007788 liquid Substances 0.000 abstract description 7
- 239000010959 steel Substances 0.000 abstract description 7
- 238000001704 evaporation Methods 0.000 abstract description 4
- 230000008020 evaporation Effects 0.000 abstract description 4
- 230000015572 biosynthetic process Effects 0.000 abstract description 2
- 239000002344 surface layer Substances 0.000 abstract description 2
- 230000004043 responsiveness Effects 0.000 abstract 1
- 238000000034 method Methods 0.000 description 7
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 6
- 229910052802 copper Inorganic materials 0.000 description 6
- 239000010949 copper Substances 0.000 description 6
- 238000007747 plating Methods 0.000 description 4
- 238000010521 absorption reaction Methods 0.000 description 3
- 239000003795 chemical substances by application Substances 0.000 description 2
- 238000000151 deposition Methods 0.000 description 2
- 230000008021 deposition Effects 0.000 description 2
- 238000009835 boiling Methods 0.000 description 1
- 239000000919 ceramic Substances 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 230000007797 corrosion Effects 0.000 description 1
- 238000005260 corrosion Methods 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000009713 electroplating Methods 0.000 description 1
- 238000005246 galvanizing Methods 0.000 description 1
- 239000011810 insulating material Substances 0.000 description 1
- 230000006641 stabilisation Effects 0.000 description 1
- 238000011105 stabilization Methods 0.000 description 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/24—Vacuum evaporation
- C23C14/243—Crucibles for source material
Landscapes
- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Physical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP19368281A JPS5896871A (ja) | 1981-12-03 | 1981-12-03 | 真空蒸着装置の溶融金属蒸発炉 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP19368281A JPS5896871A (ja) | 1981-12-03 | 1981-12-03 | 真空蒸着装置の溶融金属蒸発炉 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5896871A true JPS5896871A (ja) | 1983-06-09 |
| JPH029106B2 JPH029106B2 (enrdf_load_html_response) | 1990-02-28 |
Family
ID=16312027
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP19368281A Granted JPS5896871A (ja) | 1981-12-03 | 1981-12-03 | 真空蒸着装置の溶融金属蒸発炉 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5896871A (enrdf_load_html_response) |
-
1981
- 1981-12-03 JP JP19368281A patent/JPS5896871A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPH029106B2 (enrdf_load_html_response) | 1990-02-28 |
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