JPH029106B2 - - Google Patents

Info

Publication number
JPH029106B2
JPH029106B2 JP19368281A JP19368281A JPH029106B2 JP H029106 B2 JPH029106 B2 JP H029106B2 JP 19368281 A JP19368281 A JP 19368281A JP 19368281 A JP19368281 A JP 19368281A JP H029106 B2 JPH029106 B2 JP H029106B2
Authority
JP
Japan
Prior art keywords
furnace
evaporation
molten metal
zinc
carbon
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP19368281A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5896871A (ja
Inventor
Kenichi Yanagi
Toshio Taguchi
Naoyuki Hirazakura
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Heavy Industries Ltd
Original Assignee
Mitsubishi Heavy Industries Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Heavy Industries Ltd filed Critical Mitsubishi Heavy Industries Ltd
Priority to JP19368281A priority Critical patent/JPS5896871A/ja
Publication of JPS5896871A publication Critical patent/JPS5896871A/ja
Publication of JPH029106B2 publication Critical patent/JPH029106B2/ja
Granted legal-status Critical Current

Links

Classifications

    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/24Vacuum evaporation
    • C23C14/243Crucibles for source material

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physical Vapour Deposition (AREA)
JP19368281A 1981-12-03 1981-12-03 真空蒸着装置の溶融金属蒸発炉 Granted JPS5896871A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP19368281A JPS5896871A (ja) 1981-12-03 1981-12-03 真空蒸着装置の溶融金属蒸発炉

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP19368281A JPS5896871A (ja) 1981-12-03 1981-12-03 真空蒸着装置の溶融金属蒸発炉

Publications (2)

Publication Number Publication Date
JPS5896871A JPS5896871A (ja) 1983-06-09
JPH029106B2 true JPH029106B2 (enrdf_load_html_response) 1990-02-28

Family

ID=16312027

Family Applications (1)

Application Number Title Priority Date Filing Date
JP19368281A Granted JPS5896871A (ja) 1981-12-03 1981-12-03 真空蒸着装置の溶融金属蒸発炉

Country Status (1)

Country Link
JP (1) JPS5896871A (enrdf_load_html_response)

Also Published As

Publication number Publication date
JPS5896871A (ja) 1983-06-09

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