JPS5895321A - Optical switching array - Google Patents

Abstract

PURPOSE:To suppress a crosstalk to a low extent, to reduce an electrostatic capacity between electrodes, to raise resolution, and also to execute a response at a high speed, by providing a bandlike common electrode on one surface of a transparent porcelain substrate, and a zigzag switching electrode so as to be opposed to said electrode, and also on both sides. CONSTITUTION:On one surface of a transparent porcelain substrate 31, a bandlike common electrode 32 is provided, and on both its sides, zigzag switching electrodes 33, 34 are provided, voltage is applied by selecting the switching electrodes 33, 34 through driving circuits 35, 36, and the refractive index of the substrate 31 is varied. Since the switching electrodes 33, 34 are placed like zigzag, an electrostatic capacity between the adjacent switching electrodes is reduced, also a crosstalk is obstructed, resolution is raised, and also a response is executed at a high speed.

Description

[Detailed Description of the Invention] The present invention provides a plurality of electrodes on one surface of a transparent ceramic substrate, and by applying a VCwL field to the substrate portion of the opposing regions, the directly opposing regions are irradiated. The present invention relates to an optical switching array that changes light transmission t.

In this type of optical switching array, as shown in Figure 1 fa) VC, a plurality of switching elements #Ii, 12 are arranged in cross layers on one surface of a transparent ceramic substrate 11, and the adjacent switching elements [voltage between the electrodes] A device that changes the amount of light transmission in area A by applying
At the same time, a number of switching electrodes Z3 opposite to these seven electrodes n are arranged in parallel.

Common din 4ilii2z and selected switching 1
There was one in which the original amount of transmission in region B was changed by applying pressure for a period of time.

In this case, the substrates 11 and 211. A trowel made by mixing lead 9, lanthanum La, zirconium Zr, and titanium TI in appropriate proportions and firing it into a plate shape, with a thickness of 200 to 40 mm.
Both sides of the substrate have been optically polished to a 0.0 f f, and are commonly referred to as PLZT substrates.

This PLZT substrate has a high dielectric constant and is transparent, and when an electric field is applied to the substrate and light is irradiated through a polarizer, the refraction changes depending on the electric field strength.
! It has a page-like nature.

On the other hand, switching! ? 12.2'l and common electrode η
Then, nickel Nl is applied by vapor deposition or snow removal.
- After the chromium-or-based gold film has been dyed.

Width 30~40μ4 by etching. Pitch...Switching wt pole with spacing of about 62.5 mm 12. A common electrode n is formed on the side and side @I II 8 Elf, thereby obtaining a resolution of 16 dots/frame. In addition,
These electrodes are plated with gold (Au) to prevent oxidation and reduce electrical resistance.

Thus, the application wL! j'? When linearly polarized light is irradiated through a 45° polarizer in one direction to the area where the electrodes face each other and a voltage is applied between the v/L poles, the linearly polarized light has a retardation/yos γ value expressed by the following equation. Let's go.

β-imo/island/d ・・・・・・・・・・・・・・・
...(1) However, λ: wavelength of incident light; 6: change in refractive index; d: effective thickness of the PLZT substrate; n: refractive ffr; and R: 2rK; electro-optic constant;

By analyzing the irradiated light that has received retardation/ion in this way using an analyzer placed in front of the polarizer, the strength of the light can be obtained in accordance with the electric field strength.

This means that the intensity of the polarized light incident on the LZT substrate is II, and the intensity If of the light passing through the analyzer is ■. It can be expressed as.

Thus, the switching electrode 11 marked with 70
, 12 (area A), the light irradiated between the common electrode thorns and the switching el L group (@area B) passes through the analyzer, and on the contrary, the voltage is 770 in the region where it is not clear. The light will be blocked by Yukoko.

By applying a voltage to the switching voltages based on the image information, it becomes possible to restore the image, and while it can be applied to optical printers or duplicators, it can also be used in Nitoma transformation machines. is also used.

This is different from conventional optical switching arrays.

Due to the requirement for resolution, the relative spacing between the switching wl poles inevitably becomes narrower, and the electric field that is intended to act only on a predetermined region extends to other adjacent switching wl pole regions, resulting in the phenomenon of so-called crosstalk. Therefore, there is a drawback that the resolving power decreases when copying or using the original printer.

In addition, if the height of the switching electrode is increased, the static capacity between adjacent ridges increases, which causes a delay in the response time.

This was done in order to eliminate the ten disadvantages of the present invention, by suppressing crosstalk to a sufficiently low level and significantly reducing the silent current capacity between adjacent switching poles, thereby improving resolution. The object of the present invention is to provide an optical switching array with high performance and fast response speed.

In order to achieve the Uemachi objective (a), a fully-open optical switching light is placed on one side of a transparent porcelain substrate in the form of a band; A switching pad for acid-resistant rice grains is provided on both sides of the common electrode, and a tin mask is provided on the other side of the porcelain substrate in order to improve this characteristic.

DESCRIPTION OF THE PREFERRED EMBODIMENTS Hereinafter, the present invention will be described based on an embodiment with reference to FIG.

First, Figure IBJ2 is a plan view showing the configuration of the first embodiment of the optical switching array according to the present invention.
The common 11 pole, 33 pole and 34 pole common w/ formed in a band shape approximately in the center of the holder 31 are placed opposite the pole 32, and The switching i1.
6, 35h and 36 indicate the switching 113 and the drive line 1 which selects true and applies voltage, respectively.

Here, the width of the common electrode 320 is 50 μq, the width of the switching electrode 33 and the switching electrode 34 is (a) μ, and the distance between the common electrode 32 and the switching electrodes 33 and 34 is a distance μl It. Further, the pitch of the switching electrodes 33 and the pitch of the switching electrodes 34σ) are 125μ.

Therefore, although the switching *33 and 34U staggered patterns are provided on both sides of the common electrode 32, they are arranged at a pitch of 62.5 μm in the longitudinal direction of the common * electrode 32, making a total of 16 dots. / The resolution of drunkenness is ensured.

In this case, the area where the common 1 [32 and the switching poles 33 and 34 face each other, ↑ that is, the transmission tl of 5'e - will be arranged in two rows in the area where the transmission tl can be controlled. If the row spacing is less than or equal to 50 μd, there will be almost no problem in restoring the image. The over-likelihood focusing positions can be aligned.

Thus, the relative spacing of the switching electrodes 33 disposed on one side 1 of the common electrode 32 and the common electrode FIiL
The relative spacing of the switching electrodes disposed on the side of 33 is approximately twice the relative spacing of the switching electrodes in the conventional optical switching eye.

Moreover, since the magnetic poles 33 and the adjacent magnetic poles 33 are diagonally opposite to each other through the common electrode 132e for one image information, the relative spacing between these switching electrodes is also approximately 2igrK, which is the spacing of the conventional optical switching array. It has become.

In this way, when one switching WL heater is arranged in a staggered manner on both sides of the common electrode I11.

Due to the electric field caused by the switching magnetic pole to which pressure is applied.

The disadvantage of conventional optical switching arrays is that they extend to the switching LT range where no voltage is applied.
Moreover, the capacitance of the adjacent switching ICE capacitance is significantly reduced, thereby preventing the phenomenon of crosstalk, increasing the power, and speeding up the response stray current.

Next, FIG. 3 is a cross-sectional view showing a second embodiment of the optical switching array according to the present invention. 37 common heavy poles 32 and switching electrodes 33 other than
, 34, each having a light-transmitting window 37a on the path of the light passing through the opposing canopy areas.

Also, No. 4- indicates a mask for forming the photomask 37, which is actually oblique? The R portion 40a allows light to pass through and the white nitrogen portion 40b blocks the light, but here the positive and negative portions are shown reversed to match the chime turn of the portion remaining after 70,000 etching. In other words, the diagonal capital 4
() The portion left after etching a, bond section 40b
If is an etched window, then the same ξ-turn 7 otomasks 37 as shown in this 4th
It is set in.

Here, a common '# pole 32 and switching electrodes 33 and 34 are provided on one surface of the ceramic substrate 31.
The specific method of providing the 7-oto mask 37 on the other side will be described below. First, gold M such as aluminum A1 is uniformly vapor-deposited on one side of the porcelain base '@11, which has been optically polished on both sides. A trowel coated with a resist film is covered with a mask 40 shown in FIG. 84, exposed and developed, and etched to form a seven-dimensional mask 37 having the same number of turns as the mask 40. In this case, the blank 1'N40b of the mask 40, the common electric wire 32 and the switching w1 poles 33 and 34 are arranged in a staggered manner to meet the respective opposing areas fWt.

Next, on the surface of the ceramic substrate opposite to the surface fC on which the photomask 37 is formed, a nickel Nl-chromium Cr base metal is formed by true wall evaporation using a mask (not shown) made of phosphor copper. Subsequently, gold (Au) is evaporated to simultaneously form the common electrode 32 and the switching II1*33, 34.

In addition, a common electrode 32 formed on one surface of the ceramic substrate 31,
The relative positioning of the switching wL poles 33 and 34 and the photomask 37 formed on the other surface of the ceramic substrate 3 is determined by considering the thickness of the ceramic substrate 31, and the common wL pole 32
The light-transmitting window 37a is placed on the path of light passing through the facing areas of the switching electrodes 33 and 34.

Thus, by forming the photomask 37.

Even if the switching [933, 34 is arranged in a staggered manner to -11 on both sides of the common electrode 32, the unavoidable crosstalk can be avoided by appropriately selecting the size of the light receiving window 37a. Light can be blocked almost completely.

Next, FIG. 5 shows @3 of the optical switching array according to the present invention.
In the cross-sectional view showing the structure of the embodiment, the same reference numerals as in FIG. 3 in each figure indicate the same elements or elements having the same effect, and the other 38 is a transparent glass substrate.

In addition, an electrode is formed on one surface of the fB device substrate 31.

This is intended to solve the problem in manufacturing technology that alignment with the γ upper mask 3 (formed on other surfaces) is performed before the vapor deposition process in the WII formation shown in FIG.
A photomask 37 is formed on one side of the glass substrate in the same manner as described above, and this is adhered to the ceramic substrate using a transparent optical adhesive.

By adopting such a configuration, alignment of the electrode and the photomask can be easily and precisely performed, and the ceramic substrate 31 can be protected from corrosion caused by etching chemicals.

Next, Fig. 6 shows an example in which the optical switching array according to the present invention is applied to an optical printer. , 53 is a polarizer, 5+4 is an analyzer, 55 is a convergent light transmitting array, and 56 is a photosensitive drum.

In FIG. 6, one beam of light 51 is focused by reflection -52 and irradiated through a polarizer 53 onto a curved slit of the wL pole of the optical switching device VII).

Here, when a switching electrode is selected and a KM pressure is applied to it, an electric field is generated in the same area as the common electrode, and retardation occurs with refractive index electrification proportional to the square of the electric field. When this retarded light passes through the analyzer 54, it becomes transparent according to the equation (3) described above.

On the other hand, the voltage is 71+1? Since the electric field is zero in the region opposite the electric field qj, it does not undergo any change with respect to the incident light, and since it is perpendicular to the analyzer 54, it is completely
I can get angry.

By projecting the light that has passed through the analyzer 54 onto the photoreceptor drum 56 by means of the convergent light transmitter array 55, an electrostatic latent image is obtained there. Namely.

It is possible to restore image information that has been captured in electrical signals.

In such a one-source printer, when the conventional optical switching array and the optical switching array of the present invention are operated under the same conditions, the one using the optical switching array of the present invention is clearly clearer. High-speed printing was also possible.

The present invention has been described above with reference to a preferred embodiment (1) (without limitation, the width of the common electrode).

(13)
IQ switching wt width 9 and pitch, f1
? Of course, the thickness of the device substrate, the electrode material, etc. may be changed as appropriate.

As is clear from this, according to the optical switching array of the present invention, the resolution can be further improved and the response speed can be significantly increased.

[Brief explanation of drawings]

1(a) and (b) i A plan view showing the configuration of a conventional optical switching array; 2) A plan view showing the configuration of the first embodiment of the optical switching array according to the present invention; FIG. 4 is a cross-sectional view showing the configuration of a second embodiment of the optical switching array according to the present invention, FIG. 4 is a plan view of a mask used in the manufacturing process of the same embodiment, and FIG. FIG. 6 is a cross-sectional view showing the configuration of the third embodiment, and a conceptual diagram showing the configuration of the original printer to which the optical switching array is applied. 11, 21.31...porcelain substrate, 12. Otsu, 33.
34...Switch on,
(14) Riiin, 12.32-...Co-iM electrode, 35.343--Drive a direction M. 37... Photomask 538... Glass substrate, 40
···mask. Add... Optical switching annoy + 51... Power supply, 5
2...Reflector, 53...Polarizer, 54...Analyzer, 55...Hayabusi original transmission body, 56...Photoconductor drum. Applicant's agent Kiyoshi Inomata

Claims (1)

[Scope of Claims] 1. A strip-shaped common wheel FIi is provided on one surface of a transparent ceramic substrate and is opposed to the common electrode. An optical switching relay characterized in that a plurality of switching elements are arranged on both sides of the common electrode in a staggered pattern. 2. A strip-shaped common electrode is provided on one side of the transparent porcelain substrate, and this common! Opposed to the pole, and. A plurality of switching electrodes are placed on both sides of the common electrode in a staggered pattern, and a photomask is provided on the other side of the substrate to form an optical switching array. 3. Forming the photomask on a transparent glass substrate,
A switching device according to claim 2, wherein the glass substrate is bonded to the other surface of the ceramic substrate.