JPS5894745A - 多重極レンズ - Google Patents

多重極レンズ

Info

Publication number
JPS5894745A
JPS5894745A JP56192463A JP19246381A JPS5894745A JP S5894745 A JPS5894745 A JP S5894745A JP 56192463 A JP56192463 A JP 56192463A JP 19246381 A JP19246381 A JP 19246381A JP S5894745 A JPS5894745 A JP S5894745A
Authority
JP
Japan
Prior art keywords
lens
insulators
electrodes
magnetic
magnetic poles
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP56192463A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6331895B2 (enrdf_load_stackoverflow
Inventor
Shigeo Okayama
岡山　重夫
Tadashi Ito
匡 伊藤
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
National Institute of Advanced Industrial Science and Technology AIST
NICHIDENSHI TECHNICS KK
Original Assignee
Agency of Industrial Science and Technology
NICHIDENSHI TECHNICS KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Agency of Industrial Science and Technology, NICHIDENSHI TECHNICS KK filed Critical Agency of Industrial Science and Technology
Priority to JP56192463A priority Critical patent/JPS5894745A/ja
Publication of JPS5894745A publication Critical patent/JPS5894745A/ja
Publication of JPS6331895B2 publication Critical patent/JPS6331895B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
    • H01J37/10—Lenses

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Electron Tubes For Measurement (AREA)
JP56192463A 1981-11-30 1981-11-30 多重極レンズ Granted JPS5894745A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP56192463A JPS5894745A (ja) 1981-11-30 1981-11-30 多重極レンズ

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP56192463A JPS5894745A (ja) 1981-11-30 1981-11-30 多重極レンズ

Publications (2)

Publication Number Publication Date
JPS5894745A true JPS5894745A (ja) 1983-06-06
JPS6331895B2 JPS6331895B2 (enrdf_load_stackoverflow) 1988-06-27

Family

ID=16291711

Family Applications (1)

Application Number Title Priority Date Filing Date
JP56192463A Granted JPS5894745A (ja) 1981-11-30 1981-11-30 多重極レンズ

Country Status (1)

Country Link
JP (1) JPS5894745A (enrdf_load_stackoverflow)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02230647A (ja) * 1989-01-24 1990-09-13 Ict Integrated Circuit Testing G Fur Halbleiterprueftechnik Mbh 多極素子及びその製造方法
JPH03100353U (enrdf_load_stackoverflow) * 1990-01-30 1991-10-21
JP2006185637A (ja) * 2004-12-24 2006-07-13 Kyocera Corp 静電偏向器及びそれを用いた電子線装置
JP2007095702A (ja) * 1995-08-11 2007-04-12 Mds Health Group Ltd 軸電界を有する分析計

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6291828B1 (en) * 1999-12-21 2001-09-18 Axchlisrtechnologies, Inc. Glass-like insulator for electrically isolating electrodes from ion implanter housing
JP2007287365A (ja) * 2006-04-13 2007-11-01 Jeol Ltd 多極子レンズ及び多極子レンズの製造方法

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5311280U (enrdf_load_stackoverflow) * 1976-07-13 1978-01-30
JPS53133561U (enrdf_load_stackoverflow) * 1977-03-29 1978-10-23

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5311280U (enrdf_load_stackoverflow) * 1976-07-13 1978-01-30
JPS53133561U (enrdf_load_stackoverflow) * 1977-03-29 1978-10-23

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02230647A (ja) * 1989-01-24 1990-09-13 Ict Integrated Circuit Testing G Fur Halbleiterprueftechnik Mbh 多極素子及びその製造方法
JPH03100353U (enrdf_load_stackoverflow) * 1990-01-30 1991-10-21
JP2007095702A (ja) * 1995-08-11 2007-04-12 Mds Health Group Ltd 軸電界を有する分析計
JP2006185637A (ja) * 2004-12-24 2006-07-13 Kyocera Corp 静電偏向器及びそれを用いた電子線装置

Also Published As

Publication number Publication date
JPS6331895B2 (enrdf_load_stackoverflow) 1988-06-27

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