JPS5894745A - Multipole lens - Google Patents
Multipole lensInfo
- Publication number
- JPS5894745A JPS5894745A JP56192463A JP19246381A JPS5894745A JP S5894745 A JPS5894745 A JP S5894745A JP 56192463 A JP56192463 A JP 56192463A JP 19246381 A JP19246381 A JP 19246381A JP S5894745 A JPS5894745 A JP S5894745A
- Authority
- JP
- Japan
- Prior art keywords
- lens
- insulators
- electrodes
- magnetic
- magnetic poles
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 230000005405 multipole Effects 0.000 title claims abstract description 7
- 239000012212 insulator Substances 0.000 claims abstract description 20
- 239000000696 magnetic material Substances 0.000 claims abstract description 5
- 239000011810 insulating material Substances 0.000 claims description 5
- 239000000463 material Substances 0.000 claims description 5
- 239000007787 solid Substances 0.000 claims 1
- 241001092070 Eriobotrya Species 0.000 description 5
- 235000009008 Eriobotrya japonica Nutrition 0.000 description 5
- 230000004075 alteration Effects 0.000 description 3
- 238000010586 diagram Methods 0.000 description 3
- 238000010894 electron beam technology Methods 0.000 description 3
- 238000003754 machining Methods 0.000 description 3
- 241000270708 Testudinidae Species 0.000 description 2
- 201000009310 astigmatism Diseases 0.000 description 2
- 230000005611 electricity Effects 0.000 description 2
- 238000009958 sewing Methods 0.000 description 2
- 230000003068 static effect Effects 0.000 description 2
- 244000005894 Albizia lebbeck Species 0.000 description 1
- 241000218645 Cedrus Species 0.000 description 1
- 241000255925 Diptera Species 0.000 description 1
- NINIDFKCEFEMDL-UHFFFAOYSA-N Sulfur Chemical compound [S] NINIDFKCEFEMDL-UHFFFAOYSA-N 0.000 description 1
- 241000270666 Testudines Species 0.000 description 1
- 238000000151 deposition Methods 0.000 description 1
- 238000006073 displacement reaction Methods 0.000 description 1
- 238000009826 distribution Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 238000009413 insulation Methods 0.000 description 1
- 238000010884 ion-beam technique Methods 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 235000012149 noodles Nutrition 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
- 238000005498 polishing Methods 0.000 description 1
- 238000003860 storage Methods 0.000 description 1
- 229910052717 sulfur Inorganic materials 0.000 description 1
- 239000011593 sulfur Substances 0.000 description 1
- 239000000725 suspension Substances 0.000 description 1
- 238000009941 weaving Methods 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
- H01J37/10—Lenses
Landscapes
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Electron Tubes For Measurement (AREA)
Abstract
Description
【発明の詳細な説明】
この尭−は四極子、六礁子、八極子等の鉗1ビーム用多
重他レンズの構造IC−する。DETAILED DESCRIPTION OF THE INVENTION This lens has a structure IC of multiple lenses for one beam of a quadrupole, hexagonal, octupole, etc.
四憔子、六憾子、へ礁子等はそれらを構成する1極ある
いは磁極に印加する磁圧または電流の極性およびその強
度を制御することによって#亀ビーム用の集束レンズ、
偏向a、非点収値レンズとして利用する(とができる。Four condensers, six condensers, and condensers can be used to create focusing lenses for #tortoise beams by controlling the polarity and intensity of the magnetic pressure or current applied to one pole or magnetic pole constituting them.
It can be used as a deflection a and astigmatism lens.
この嘴M書ではj:紀の作用を行う多を悌レンズと四憔
子質童分析滲用の四極子も含め、多重極レンズとよぶ0
&!M4a子、八他子等の多重極レンズは逓11萄鴫ビ
ーム装置で使用されているtgi転対称形の磁界レンズ
、円筒レンズ、三枚g他しンズ等に比べ多くの%倣をも
っている◎例えば、四極子レンズはIl?1転対称形の
レンズに比べ比較的−い*起で迩集束レンズ作用が得ら
れること。八極子レンズまたは開口amと組み縫わせる
こと(特公昭53−30628号公報、特公昭55−2
8179号公報参照)によって回転対称レンズでは不0
71@な三次の収差の補正が可能である。八極子や八極
子は非点補正系として利用されている。また八極子は従
来の平行平板臘に比べ、偏向収差の小さい偏向系として
1子ビーム塵光装#を等では有効である。In this Beak M book, the lens that performs the action of J: is called a multipole lens, including the lens that performs the action of J: and the quadrupole for analysis of the
&! Multipole lenses such as M4a and Yatoshi have a larger number of mirrors than the TGI rotationally symmetrical magnetic field lenses, cylindrical lenses, and three-element lenses used in the 11-piece beam device.◎ For example, a quadrupole lens is Il? It is possible to obtain a converging lens action with relatively less force than a one-fold symmetrical lens. Combining and sewing with an octupole lens or aperture AM (Japanese Patent Publication No. 53-30628, Japanese Patent Publication No. 55-2
(see Publication No. 8179), rotationally symmetric lenses
It is possible to correct third-order aberrations such as 71@. Octopoles and octupole elements are used as astigmatism correction systems. In addition, the octupole is effective as a deflection system with smaller deflection aberration than the conventional parallel plate type in a single-beam optical system.
しかし、このような多重極レンズはIll造との峙14
性から^確度化をはかることか回転対称形のレンズに比
べて一シく、従来、その利用l!囲が限られていた。However, such multipole lenses face problems with Ill construction14.
Due to its nature, its use has traditionally been improved compared to rotationally symmetrical lenses due to its increased accuracy. The area was limited.
このような多を憔レンズにおける高I#度化を組むもの
は亀憔、at極等の配置関係を正確番ζ3次元でttm
、電通することが峻しい−ことである。In order to increase the I# power in such a multi-layer lens, it is necessary to accurately calculate the positional relationship of the at-poles, etc. in three dimensions.
, it is difficult to conduct electricity.
帛1図〜Im3図は四極子レンズとへ憾子レンズの従来
丙を示すものである〇
第1図は靜区型四他子レンズ本体、第2図はレンズを礁
を1ライメントするための治具である。Figures 1 to 3 show the conventional quadrupole lens and helenoid lens. Figure 1 shows the main body of the quadrupole lens, and Figure 2 shows the main body of the quadrupole lens, and Figure 2 shows the structure of the quadrupole lens. It is a jig.
図中の1.2,6.4は電極、11.lj、16゜14
は颯憔を固定するための絶縁物、9は固定用ベースであ
る。d42−の21は第1図の電極1゜2.6.4の位
置を颯制するものであり、22はνの固定ベースに対す
るt極配暖を決めるためのピンである。この場合、磁極
の位置決めをする冶具の加工−おいて、正iIt位li
t決めテーブルを舊するジグポーラ−彎を利用しでも、
穴の/S:Hれを小さくすることが離しい0また電離を
治Alこよって位#1決めを行い固定した後で、治具と
レンズを分*t6ため、冶具とt憔との嵌縫部の隙間6
ζよってズレを生じることが多い。1.2, 6.4 in the figure are electrodes, 11. lj, 16°14
9 is an insulator for fixing the suspension, and 9 is a fixing base. 21 of d42- controls the position of the electrode 1°2.6.4 in FIG. 1, and 22 is a pin for determining the heating distribution of t with respect to the fixed base of ν. In this case, when machining the jig for positioning the magnetic poles,
Even if you use a jig polar curve to open the T-determining table,
It is important to reduce /S:H of the hole0.Also, after fixing and fixing the position #1 by using Al to cure ionization, the jig and lens are fixed for a minute * t6, so that the jig and the t-hole fit together. Sewing gap 6
Misalignment often occurs due to ζ.
第3図はm具を使用しない構造の静lEmへ極子レンズ
の従来−りである。この場合、1憔61,62゜66.
64,6)、66.67.611はジグポーラ−尋「こ
よって加工された絶縁−691こ直接固定されるため第
1図に比べで、鯖差を小さくすることが可能であるoし
かし、位*mmをlOμm以下t以下上うとすると、ジ
グポーラ壷こよる加工および研磨性1げ#!に正確に一
測定する手段がなり1ことや、亀惚径と絶縁物の亀礁固
定面とのズレ會こよって位置種度の低下をきたすことが
避けられなし1o また、四極子レンズのように多投レ
ンズ系を組み立でる場合では、L下の四極子間における
1ライメント、すなわらレンズ中心の変位がナク、かつ
1g1転方向のズレ(アジマスエラー)を小さくするこ
とか大変感しvlことである〇
この発明はと紀のような問題点を薩去し、円柱または球
形の形状を組み縫わせること壷こよって尚摺度な憂を憶
レンズを夷埃するものである。現在、蚊も藺い摺度の侍
られる加工は円嫡杉や球形といった丸物である0これら
の加工は旋鉦、研削、研#告の技術の発達IC伴ってサ
ブミクロン台の摺度を借ることが可峨である。また真円
度、真球度はαO1μm台の分Is能で固定可能である
〇以下・こ、本@鴫の* #lI+ Hrこよって一顧
醗こ説明する0第411gは静を臘四礁子レンズの場合
の一夷織岡を示したものである。図中の41.42,4
6.44は屯−、bl、=2.bh、s<、bs、bb
、bz、haは絶縁物、5ν、60,61.62i[1
ffi絶縁物と同じ径−旬用外崎である0
5−子レニIズの1#Aまたは磁極の理想形状≦;各2
°。FIG. 3 shows a conventional static lEm polar lens with a structure that does not use m tools. In this case, 1 degree 61, 62 degrees 66.
64, 6), 66, 67, and 611 are directly fixed to the Jig Polar Insulator 691, compared to Fig. 1, so it is possible to reduce the difference in position. *If you try to increase the mm to less than 10 μm or less, the machining and abrasiveness of the Jig Polar pot will be difficult, and there will be no way to accurately measure it. Also, there will be a difference between the diameter of the jig and the surface of the insulator on which the tortoise is fixed. In addition, when assembling a multi-throw lens system such as a quadrupole lens, one alignment between the quadrupoles under L, that is, the center of the lens, is unavoidable. It is very impressive that the displacement is negligible and the deviation in the direction of 1 g 1 rotation (azimuth error) is reduced. This invention eliminates the problems of the previous generation and can be used to stitch cylindrical or spherical shapes. This means that the lenses are not as durable as they should be.Currently, the types of machining that can be achieved even by mosquitoes are round objects such as round cedar and spherical objects. With the development of gong, grinding, and polishing technologies, it is now possible to borrow the submicron level of sliding properties.Furthermore, the roundness and sphericity can be fixed at αO of 1 μm level. Below, I will explain this at a glance in this book @ Kazu's * #lI + Hr 0 No. 411g shows Ichiyoshi Orioka in the case of the Shizuka Shizuka lens. 41.42 in the figure ,4
6.44 is tun-,bl,=2. bh, s<, bs, bb
, bz, ha are insulators, 5ν, 60, 61.62i [1
The same diameter as the ffi insulator - 0 5-child Reni I's 1 #A or the ideal shape of the magnetic pole ≦; each 2
°.
−−1:
1做形状であるが、実用約6ζはレンズの開口径1−(
−ボア)のL145〜Lli陪の径を有する円として近
似することが出来る0いま、レンズのボア半径を息、電
極又は砿瀦の半径をR5レンズ固定用外筒の内調の半径
を几、これ暴こ内接するよう奢こ配喧する絶縁物または
非磁性材料の個数をolその半径をFLo、!−14と
≠水呑ル、RL、RD ト(Drk16+cslllよ
うな関係が成り立つ。--1: Although it has a 1-inch shape, the practical approx. 6ζ has a lens aperture diameter of 1-(
- Boa) can be approximated as a circle with a diameter of L145 to Lli. Now, the bore radius of the lens is R5, the radius of the electrode or wire is R5, and the radius of the inner diameter of the outer cylinder for fixing the lens is R5. The number of insulators or non-magnetic materials arranged so as to be inscribed here is ol, and its radius is FLo,! -14 and ≠ Mizunuru, RL, RD (Drk16+cslll).
ao=tan# (Rt、(tan(1+1 )+m+
KL” (tan #+1 ) +2RLa ta
nθ ) −−−−−11)但し、e=に7口
几=恥”” *iaa ) ・・・e1
2)1g4図においてRt、=L1463m+ことり、
鴫惚半径Rt、を6ma+とすると51〜62の絶縁−
反びロッドの半径RDを&757mm、レンズ固定用外
藺の半径Rを28 mm lcすればよいことがわかる
。ao=tan# (Rt, (tan(1+1)+m+
KL” (tan #+1) +2RLa ta
nθ ) ------11) However, e = 7 口几 = shame"" *iaa ) ... e1
2) In the 1g4 diagram, Rt, = L1463m + Kotori,
If the radius Rt is 6ma+, then the insulation of 51 to 62 -
It can be seen that the radius RD of the warping rod should be &757 mm, and the radius R of the lens fixing shell should be 28 mm lc.
このように本発11によれば1IIC極や磁極、絶縁物
や非磁性材料等の真円度とその直径を正確に決め、それ
に会わせてレンズ固定用外−の内径を決めることによっ
て、多重極レンズにおける#L惚やa礁の位置決めが高
精度にできるわけである〇縞4崗の59〜62は多段レ
ンズ系におけるアジマスエラーを抑えるための%段間の
′通しロツ°ドの役目をはたしているが、これを非磁性
金属で作ること鹸こよって、亀甑間に絶縁物がのぞくこ
とをt<シ、絞り尋による反射ビームや迷いビームによ
るlI!!縁物のチャージアップICよるレンス唾界の
みだれを小さくすることができる。ここでは絶縁物と通
しロッドの12本がレンズ固定用外11に内誉するよつ
に配11#ニジたが、絶縁物を遡しロッドの役目もはた
させること−こすれば、レンズ固定用外筒身こ内接させ
るようtこ配置tするのは絶域18本だけQ b ”J
ha cあることは明らかである0この1合、―込の
よう奢こ反射ビーム、迷いビーム等着こよるチャージγ
ノブの一影響を小さくするため、^抵抗材料を絶縁物に
蒸着し、絶縁物上の賦界を一様舎こすることはチャージ
アップ防止上有効である。また、第4図の59″−62
の遡しロッド以外の51〜58の杷−物を球形のものを
使用することも一エ能である。In this way, according to the present invention 11, by accurately determining the roundness and diameter of the 1IIC pole, magnetic pole, insulating material, non-magnetic material, etc., and determining the inner diameter of the outer lens fixing lens accordingly, multiplexing can be achieved. The positioning of #L angle and A reef in the polar lens can be done with high precision. 〇The four stripes 59 to 62 serve as the through rods between the % stages to suppress the azimuth error in the multi-stage lens system. However, since it is difficult to make it with non-magnetic metal, there is no chance that the insulator will peek out between the shells and the reflected beam or stray beam from the aperture. ! It is possible to reduce the drooping of the lens salivary area due to the charge-up IC of the edge. Here, 12 insulators and threaded rods were placed in the outer part 11 for fixing the lens, but the insulator can also be used as a rod by rubbing it. Only 18 pieces are arranged so that they are inscribed in the outer cylinder body.Q b ”J
It is clear that there is a charge γ, such as reflected beams, stray beams, etc.
In order to reduce the influence of the knob, depositing a resistive material on the insulator and uniformly rubbing the voltage on the insulator is effective in preventing charge-up. Also, 59″-62 in Figure 4
It is also possible to use spherical loquats for the loquats 51 to 58 other than the retracing rods.
この図ではレンズの側面−が表示さtICいないが、6
3−66のネジの通る部分の絶縁物の径は当然細くしで
ある。In this figure, the side of the lens is not visible, but the 6
Naturally, the diameter of the insulator where the 3-66 screw passes is thinner.
第5図と第6図の夷織列はレンズ固定用外筒とτれに内
接させる絶縁物は同一のものを使用して、四憾子と八極
子相互の1ライメントをとるよう着こした靜電臘四憔子
と静電証人惧子である。The weaving rows shown in Figures 5 and 6 are made using the same insulator as the outer cylinder for fixing the lens, and are arranged so that the quadrupole and octupole are in one alignment with each other. These are Shitsuko Seiden, who did this, and Keiko, who was a witness to static electricity.
第71と第8図は磁界型四惜子レンズの実九列をボして
いる0第7ci!Jの71.72,76.74は磁極、
76.76.77.7δは電磁コイル、79はヨーク毫
併ねたレンズ固定用外筒である。粥8図は1硫コイルを
レンズ−逆用り間のント、こ出したしのj!、l。Figures 71 and 8 are the 7th ci! 71.72 and 76.74 of J are magnetic poles,
76, 76, 77, 7.delta. is an electromagnetic coil, and 79 is an outer cylinder for fixing the lens which also serves as a yoke. Figure 8 shows the 1 sulfur coil being used between lenses and spilled out! ,l.
ci、2.f16.d4が奥憾、8コ、els6.67
、daはコイル、B9はJF−i性材料によるレンズ固
定外浦、90かヨークである。ci, 2. f16. d4 is deep regret, 8 pieces, els6.67
, da is a coil, B9 is a lens fixing outer periphery made of JF-i material, and 90 is a yoke.
以りのよう會こ本発明によって侍りれる高摺度な多直憾
しンスは釘龜ビーム装−尋の性能2同とさせるはη)り
でなく、妬め薯こ記述したような収差補正レンズ糸や電
子ビーム瘍光装置、Mk横回路儀責装を寺の烏硝度ビー
ムー向姦寺その利用範囲は広い。#嵐型四懐子レンズ系
の^摺度比は一界放射型電子枕を反った走査m電子顧鎮
鏡や亀子ビーム露元表#L畳の超^^仝系では電子光学
系をホー1ヒできること奢こよって大輪な藷性改醤が期
待できる〇また蝋近の尚4dLイオン源の開発奢ζ汗っ
でイオンビーム装置のレンズ糸としてt侠である。In other words, the high friction multi-direction that can be achieved by the present invention is not due to the same performance as the nail beam system, but rather the aberration correction as described above. Lens threads, electron beam light devices, and Mk lateral circuit ritual equipment are used in the temple's crayon beams - the scope of its use is wide. # The sliding ratio of the Arashi-type Shikaiko lens system is the scanning m electron beam mirror with a curved one-field emission type electron beam, and the Kameko beam exposure table. We can expect a large-scale improvement in the quality of the product.Also, Rochika's development of a 4 dL ion source will be useful as a lens thread for an ion beam device.
1!Li他子j[−分析器では一般的に四憾子レンズ1
こ比べ配慮が億漏に長く、ミスアライメントが分解能、
感1i1:Iこ大きく参書r6ため、本発明1こよる^
積置化はメリットか大きい。1! Li and other lenses [-In analyzers, generally four lenses 1
Compared to this, it takes a long time to consider, and misalignment causes problems with resolution and
Feeling 1i1: I have a big reference r6, so the present invention 1 is different ^
There are great benefits to having storage.
一1凶は一一櫨四憔子レンズの従来内を示す図O1〜4
は1礁、11−14は絶縁物、9はレンズ1疋用ベース
である。第2図は第11の四億子を1ライメントするた
めの治具である021は四憔子亀憔を位置決めするため
のらので、22は固定ペースとg憔との位[関詠を決め
るピンである。
弔3図は靜6を型へ惚子レンズの使米丙を示す図でめる
0!h1〜68はへ極子屯憔、69は颯憔固定用の杷−
一である。
第4−は本発明暑こよる靜亀麺四憾子の実施的でめる0
41〜44は四憔子蝋憔、51〜コdは同一径の杷w書
、59〜62は杷−物と同一径の1ジマス城制用のロッ
ド、66〜66はネジ、67〜7υは蝋圧目目口用の絶
縁物でめるo71はレンズ固゛定用外尚であるos1g
5図と第6el!Jは本発明中こよる四億子とへ極子の
実施例を示すもので同一のレンズ固定用外筒と絶縁物伊
ζよって四富子と八極子相互の1ライメントがとれるよ
う番こしたものでめる0第7図と第8図は蝉界謔四極子
普こおける本発明i(よる実施例を示すもので、第8−
は電磁コイルをレンズ固定用外筒の外憂ζ覗り付けたも
のである。
図中のハ〜74は磁極、75〜76はtmコイル、79
はレンズ固定用外筒でありヨークの役目もはたto第8
図では81〜84が磁極、85〜88が屯磁コイル、8
9はレンズ固定用外筒、90はヨークである。
%針山願人
通商腫業雀工業技術院長
石 坂 誠 −
株式会社日電子テクニクス
代表者 1)村 賊 三Diagrams O1 to 4 showing the conventional inside of the 11th and 11th lens
11-14 are insulators, and 9 is a base for lens 1. Figure 2 is a jig for making one alignment of the 11th 400 zi. 021 is a rake for positioning the 4 yakuzi, and 22 is a jig for determining the position between the fixed pace and the g zi. It's a pin. The third picture is a diagram showing the use of the Koko lens to the mold 6! h1 to 68 are hekoku tun, 69 is a loquat for fixing shu.
It is one. 4th - is a practical demonstration of the present invention's heat-loving quiet turtle noodles 0
41 to 44 are four rods, 51 to d are loquats of the same diameter, 59 to 62 are rods for one-dimensional castles with the same diameter as loquats, 66 to 66 are screws, 67 to 7υ o71 is made of insulating material for the eyes and mouth with wax pressure.Os1g is not used for lens fixation.
Figure 5 and 6el! J shows an example of the 400 million-pole element and the 8-pole element according to the present invention, and the same outer cylinder for fixing the lens and the same insulating material are arranged so that one alignment between the 400 million element and the 8-pole element can be maintained. Figures 7 and 8 show embodiments of the present invention (i) in the quadrupole world.
The electromagnetic coil is seen from the outside of the lens fixing barrel. In the figure, C ~ 74 are magnetic poles, 75 ~ 76 are tm coils, 79
is the outer cylinder for fixing the lens and also serves as a yoke.
In the figure, 81 to 84 are magnetic poles, 85 to 88 are magnetic poles, and 8
9 is an outer cylinder for fixing the lens, and 90 is a yoke. % Hariyama Ganjin, Director of the Institute of International Trade and Industry, Makoto Ishizaka - Representative of Nichiden Technics Co., Ltd. 1) Tsutomu Mura
Claims (1)
礁しンズ遥こおいて、外形寸法が晩卸の円柱形または球
形のtiiおよび絶縁物または確性および#IfI&性
材料を銀材料わせ、前記絶縁物または#I砿注性材料パ
イプ状のIllに1間なく内接するように配喧し、2つ
の隣接する絶縁物または非a性Jit科J:に電極また
は磁極を取り付けることによって、所望の位置にIII
I起鑞極または磁極を^精度に配置することを時機とす
る多重極レンズ。In a multi-reef lens for a charged beam having four-core, six-pole, and hexagonal structures, cylindrical or spherical external dimensions and insulators or solid and #IfI & magnetic materials are The material is arranged so that it is inscribed in the insulating material or the pipe-like material without a gap, and electrodes or magnetic poles are attached to two adjacent insulating materials or non-aqueous materials. III to the desired position by
A multipole lens whose purpose is to place poles or magnetic poles with precision.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP56192463A JPS5894745A (en) | 1981-11-30 | 1981-11-30 | Multipole lens |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP56192463A JPS5894745A (en) | 1981-11-30 | 1981-11-30 | Multipole lens |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS5894745A true JPS5894745A (en) | 1983-06-06 |
JPS6331895B2 JPS6331895B2 (en) | 1988-06-27 |
Family
ID=16291711
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP56192463A Granted JPS5894745A (en) | 1981-11-30 | 1981-11-30 | Multipole lens |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5894745A (en) |
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH02230647A (en) * | 1989-01-24 | 1990-09-13 | Ict Integrated Circuit Testing G Fur Halbleiterprueftechnik Mbh | Multi-position device and its manufacture |
JPH03100353U (en) * | 1990-01-30 | 1991-10-21 | ||
JP2006185637A (en) * | 2004-12-24 | 2006-07-13 | Kyocera Corp | Electrostatic deflector and electron beam device using it |
JP2007095702A (en) * | 1995-08-11 | 2007-04-12 | Mds Health Group Ltd | Spectrometer with axial electric field |
Families Citing this family (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6291828B1 (en) * | 1999-12-21 | 2001-09-18 | Axchlisrtechnologies, Inc. | Glass-like insulator for electrically isolating electrodes from ion implanter housing |
JP2007287365A (en) * | 2006-04-13 | 2007-11-01 | Jeol Ltd | Multipole lens and multipole lens manufacturing method |
Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5311280U (en) * | 1976-07-13 | 1978-01-30 | ||
JPS53133561U (en) * | 1977-03-29 | 1978-10-23 |
Family Cites Families (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
SE408787B (en) * | 1973-06-14 | 1979-07-09 | Hoechst Ag | METHODS AND DEVICES FOR THE PREPARATION OF MAINLY WATER-SOLUBLE CHAIN-SHAPED AMMONIUM POLYPHOSPHATES |
-
1981
- 1981-11-30 JP JP56192463A patent/JPS5894745A/en active Granted
Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5311280U (en) * | 1976-07-13 | 1978-01-30 | ||
JPS53133561U (en) * | 1977-03-29 | 1978-10-23 |
Cited By (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH02230647A (en) * | 1989-01-24 | 1990-09-13 | Ict Integrated Circuit Testing G Fur Halbleiterprueftechnik Mbh | Multi-position device and its manufacture |
JPH03100353U (en) * | 1990-01-30 | 1991-10-21 | ||
JP2007095702A (en) * | 1995-08-11 | 2007-04-12 | Mds Health Group Ltd | Spectrometer with axial electric field |
JP4511505B2 (en) * | 1995-08-11 | 2010-07-28 | エムディーエス アナリティカル テクノロジーズ | Analyzer with axial electric field |
JP2006185637A (en) * | 2004-12-24 | 2006-07-13 | Kyocera Corp | Electrostatic deflector and electron beam device using it |
Also Published As
Publication number | Publication date |
---|---|
JPS6331895B2 (en) | 1988-06-27 |
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