JPS5891530A - Magnetic recording medium - Google Patents

Magnetic recording medium

Info

Publication number
JPS5891530A
JPS5891530A JP56189337A JP18933781A JPS5891530A JP S5891530 A JPS5891530 A JP S5891530A JP 56189337 A JP56189337 A JP 56189337A JP 18933781 A JP18933781 A JP 18933781A JP S5891530 A JPS5891530 A JP S5891530A
Authority
JP
Japan
Prior art keywords
magnetic
layer
film
recording medium
aluminum oxide
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP56189337A
Other languages
Japanese (ja)
Inventor
Makoto Koizumi
真 小泉
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP56189337A priority Critical patent/JPS5891530A/en
Publication of JPS5891530A publication Critical patent/JPS5891530A/en
Pending legal-status Critical Current

Links

Classifications

    • GPHYSICS
    • G11INFORMATION STORAGE
    • G11BINFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B5/00Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
    • G11B5/62Record carriers characterised by the selection of the material
    • G11B5/72Protective coatings, e.g. anti-static or antifriction

Abstract

PURPOSE:To obtain a vertical magnetic recording medium with enhanced sliding strength by forming a porous aluminum oxide film impregnated with a liq. lubricant on a thin magnetic Co-Cr alloy film. CONSTITUTION:A layer such as an amorphous Co-Ti alloy film as a soft magnetic substance layer 2 is laid on each side of a nonmagnetic substrate 1 of Al or the like, and on the layer 2 a Co-Cr alloy film is formed as a magnetic medium layer 3 for vertical magnetization by a high-frequency sputtering or other method. On the layer 3 an Al film is formed by the high-frequency sputtering or other method, it is anodically oxidized, and the surface of the resulting porous aluminum oxide film 4 is coated with a liq. lubricant to impregnate the lubricant into the pores.

Description

【発明の詳細な説明】 本発明は磁気記録用記録媒体、特に磁性体としてCO−
Cr合金薄膜を用いる垂直磁気記録用記録媒体に関する
ものである。
DETAILED DESCRIPTION OF THE INVENTION The present invention relates to a magnetic recording medium, in particular a CO-
The present invention relates to a recording medium for perpendicular magnetic recording using a Cr alloy thin film.

垂直磁気記録方式は、記録媒体面に垂直な方向に信号を
磁化して記録するものでメジ、従来一般に用いられてキ
九面方向に磁化記録する水平磁気装置方式に比べ、記録
の際の各ビット内の反磁界が小さいため高密度記録に適
した方式でめる。
The perpendicular magnetic recording method records signals by magnetizing them in the direction perpendicular to the surface of the recording medium. Since the demagnetizing field inside the bit is small, this method is suitable for high-density recording.

C0−Cr合金薄膜は、磁化容易軸が面に垂直な方向を
向く磁性薄膜でめり、垂直磁気記録方式料として非常に
有望である。しかしながら、C0−Cr合金薄膜は、金
属薄膜であり、磁気ヘッドに対する摺動強度に難点がめ
った。
A C0-Cr alloy thin film is a magnetic thin film in which the axis of easy magnetization is perpendicular to the surface, and is very promising as a material for perpendicular magnetic recording. However, the C0-Cr alloy thin film is a metal thin film and has a drawback in terms of sliding strength against a magnetic head.

本発明の目的は、Co−Cr合金薄膜等の金属薄膜の摺
動強度を改善した磁気記録媒体を提供することである。
An object of the present invention is to provide a magnetic recording medium in which the sliding strength of a metal thin film such as a Co--Cr alloy thin film is improved.

かかる目的を達成するために、本発明は、C0−Cr合
金薄膜等の金属漠磁性体層上に多孔質酸化アルミ膜を設
け、この多孔質酸化アルミ膜に液体潤滑剤を含浸させる
ことにより、磁性体層に潤滑作用をもたせて、摺動強度
を向上せしめたものである。本発明による磁気記録媒体
は、C0−Cr合金薄膜等の金属展磁性体層上に高周波
スパッタ法により・At膜を被着し、このAt膜を陽極
酸化法により多孔質酸化アルし膜に変換した後、この多
孔質酸化アルミ膜に液体潤滑剤を含浸することにより得
られる。
In order to achieve such an object, the present invention provides a porous aluminum oxide film on a metal magnetic material layer such as a CO-Cr alloy thin film, and impregnates this porous aluminum oxide film with a liquid lubricant. The magnetic layer has a lubricating effect to improve sliding strength. The magnetic recording medium according to the present invention is produced by depositing an At film on a metal magnetic layer such as a C0-Cr alloy thin film by high-frequency sputtering, and converting this At film into a porous aluminum oxide film by anodizing. After that, the porous aluminum oxide film is impregnated with a liquid lubricant.

以下、実施例によシ本発明の詳細な説明する。Hereinafter, the present invention will be explained in detail by way of examples.

第1図に本発明による磁気記録媒体の一例を示す。FIG. 1 shows an example of a magnetic recording medium according to the present invention.

非磁性基板lとして研磨により表面を平滑にしたディス
ク状の高純度(99,9%以上]At板を用い、その両
面に軟磁性体層2とじて高周波スパッタ法によりCo−
Ti非晶質膜(Tt :19〜21重量%、膜厚0.4
〜0.6μm)を形成した。
A disk-shaped high-purity (99.9% or more) At plate whose surface has been smoothed by polishing is used as the non-magnetic substrate l, and a soft magnetic layer 2 is formed on both sides of the Co-coated plate by high-frequency sputtering.
Ti amorphous film (Tt: 19-21% by weight, film thickness 0.4
~0.6 μm) was formed.

なお、非磁性基板1の材料としてはAt、真ちゅう等の
非磁性合金に限らず、有機ポリマーあるいはガラス等で
ろってよく、ディスク状でなく長尺テープであってもよ
い。また、軟磁性体層2は垂直磁気記録再生の効率を高
めるために設けられたものであり、磁気抵抗が十分に小
さい、即ち透磁率の高い磁性体であればよい。このよう
な高透磁率磁性体としては、上記のCo−4’i合金以
外にpc−Ni合金あるいはコレにMO,Cf、Vなど
を添加した一般にパーマロイという名称で知られる合金
% Co−Fe−8i−Be Co−Mo −Zr、C
O,−T車−〇r等非晶質合金、などを用いることがで
きる。特に、80〜82%パーマロイ、CO−Zr−M
O(Zr : 8〜10重量%。
The material of the non-magnetic substrate 1 is not limited to non-magnetic alloys such as At and brass, but may also be organic polymers, glass, etc., and may be a long tape rather than a disk. The soft magnetic layer 2 is provided to improve the efficiency of perpendicular magnetic recording and reproduction, and may be any magnetic material that has sufficiently low magnetic resistance, that is, high magnetic permeability. In addition to the above-mentioned Co-4'i alloy, examples of such high permeability magnetic materials include pc-Ni alloy, and an alloy generally known as permalloy in which MO, Cf, V, etc. are added. 8i-Be Co-Mo-Zr,C
Amorphous alloys such as O, -T wheel-○r, etc. can be used. In particular, 80-82% permalloy, CO-Zr-M
O(Zr: 8-10% by weight.

MO:10〜12重量%)非晶質合金が好ましい。MO: 10-12% by weight) Amorphous alloys are preferred.

軟磁性体層2の上に磁性媒体層3として高周波スパッタ
法によりCO−Cr合金膜(Cr:17〜25重量%、
膜厚0.4〜1.5μm)を形成した。
A CO-Cr alloy film (Cr: 17-25% by weight,
A film thickness of 0.4 to 1.5 μm) was formed.

磁性媒体層の材料としてはCO−CrにQd。The material for the magnetic medium layer is CO-Cr and Qd.

’[’b、D)’、ErlるいはHO等を添加した合金
を用いることができる。また、軟磁性体層2と磁性媒体
層30間に適当な非磁性中間層を設けることにより、磁
性媒体層3の磁気特性を向上させることができる。この
ような非磁性中間層としてはsto、、 Tio、、 
Az、o、などの絶縁物、あるいはTi、Cr、At、
MO,W、CO,AVなどの金属薄膜を用いることがで
きる。
'['b, D)', an alloy to which Erl or HO is added can be used. Further, by providing a suitable nonmagnetic intermediate layer between the soft magnetic layer 2 and the magnetic medium layer 30, the magnetic properties of the magnetic medium layer 3 can be improved. Such non-magnetic intermediate layers include sto, tio, .
Insulators such as Az, O, or Ti, Cr, At,
Metal thin films such as MO, W, CO, and AV can be used.

次に、磁性媒体層3の上に高周波スパッタ法により厚み
α3〜0.4μmのAt膜を形成し、このように構成し
た円板を5%シュウ酸溶液に浸し、30C1電流密度0
.8〜0.9 m A /cm”で60分間陽極酸化を
行い、上記のAt膜を多孔質酸化アルミ被膜4にした。
Next, an At film with a thickness of α3 to 0.4 μm is formed on the magnetic medium layer 3 by high-frequency sputtering, and the disk thus constructed is immersed in a 5% oxalic acid solution, and a current density of 30C1 is 0.
.. Anodic oxidation was performed at 8 to 0.9 mA/cm'' for 60 minutes to form the above At film into a porous aluminum oxide film 4.

この後、この円板を水洗・乾−燥させ、研磨により多孔
質酸化アルミ膜4の表面      □を平滑にして、
この多孔質酸化アルミ膜4の厚みを0.1〜0.15μ
mにした。そして、この多孔質酸化アルミ膜4の表面に
液体潤滑剤としてデュポン社りライトツクス142の5
%希釈液をスピンナーを用いて塗布した。最後に、仕上
げとしてノ(ニツシエヘッドを用いてバニッシングを行
なって多孔質酸化アルミ膜40表面を平滑にし、この多
孔質酸化アルミ膜4の厚みを0.05〜0.1μmにす
ると同時に上記の液体潤滑剤を含浸させた。本実施例の
磁気記録媒体によれば、多孔質酸化アルミ膜には液体潤
滑剤が含浸されており、シかもこの多孔質酸化アルミ膜
は高硬度であることから、Co−Cr合金薄膜の保護層
として有効に作用し、酸化アルミ膜がない場合に比べて
磁気ヘッドに対する摺動強度が約500倍向上した。
After that, this disk was washed with water and dried, and the surface □ of the porous aluminum oxide film 4 was smoothed by polishing.
The thickness of this porous aluminum oxide film 4 is 0.1 to 0.15μ.
I made it m. Then, on the surface of this porous aluminum oxide film 4, as a liquid lubricant, 5
% diluted solution was applied using a spinner. Finally, as a finishing step, burnishing is performed using a Nitsushi head to smooth the surface of the porous aluminum oxide film 40, and at the same time, the thickness of the porous aluminum oxide film 4 is made 0.05 to 0.1 μm. According to the magnetic recording medium of this example, the porous aluminum oxide film is impregnated with a liquid lubricant, and since the porous aluminum oxide film has high hardness, Co It acted effectively as a protective layer for the -Cr alloy thin film, and the sliding strength against the magnetic head was improved about 500 times compared to the case without the aluminum oxide film.

なお、上述の実施例においては軟磁性体層と磁性媒体層
の二層構造の記録媒体を例として示したが、本発明は軟
磁性体層のtz単層構造の記録媒体にも適用できる。こ
の場合、非磁性基板としてlt基板あるいは真ちゅう基
板等金属基板を用いる場合には、co−cr薄膜の垂直
磁気特性を向上させるために、′非磁性基板と磁性媒体
層との間に8i0を膜、 A40m’膜等の非晶質膜を
設けることは有効でおる。
In the above-described embodiments, a recording medium having a two-layer structure of a soft magnetic layer and a magnetic medium layer was shown as an example, but the present invention can also be applied to a recording medium having a tz single layer structure of a soft magnetic layer. In this case, when a metal substrate such as an LT substrate or a brass substrate is used as the nonmagnetic substrate, in order to improve the perpendicular magnetic properties of the co-cr thin film, an 8i0 film is added between the nonmagnetic substrate and the magnetic medium layer. , It is effective to provide an amorphous film such as an A40m' film.

また、上述の実施例においては、磁性媒体層としてco
−Cr合金薄膜を用いた垂直磁気記録用媒体についての
み説明したが、本発明はこのような垂直磁気記録用媒体
に限らず、磁性媒体層としてスパッタ法、真空蒸着法あ
るいはメッキ等により形成された金属磁性薄膜を用いる
磁気記録媒体、例えば、Co−N1−p合金薄膜を用い
る水平磁気記録用媒体にも適用できる。
Further, in the above embodiment, the magnetic medium layer is made of cocoon.
- Although only a perpendicular magnetic recording medium using a Cr alloy thin film has been described, the present invention is not limited to such a perpendicular magnetic recording medium, but can also be applied to a magnetic medium layer formed by sputtering, vacuum evaporation, plating, etc. It is also applicable to magnetic recording media using metal magnetic thin films, for example, horizontal magnetic recording media using Co--N1-p alloy thin films.

【図面の簡単な説明】[Brief explanation of drawings]

第1図は本発明の一実施例を示す断面図である。 FIG. 1 is a sectional view showing one embodiment of the present invention.

Claims (1)

【特許請求の範囲】[Claims] 1、非磁性基板上にco−Cr合金からなる磁気配置用
磁性体層を有する磁気記録媒体において、上記磁性体層
上に多孔質酸化アルミ膜を設けるとともに1上記多孔質
酸化アルミHに液体潤滑剤を含浸させたことを特徴とす
る磁気記録媒体。
1. In a magnetic recording medium having a magnetic layer for magnetic arrangement made of a co-Cr alloy on a non-magnetic substrate, a porous aluminum oxide film is provided on the magnetic layer, and 1. liquid lubrication is applied to the porous aluminum oxide H. A magnetic recording medium characterized by being impregnated with an agent.
JP56189337A 1981-11-27 1981-11-27 Magnetic recording medium Pending JPS5891530A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP56189337A JPS5891530A (en) 1981-11-27 1981-11-27 Magnetic recording medium

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP56189337A JPS5891530A (en) 1981-11-27 1981-11-27 Magnetic recording medium

Publications (1)

Publication Number Publication Date
JPS5891530A true JPS5891530A (en) 1983-05-31

Family

ID=16239646

Family Applications (1)

Application Number Title Priority Date Filing Date
JP56189337A Pending JPS5891530A (en) 1981-11-27 1981-11-27 Magnetic recording medium

Country Status (1)

Country Link
JP (1) JPS5891530A (en)

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