JPS5887253U - 電子ビ−ム源 - Google Patents

電子ビ−ム源

Info

Publication number
JPS5887253U
JPS5887253U JP18387381U JP18387381U JPS5887253U JP S5887253 U JPS5887253 U JP S5887253U JP 18387381 U JP18387381 U JP 18387381U JP 18387381 U JP18387381 U JP 18387381U JP S5887253 U JPS5887253 U JP S5887253U
Authority
JP
Japan
Prior art keywords
electron beam
beam source
emission surface
heating current
electron
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP18387381U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0143809Y2 (enrdf_load_stackoverflow
Inventor
出沢　正徳
英一 後藤
染谷　輝夫
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Jeol Ltd
RIKEN
Original Assignee
Jeol Ltd
RIKEN
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Jeol Ltd, RIKEN filed Critical Jeol Ltd
Priority to JP18387381U priority Critical patent/JPS5887253U/ja
Publication of JPS5887253U publication Critical patent/JPS5887253U/ja
Application granted granted Critical
Publication of JPH0143809Y2 publication Critical patent/JPH0143809Y2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Electron Sources, Ion Sources (AREA)
  • Electron Beam Exposure (AREA)
JP18387381U 1981-12-10 1981-12-10 電子ビ−ム源 Granted JPS5887253U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP18387381U JPS5887253U (ja) 1981-12-10 1981-12-10 電子ビ−ム源

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP18387381U JPS5887253U (ja) 1981-12-10 1981-12-10 電子ビ−ム源

Publications (2)

Publication Number Publication Date
JPS5887253U true JPS5887253U (ja) 1983-06-13
JPH0143809Y2 JPH0143809Y2 (enrdf_load_stackoverflow) 1989-12-19

Family

ID=29983522

Family Applications (1)

Application Number Title Priority Date Filing Date
JP18387381U Granted JPS5887253U (ja) 1981-12-10 1981-12-10 電子ビ−ム源

Country Status (1)

Country Link
JP (1) JPS5887253U (enrdf_load_stackoverflow)

Also Published As

Publication number Publication date
JPH0143809Y2 (enrdf_load_stackoverflow) 1989-12-19

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