JPS5880470A - 装置系内の不純物除去方法 - Google Patents

装置系内の不純物除去方法

Info

Publication number
JPS5880470A
JPS5880470A JP17719681A JP17719681A JPS5880470A JP S5880470 A JPS5880470 A JP S5880470A JP 17719681 A JP17719681 A JP 17719681A JP 17719681 A JP17719681 A JP 17719681A JP S5880470 A JPS5880470 A JP S5880470A
Authority
JP
Japan
Prior art keywords
gas
impurities
compressor
valve
replacement
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP17719681A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6149591B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html
Inventor
粟田　義久
聖 村上
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP17719681A priority Critical patent/JPS5880470A/ja
Publication of JPS5880470A publication Critical patent/JPS5880470A/ja
Publication of JPS6149591B2 publication Critical patent/JPS6149591B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Separation By Low-Temperature Treatments (AREA)
JP17719681A 1981-11-06 1981-11-06 装置系内の不純物除去方法 Granted JPS5880470A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP17719681A JPS5880470A (ja) 1981-11-06 1981-11-06 装置系内の不純物除去方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP17719681A JPS5880470A (ja) 1981-11-06 1981-11-06 装置系内の不純物除去方法

Publications (2)

Publication Number Publication Date
JPS5880470A true JPS5880470A (ja) 1983-05-14
JPS6149591B2 JPS6149591B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1986-10-30

Family

ID=16026853

Family Applications (1)

Application Number Title Priority Date Filing Date
JP17719681A Granted JPS5880470A (ja) 1981-11-06 1981-11-06 装置系内の不純物除去方法

Country Status (1)

Country Link
JP (1) JPS5880470A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63187067A (ja) * 1987-01-30 1988-08-02 株式会社日立製作所 極低温液化冷凍装置

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63136494U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) * 1987-02-27 1988-09-07

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63187067A (ja) * 1987-01-30 1988-08-02 株式会社日立製作所 極低温液化冷凍装置

Also Published As

Publication number Publication date
JPS6149591B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1986-10-30

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