JPS587503A - 容量式変位計 - Google Patents

容量式変位計

Info

Publication number
JPS587503A
JPS587503A JP56106373A JP10637381A JPS587503A JP S587503 A JPS587503 A JP S587503A JP 56106373 A JP56106373 A JP 56106373A JP 10637381 A JP10637381 A JP 10637381A JP S587503 A JPS587503 A JP S587503A
Authority
JP
Japan
Prior art keywords
electrode plates
displacement meter
distance
sensitivity
electrode
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP56106373A
Other languages
English (en)
Japanese (ja)
Other versions
JPS626164B2 (enrdf_load_stackoverflow
Inventor
Yukio Nakamori
中森 幸雄
Toshiki Washitani
鷲谷 年己
Shinichi Kamimura
真一 上村
Hiroshi Soga
弘 曽我
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nippon Steel Corp
Original Assignee
Nippon Steel Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nippon Steel Corp filed Critical Nippon Steel Corp
Priority to JP56106373A priority Critical patent/JPS587503A/ja
Publication of JPS587503A publication Critical patent/JPS587503A/ja
Publication of JPS626164B2 publication Critical patent/JPS626164B2/ja
Granted legal-status Critical Current

Links

Classifications

    • GPHYSICS
    • G01MEASURING; TESTING
    • G01BMEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B7/00Measuring arrangements characterised by the use of electric or magnetic techniques
    • G01B7/02Measuring arrangements characterised by the use of electric or magnetic techniques for measuring length, width or thickness
    • G01B7/023Measuring arrangements characterised by the use of electric or magnetic techniques for measuring length, width or thickness for measuring distance between sensor and object

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Measurement Of Levels Of Liquids Or Fluent Solid Materials (AREA)
  • Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)
  • Transmission And Conversion Of Sensor Element Output (AREA)
JP56106373A 1981-07-08 1981-07-08 容量式変位計 Granted JPS587503A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP56106373A JPS587503A (ja) 1981-07-08 1981-07-08 容量式変位計

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP56106373A JPS587503A (ja) 1981-07-08 1981-07-08 容量式変位計

Publications (2)

Publication Number Publication Date
JPS587503A true JPS587503A (ja) 1983-01-17
JPS626164B2 JPS626164B2 (enrdf_load_stackoverflow) 1987-02-09

Family

ID=14431912

Family Applications (1)

Application Number Title Priority Date Filing Date
JP56106373A Granted JPS587503A (ja) 1981-07-08 1981-07-08 容量式変位計

Country Status (1)

Country Link
JP (1) JPS587503A (enrdf_load_stackoverflow)

Cited By (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63115706U (enrdf_load_stackoverflow) * 1987-01-23 1988-07-26
JPS6444425U (enrdf_load_stackoverflow) * 1987-09-10 1989-03-16
JPH0815238A (ja) * 1994-07-05 1996-01-19 Nec Corp Icパッケージ評価システム
WO1998010239A1 (fr) * 1996-09-06 1998-03-12 Yashima Engineering Co., Ltd. Capteur de capacite
JP2001035327A (ja) * 1999-07-22 2001-02-09 Sumitomo Metal Ind Ltd 静電容量型近接センサ
US6476620B2 (en) 1996-09-06 2002-11-05 Ks Techno Co., Ltd. Electrostatic capacity sensor
WO2003023332A1 (en) * 2001-09-04 2003-03-20 Alubo Co., Ltd. Capacitance coupled sensor and substance detecting method using capacitance-coupled sensor
EP1148315A3 (en) * 2000-04-20 2003-09-10 Hewlett-Packard Company Capacitive thickness measurement

Cited By (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63115706U (enrdf_load_stackoverflow) * 1987-01-23 1988-07-26
JPS6444425U (enrdf_load_stackoverflow) * 1987-09-10 1989-03-16
JPH0815238A (ja) * 1994-07-05 1996-01-19 Nec Corp Icパッケージ評価システム
WO1998010239A1 (fr) * 1996-09-06 1998-03-12 Yashima Engineering Co., Ltd. Capteur de capacite
US6476620B2 (en) 1996-09-06 2002-11-05 Ks Techno Co., Ltd. Electrostatic capacity sensor
JP2001035327A (ja) * 1999-07-22 2001-02-09 Sumitomo Metal Ind Ltd 静電容量型近接センサ
EP1148315A3 (en) * 2000-04-20 2003-09-10 Hewlett-Packard Company Capacitive thickness measurement
WO2003023332A1 (en) * 2001-09-04 2003-03-20 Alubo Co., Ltd. Capacitance coupled sensor and substance detecting method using capacitance-coupled sensor
CN1308659C (zh) * 2001-09-04 2007-04-04 株式会社阿尔宝 电容耦合式传感器装置及使用了电容耦合式传感器装置的物质检测方法
US7387619B2 (en) 2001-09-04 2008-06-17 Aluvo Co., Ltd. Capacitance coupled sensor and substance detecting method using capacitance-coupled sensor

Also Published As

Publication number Publication date
JPS626164B2 (enrdf_load_stackoverflow) 1987-02-09

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