JPS587503A - 容量式変位計 - Google Patents
容量式変位計Info
- Publication number
- JPS587503A JPS587503A JP56106373A JP10637381A JPS587503A JP S587503 A JPS587503 A JP S587503A JP 56106373 A JP56106373 A JP 56106373A JP 10637381 A JP10637381 A JP 10637381A JP S587503 A JPS587503 A JP S587503A
- Authority
- JP
- Japan
- Prior art keywords
- electrode plates
- displacement meter
- distance
- sensitivity
- electrode
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B7/00—Measuring arrangements characterised by the use of electric or magnetic techniques
- G01B7/02—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring length, width or thickness
- G01B7/023—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring length, width or thickness for measuring distance between sensor and object
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Measurement Of Levels Of Liquids Or Fluent Solid Materials (AREA)
- Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)
- Transmission And Conversion Of Sensor Element Output (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP56106373A JPS587503A (ja) | 1981-07-08 | 1981-07-08 | 容量式変位計 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP56106373A JPS587503A (ja) | 1981-07-08 | 1981-07-08 | 容量式変位計 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS587503A true JPS587503A (ja) | 1983-01-17 |
JPS626164B2 JPS626164B2 (enrdf_load_stackoverflow) | 1987-02-09 |
Family
ID=14431912
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP56106373A Granted JPS587503A (ja) | 1981-07-08 | 1981-07-08 | 容量式変位計 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS587503A (enrdf_load_stackoverflow) |
Cited By (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS63115706U (enrdf_load_stackoverflow) * | 1987-01-23 | 1988-07-26 | ||
JPS6444425U (enrdf_load_stackoverflow) * | 1987-09-10 | 1989-03-16 | ||
JPH0815238A (ja) * | 1994-07-05 | 1996-01-19 | Nec Corp | Icパッケージ評価システム |
WO1998010239A1 (fr) * | 1996-09-06 | 1998-03-12 | Yashima Engineering Co., Ltd. | Capteur de capacite |
JP2001035327A (ja) * | 1999-07-22 | 2001-02-09 | Sumitomo Metal Ind Ltd | 静電容量型近接センサ |
US6476620B2 (en) | 1996-09-06 | 2002-11-05 | Ks Techno Co., Ltd. | Electrostatic capacity sensor |
WO2003023332A1 (en) * | 2001-09-04 | 2003-03-20 | Alubo Co., Ltd. | Capacitance coupled sensor and substance detecting method using capacitance-coupled sensor |
EP1148315A3 (en) * | 2000-04-20 | 2003-09-10 | Hewlett-Packard Company | Capacitive thickness measurement |
-
1981
- 1981-07-08 JP JP56106373A patent/JPS587503A/ja active Granted
Cited By (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS63115706U (enrdf_load_stackoverflow) * | 1987-01-23 | 1988-07-26 | ||
JPS6444425U (enrdf_load_stackoverflow) * | 1987-09-10 | 1989-03-16 | ||
JPH0815238A (ja) * | 1994-07-05 | 1996-01-19 | Nec Corp | Icパッケージ評価システム |
WO1998010239A1 (fr) * | 1996-09-06 | 1998-03-12 | Yashima Engineering Co., Ltd. | Capteur de capacite |
US6476620B2 (en) | 1996-09-06 | 2002-11-05 | Ks Techno Co., Ltd. | Electrostatic capacity sensor |
JP2001035327A (ja) * | 1999-07-22 | 2001-02-09 | Sumitomo Metal Ind Ltd | 静電容量型近接センサ |
EP1148315A3 (en) * | 2000-04-20 | 2003-09-10 | Hewlett-Packard Company | Capacitive thickness measurement |
WO2003023332A1 (en) * | 2001-09-04 | 2003-03-20 | Alubo Co., Ltd. | Capacitance coupled sensor and substance detecting method using capacitance-coupled sensor |
CN1308659C (zh) * | 2001-09-04 | 2007-04-04 | 株式会社阿尔宝 | 电容耦合式传感器装置及使用了电容耦合式传感器装置的物质检测方法 |
US7387619B2 (en) | 2001-09-04 | 2008-06-17 | Aluvo Co., Ltd. | Capacitance coupled sensor and substance detecting method using capacitance-coupled sensor |
Also Published As
Publication number | Publication date |
---|---|
JPS626164B2 (enrdf_load_stackoverflow) | 1987-02-09 |
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