JPS57147068A - Surface potential sensor - Google Patents

Surface potential sensor

Info

Publication number
JPS57147068A
JPS57147068A JP56032445A JP3244581A JPS57147068A JP S57147068 A JPS57147068 A JP S57147068A JP 56032445 A JP56032445 A JP 56032445A JP 3244581 A JP3244581 A JP 3244581A JP S57147068 A JPS57147068 A JP S57147068A
Authority
JP
Japan
Prior art keywords
chopper
potential
measured
voltage
electrode
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP56032445A
Other languages
Japanese (ja)
Inventor
Koji Suzuki
Joji Nagahira
Koki Kuroda
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Canon Inc
Original Assignee
Canon Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Canon Inc filed Critical Canon Inc
Priority to JP56032445A priority Critical patent/JPS57147068A/en
Publication of JPS57147068A publication Critical patent/JPS57147068A/en
Pending legal-status Critical Current

Links

Classifications

    • GPHYSICS
    • G01MEASURING; TESTING
    • G01RMEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R29/00Arrangements for measuring or indicating electric quantities not covered by groups G01R19/00 - G01R27/00
    • G01R29/24Arrangements for measuring quantities of charge

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Control Or Security For Electrophotography (AREA)

Abstract

PURPOSE:To eliminate the influence of gain fluctuation and drift accompanied with the environmental change of a processing circuit, by using a piezoelectric element as a chopper driving means and feeding back the output of a sensor to shield member and a chopper part. CONSTITUTION:A measuring window 21 is opened and closed at a constant period by the oscillation of a piezoelectric tuning fork 12 where piezoelectric elements 13 and 13b are attached to the side part, and chopper electrodes 14 interlink to break the line of electric force based on the electric charge of a face to be measured, thereby inducing an AC voltage having an amplitude proportional to the differential potential between a potential to be measured and the chopper potential on the electrode surface of a measuring electrode 17. This induced signal is amplified by preamplifiers 29 and 30 and is subjected to the DC regenerative amplification and is fed back to the chopper electrode 14 and a shield cover 20 to keep the chopper potential and the shield potential in the same value as the potential to be measured. Thus, the voltage fed back to the chopper is the voltage to be measured itself which is fluctuated by a measure distance, and a high-precision measurement is possible.
JP56032445A 1981-03-09 1981-03-09 Surface potential sensor Pending JPS57147068A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP56032445A JPS57147068A (en) 1981-03-09 1981-03-09 Surface potential sensor

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP56032445A JPS57147068A (en) 1981-03-09 1981-03-09 Surface potential sensor

Publications (1)

Publication Number Publication Date
JPS57147068A true JPS57147068A (en) 1982-09-10

Family

ID=12359153

Family Applications (1)

Application Number Title Priority Date Filing Date
JP56032445A Pending JPS57147068A (en) 1981-03-09 1981-03-09 Surface potential sensor

Country Status (1)

Country Link
JP (1) JPS57147068A (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57188170U (en) * 1981-05-26 1982-11-29
JPH03216563A (en) * 1990-01-22 1991-09-24 Nec Corp Potential measuring method and potential sensor
US5315232A (en) * 1991-01-03 1994-05-24 Stewart Michael F Electric field measuring system

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57188170U (en) * 1981-05-26 1982-11-29
JPH03216563A (en) * 1990-01-22 1991-09-24 Nec Corp Potential measuring method and potential sensor
US5315232A (en) * 1991-01-03 1994-05-24 Stewart Michael F Electric field measuring system

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