JPS57147068A - Surface potential sensor - Google Patents
Surface potential sensorInfo
- Publication number
- JPS57147068A JPS57147068A JP56032445A JP3244581A JPS57147068A JP S57147068 A JPS57147068 A JP S57147068A JP 56032445 A JP56032445 A JP 56032445A JP 3244581 A JP3244581 A JP 3244581A JP S57147068 A JPS57147068 A JP S57147068A
- Authority
- JP
- Japan
- Prior art keywords
- chopper
- potential
- measured
- voltage
- electrode
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R29/00—Arrangements for measuring or indicating electric quantities not covered by groups G01R19/00 - G01R27/00
- G01R29/24—Arrangements for measuring quantities of charge
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Control Or Security For Electrophotography (AREA)
Abstract
PURPOSE:To eliminate the influence of gain fluctuation and drift accompanied with the environmental change of a processing circuit, by using a piezoelectric element as a chopper driving means and feeding back the output of a sensor to shield member and a chopper part. CONSTITUTION:A measuring window 21 is opened and closed at a constant period by the oscillation of a piezoelectric tuning fork 12 where piezoelectric elements 13 and 13b are attached to the side part, and chopper electrodes 14 interlink to break the line of electric force based on the electric charge of a face to be measured, thereby inducing an AC voltage having an amplitude proportional to the differential potential between a potential to be measured and the chopper potential on the electrode surface of a measuring electrode 17. This induced signal is amplified by preamplifiers 29 and 30 and is subjected to the DC regenerative amplification and is fed back to the chopper electrode 14 and a shield cover 20 to keep the chopper potential and the shield potential in the same value as the potential to be measured. Thus, the voltage fed back to the chopper is the voltage to be measured itself which is fluctuated by a measure distance, and a high-precision measurement is possible.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP56032445A JPS57147068A (en) | 1981-03-09 | 1981-03-09 | Surface potential sensor |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP56032445A JPS57147068A (en) | 1981-03-09 | 1981-03-09 | Surface potential sensor |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS57147068A true JPS57147068A (en) | 1982-09-10 |
Family
ID=12359153
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP56032445A Pending JPS57147068A (en) | 1981-03-09 | 1981-03-09 | Surface potential sensor |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS57147068A (en) |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS57188170U (en) * | 1981-05-26 | 1982-11-29 | ||
JPH03216563A (en) * | 1990-01-22 | 1991-09-24 | Nec Corp | Potential measuring method and potential sensor |
US5315232A (en) * | 1991-01-03 | 1994-05-24 | Stewart Michael F | Electric field measuring system |
-
1981
- 1981-03-09 JP JP56032445A patent/JPS57147068A/en active Pending
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS57188170U (en) * | 1981-05-26 | 1982-11-29 | ||
JPH03216563A (en) * | 1990-01-22 | 1991-09-24 | Nec Corp | Potential measuring method and potential sensor |
US5315232A (en) * | 1991-01-03 | 1994-05-24 | Stewart Michael F | Electric field measuring system |
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