JPS5874072A - Electrooptical reader - Google Patents

Abstract

PURPOSE:To obtain a reader with extremely high reading resolving power, by arranging poly Si having photoelectric effect in an array and providing electrodes by pinching each film. CONSTITUTION:The poly Si film 3 in approx. 5,000Angstrom -3mum is evaporated on a ceramic substrate 1 so as to lie over the pairs of electrodes 2A, 2B, and both ends of the electrode are forced out of both sides of the film 3 and covered with transparent protection film according to necessity. The film 3 is divided into a many film sections 3A consisting of units of regions each between the electrode 2A and 2B, and, when some of the film sections 3 are irradiated, the resistance value of the film 3A section greatly decreases. When a voltage is kept impressed across the film 3A, a photocurrent flows between the electrodes 2A, 2B on both sides of the film. The photocurrent is read by moving the array of the film 3A in a direction at right angle with the array and scanning it on the surface to be irradiated. The film 3A is formed in approx. 12mum and the reading resolving power can be extremely enhanced. Besides, when a long converging lens is provided on the surface, and each film 3A is projected, the sensitivity can be improved.

Description

[Detailed description of the invention] The invention is an electro-optical reader VcIl-t''.

K to electro-optically read #C of a character 1 graphic brocade displayed on a surface to be illuminated with an area such as a recording paper.

Conventionally, individual photoelectric elements were arranged in a straight line to form a 1L
li! I use L intermediary reading station + funo as normal. According to this, the reading surface C of the reading device (the surface where the mahjong is incident from the irradiated surface) is placed facing the irradiated surface, and the reading device and Stone by moving one side or the other side relative to the irradiated surface. As a result, #IC1 is set so that the light receiving elements can be arranged in one line and the irradiated surface can be divided into a number of columns and read out sequentially.

However, according to the reading device, how can a large number of individual photoelectric elements be arranged in parallel to form Ia+Funo, so that the size of the photoelectric element is KM?
Due to this limitation, the reading resolution becomes small due to this limitation.

This invention makes the irradiated surface face down! ! I! Torifunias★su.

Extremely high tx reading resolution! The purpose is to provide electrical installation + stone.

This invention uses a polysilicon film formed by, for example, an electrophase growth method or the like to construct an electric sword optical reading device by utilizing the photovoltaic effect of the LA, and in particular, a poly-V recon Mb or the like. A number of 1111 m long sections were set up along one row at close intervals.

The FT is characterized by installing electrodes across each membrane part, and the thin film is installed at regular intervals, and the electric Wii is installed on this.The technology is based on integrated circuits.The technology is based on silicon wafers. The tactile technology for mulberry film on the surface or the technology for forming resistive films and electrodes has already been put into practical use, such as printers, printers, etc. Bo13 invented by Jin
The formation of electrodes in the prismatic region can be easily achieved by these techniques.

PolyFilcon II is made of alumina or other ceramics.

Does this kind of polysilicon film flow under the irradiation light of xnnoLUX? The ratio of JE & non-irradiated mackerel Kfl to the dark current is l♂ ~ 1c; sJt and this large 1 & current ratio t
Used as P monk + Fu, also signal response time CR15e
tj-me/Fall 1me) ti life is Z
oo 4m x 1004m, so I'm looking forward to a 500n second culm ★fu. Note that by diffusing oxygen atoms, etc. into the polysilicon film, the dark current can be lowered by -1.
It is possible to increase the electric current ratio by four times by suddenly and sparrow. If necessary, a long t
! By layering the optical lens, the detection sensation on the skin can be significantly improved.

There are about 13 pieces of &ff1 interlayer in the membrane part of the 9 membranes lined up in one row! l-Ami is able to play.

The light receiving elements of heavy oil are lined up as in the past.
If you compare it to a book, it is clear that the reading resolution is much higher than that of a single light-receiving element with a light-receiving surface density of mm.

An embodiment of the present invention will be explained with reference to the drawings, where l is an insulating substrate made by Setsmic et al., mA, and 213 is a mutual L/
-H to pair S- with one electrode, one from multiple pairs as shown in the figure, one
'■ Namely, this electrode is formed into a thin film using a steaming tube or other means. 3 is a polysilicon film, and on the surface of the base 1, there is a layer between the winter W poles 2A and 2B. The stone is composed of vapor deposited and other materials, in this case, seriously wi2^.

The #IC-recon film 3 is formed so as to protrude from the WIjk of the double-ended poly V recon 113 of 2B. 1. If necessary, a transparent protective film is installed on the surface of the rf7jvc.

According to the above 1lIFltt, the BOIs/1con membrane 3 is divided into 4 membrane parts 3AKfK, with the electrodes mA and 2Bfil'l intersecting with each other forming one area. As soon as the light is projected onto the film part 3AK of the film part 3AK, the resistance value of the film part 3^ decreases significantly as described above. If you threaten to apply a voltage between the membrane parts,
1 so that the charging fi is immersed between the electric current @jan0mB that touches both sides of the 11th part. Optically read the image of the power source and the shadow of the character 0 on the irradiated surface. Relative K1 of the row of part 3A in the direction perpendicular to that row
It is always possible to read the irradiated rf1 by moving the irradiated rf1 and sequentially scanning the irradiated if.
An, aa per 1m1t1.

6 or more 14ffi 81 degrees and + stone is the current engineering Cl1i1
From a technology point of view, it is possible to put Jb#IC into practical use in the spring.
-★The sparrow has an extremely high reading resolution.
lfu.

As shown in Figure 3, a long focusing lens 4 made of resin is placed on the surface, and the light from the irradiated object II is focused 1. Tebi @S

It is convenient to improve WI & skin.

The embodiment shown in FIG. 1 has a 111 structure with miosis on both sides along the row direction of the electrodes 2A and 2iB and the winter membrane portion 3A.

Chick 4 diagram, IES diagram #IC implementation example <ti, electrode mA
Pull out 0mB from both sides of #w3^ in the column direction and place it, then add the HI configuration to X+. The embodiments shown in FIGS. 1-1 and 1-1 have upper and lower kwL poles 2A and 2B of each membrane portion 3A, and have a boat I11 configuration. In this case the top electrode! A is translucent and overflowing - IIX is overflowing with despair.

Figure 111E8 shows the resistance value of the nasal membrane 113A! I am amazed at the example circuit diagram that is being published one after another. Connect the IK series circuit in which the negative arm resistance 5 is connected in 1σ series to the 3A#IC series in parallel to the power supply terminal 6. The connection point between the mulberry film portion 3A and the load resistor 5 is connected to a switching circuit. Crying φ times#'y
I gave Rich Bar V Suwo to KLA.

The potential of the bonding point is given at φ times g), where 3
I remember it. The potential at the connection point causes a current to flow through the membrane portion 3A, which in turn enters Ill#sA and is proportional to the current of the current -gK+f. Reply 4-@#ya memorizes the meeting signal as an analog V
The data is transferred to each sector VH of the software register J8. After that, Keiage V! The analog quantity is sent out as an output from the output terminal GfIh sequentially by the V top pass, and this output is proportional to the brightness of the light, which is proportional to the brightness of the light. stomach. Furthermore, the reading device of this invention can be combined with a printing device so that
He is extremely brave in order to make W a JII. In the case of i, it is preferable to make the arrangement density of the membrane part 3^ equal to the printing dot density of the printing device.In particular, when the printing device is used as a thermal head, the dot density should be set equal to the arrangement density of the film part 3^. Since the configuration is almost at the threshold level, I am thinking of using Therma KF@Y41 head Yoshiharu Kado and 2□ as a printing device this evening.

As described in detail above, according to the present invention, a plurality of light receiving elements are arranged side by side as in the conventional case. -If compared to a t-x reader, its reading resolution can be improved to far more than 1,000 fl oz, and it can produce the same effect as a stone or a sparrow.

[Brief explanation of drawings]

The first factor is a plan view showing an embodiment of the invention, the filler drawing is a sectional view of the same, and FIG. 3 is a front view showing how it can be implemented. No. 415 is a plan view showing another embodiment of this invention, FIG. 5 is a front view of the same, and FIG. 6 is 11! of this invention! 1 is a plan view showing another embodiment, FIG. 1 is a sectional view, and the inset is a circuit diagram for reading. 1-----group 11t, lA, 2B----4w7A
, 3A, ,, - Bo S1 No. Fun's calyx

Claims (1)

[Claims] A plurality of membrane parts made of polysilicon pancreas, which produce a photovoltaic effect by the irradiation MK at the end of 111, are formed at minute intervals on the surface of the substrate, and a plurality of them are arranged along one row of the substrate. (2) Place the electrodes on the image side of the # section along the row of the # section. An electro-electro-optical reading device according to claim 1. (3) The electro-electro-optical reading device according to claim 1q/i, wherein the W poles are installed on both sides of the membrane part along one direction perpendicular to the membrane row. (4) The electrodes are installed at 11i@ of the membrane part along the vertical direction of the m part with d in between, and the electrode on the top surface is used as a floating electrode.
& Therefore, the t-point reading device according to claim 1.