JPS5872059A - 半導体装置、流量計及びその製造方法 - Google Patents

半導体装置、流量計及びその製造方法

Info

Publication number
JPS5872059A
JPS5872059A JP57176473A JP17647382A JPS5872059A JP S5872059 A JPS5872059 A JP S5872059A JP 57176473 A JP57176473 A JP 57176473A JP 17647382 A JP17647382 A JP 17647382A JP S5872059 A JPS5872059 A JP S5872059A
Authority
JP
Japan
Prior art keywords
semiconductor device
semiconductor
item
predetermined
semiconductor substrate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP57176473A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0352028B2 (OSRAM
Inventor
ロバ−ト・イ−・ヒガシ
ロバ−ト・ジ−・ジヨンソン
ウルリツチ・ボン
ジヨン・ピ−・サムナ−
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Honeywell Inc
Original Assignee
Honeywell Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Honeywell Inc filed Critical Honeywell Inc
Publication of JPS5872059A publication Critical patent/JPS5872059A/ja
Publication of JPH0352028B2 publication Critical patent/JPH0352028B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Indicating Or Recording The Presence, Absence, Or Direction Of Movement (AREA)
  • Transmission And Conversion Of Sensor Element Output (AREA)
  • Investigating Or Analyzing Materials By The Use Of Fluid Adsorption Or Reactions (AREA)
  • Semiconductor Integrated Circuits (AREA)
JP57176473A 1981-10-09 1982-10-08 半導体装置、流量計及びその製造方法 Granted JPS5872059A (ja)

Applications Claiming Priority (7)

Application Number Priority Date Filing Date Title
US31026181A 1981-10-09 1981-10-09
US310264 1981-10-09
US310345 1981-10-09
US310261 1981-10-09
US310263 1981-10-09
US310262 1981-10-09
US310344 1981-10-09

Related Child Applications (3)

Application Number Title Priority Date Filing Date
JP19123589A Division JPH0361830A (ja) 1989-07-24 1989-07-24 圧力センサ
JP2264897A Division JP2547356B2 (ja) 1981-10-09 1990-10-02 センサ
JP6176190A Division JP2553022B2 (ja) 1981-10-09 1994-07-06 半導体装置およびその製造方法

Publications (2)

Publication Number Publication Date
JPS5872059A true JPS5872059A (ja) 1983-04-28
JPH0352028B2 JPH0352028B2 (OSRAM) 1991-08-08

Family

ID=23201691

Family Applications (1)

Application Number Title Priority Date Filing Date
JP57176473A Granted JPS5872059A (ja) 1981-10-09 1982-10-08 半導体装置、流量計及びその製造方法

Country Status (1)

Country Link
JP (1) JPS5872059A (OSRAM)

Cited By (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6050419A (ja) * 1983-08-26 1985-03-20 イノバス サ−マル質量流量計
JPS6188532A (ja) * 1984-10-01 1986-05-06 ハネウエル・インコーポレーテツド 集積半導体デバイスとその製造方法
JPS62203051A (ja) * 1986-03-01 1987-09-07 Ricoh Seiki Kk ガス検出装置
JPS62282270A (ja) * 1986-01-07 1987-12-08 ソ−ン　イ−エムアイ　ピ−エルシ− 流れ感知装置
JPS63145954A (ja) * 1986-07-29 1988-06-18 Sharp Corp 感湿素子
JPH04295768A (ja) * 1991-03-25 1992-10-20 Yamatake Honeywell Co Ltd 流体検出装置
JPH04295767A (ja) * 1991-03-25 1992-10-20 Yamatake Honeywell Co Ltd 流体検出装置
US6591683B1 (en) 2000-07-13 2003-07-15 Mitsubishi Denki Kabushiki Kaisha Pressure sensor
US6619130B1 (en) 2000-07-31 2003-09-16 Mitsubishi Denki Kabushiki Kaisha Pressure sensor

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0894561A (ja) * 1994-09-26 1996-04-12 Fuji Electric Co Ltd ガスセンサおよびその製造方法

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS49113665A (OSRAM) * 1973-02-07 1974-10-30
JPS5618381A (en) * 1979-07-25 1981-02-21 Ricoh Kk Electric heater

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS49113665A (OSRAM) * 1973-02-07 1974-10-30
JPS5618381A (en) * 1979-07-25 1981-02-21 Ricoh Kk Electric heater

Cited By (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6050419A (ja) * 1983-08-26 1985-03-20 イノバス サ−マル質量流量計
JPS6188532A (ja) * 1984-10-01 1986-05-06 ハネウエル・インコーポレーテツド 集積半導体デバイスとその製造方法
JPS62282270A (ja) * 1986-01-07 1987-12-08 ソ−ン　イ−エムアイ　ピ−エルシ− 流れ感知装置
JPS62203051A (ja) * 1986-03-01 1987-09-07 Ricoh Seiki Kk ガス検出装置
JPS63145954A (ja) * 1986-07-29 1988-06-18 Sharp Corp 感湿素子
JPH04295768A (ja) * 1991-03-25 1992-10-20 Yamatake Honeywell Co Ltd 流体検出装置
JPH04295767A (ja) * 1991-03-25 1992-10-20 Yamatake Honeywell Co Ltd 流体検出装置
US6591683B1 (en) 2000-07-13 2003-07-15 Mitsubishi Denki Kabushiki Kaisha Pressure sensor
US6619130B1 (en) 2000-07-31 2003-09-16 Mitsubishi Denki Kabushiki Kaisha Pressure sensor

Also Published As

Publication number Publication date
JPH0352028B2 (OSRAM) 1991-08-08

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