JPS5870106A - エツジ位置検出装置 - Google Patents

エツジ位置検出装置

Info

Publication number
JPS5870106A
JPS5870106A JP16916481A JP16916481A JPS5870106A JP S5870106 A JPS5870106 A JP S5870106A JP 16916481 A JP16916481 A JP 16916481A JP 16916481 A JP16916481 A JP 16916481A JP S5870106 A JPS5870106 A JP S5870106A
Authority
JP
Japan
Prior art keywords
transducer
electrodes
edge position
photocurrent
plate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP16916481A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0427481B2 (esLanguage
Inventor
Makoto Fukuda
真 福田
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NTT Inc
Original Assignee
Nippon Telegraph and Telephone Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nippon Telegraph and Telephone Corp filed Critical Nippon Telegraph and Telephone Corp
Priority to JP16916481A priority Critical patent/JPS5870106A/ja
Publication of JPS5870106A publication Critical patent/JPS5870106A/ja
Publication of JPH0427481B2 publication Critical patent/JPH0427481B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
    • G01B11/028—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness by measuring lateral position of a boundary of the object

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optical Transform (AREA)
  • Length Measuring Devices By Optical Means (AREA)
JP16916481A 1981-10-22 1981-10-22 エツジ位置検出装置 Granted JPS5870106A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP16916481A JPS5870106A (ja) 1981-10-22 1981-10-22 エツジ位置検出装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP16916481A JPS5870106A (ja) 1981-10-22 1981-10-22 エツジ位置検出装置

Publications (2)

Publication Number Publication Date
JPS5870106A true JPS5870106A (ja) 1983-04-26
JPH0427481B2 JPH0427481B2 (esLanguage) 1992-05-12

Family

ID=15881449

Family Applications (1)

Application Number Title Priority Date Filing Date
JP16916481A Granted JPS5870106A (ja) 1981-10-22 1981-10-22 エツジ位置検出装置

Country Status (1)

Country Link
JP (1) JPS5870106A (esLanguage)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH03210421A (ja) * 1990-01-12 1991-09-13 Nippon Hoso Kyokai <Nhk> 位置検出装置

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH03210421A (ja) * 1990-01-12 1991-09-13 Nippon Hoso Kyokai <Nhk> 位置検出装置

Also Published As

Publication number Publication date
JPH0427481B2 (esLanguage) 1992-05-12

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