JPS5866832A - 差圧測定装置 - Google Patents

差圧測定装置

Info

Publication number
JPS5866832A
JPS5866832A JP16627081A JP16627081A JPS5866832A JP S5866832 A JPS5866832 A JP S5866832A JP 16627081 A JP16627081 A JP 16627081A JP 16627081 A JP16627081 A JP 16627081A JP S5866832 A JPS5866832 A JP S5866832A
Authority
JP
Japan
Prior art keywords
bellows
fixed
shaped
movable electrode
span
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP16627081A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6261898B2 (enrdf_load_stackoverflow
Inventor
Tadashi Nishihara
正 西原
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Yokogawa Electric Corp
Original Assignee
Yokogawa Electric Corp
Yokogawa Hokushin Electric Corp
Yokogawa Electric Works Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Yokogawa Electric Corp, Yokogawa Hokushin Electric Corp, Yokogawa Electric Works Ltd filed Critical Yokogawa Electric Corp
Priority to JP16627081A priority Critical patent/JPS5866832A/ja
Publication of JPS5866832A publication Critical patent/JPS5866832A/ja
Publication of JPS6261898B2 publication Critical patent/JPS6261898B2/ja
Granted legal-status Critical Current

Links

Classifications

    • GPHYSICS
    • G01MEASURING; TESTING
    • G01LMEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/0033Transmitting or indicating the displacement of bellows by electric, electromechanical, magnetic, or electromagnetic means
    • G01L9/0038Transmitting or indicating the displacement of bellows by electric, electromechanical, magnetic, or electromagnetic means using variations in capacitance

Landscapes

  • Physics & Mathematics (AREA)
  • Electromagnetism (AREA)
  • General Physics & Mathematics (AREA)
  • Measuring Fluid Pressure (AREA)
JP16627081A 1981-10-16 1981-10-16 差圧測定装置 Granted JPS5866832A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP16627081A JPS5866832A (ja) 1981-10-16 1981-10-16 差圧測定装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP16627081A JPS5866832A (ja) 1981-10-16 1981-10-16 差圧測定装置

Publications (2)

Publication Number Publication Date
JPS5866832A true JPS5866832A (ja) 1983-04-21
JPS6261898B2 JPS6261898B2 (enrdf_load_stackoverflow) 1987-12-23

Family

ID=15828264

Family Applications (1)

Application Number Title Priority Date Filing Date
JP16627081A Granted JPS5866832A (ja) 1981-10-16 1981-10-16 差圧測定装置

Country Status (1)

Country Link
JP (1) JPS5866832A (enrdf_load_stackoverflow)

Also Published As

Publication number Publication date
JPS6261898B2 (enrdf_load_stackoverflow) 1987-12-23

Similar Documents

Publication Publication Date Title
US4287553A (en) Capacitive pressure transducer
US4084438A (en) Capacitive pressure sensing device
US6205861B1 (en) Transducer having temperature compensation
US4168518A (en) Capacitor transducer
US4072058A (en) Differential pressure transmitter with pressure sensor protection
EP0211519A2 (en) Capacitive differential pressure transducer
JP2840390B2 (ja) 圧力トランスジューサ
US4173149A (en) Differential pressure sensing devices
WO1999028721A9 (en) Pressure transducer housing with barometric pressure isolation
JPH0375537A (ja) 感圧要素
JPS5921497B2 (ja) 圧力測定装置
JPS5866832A (ja) 差圧測定装置
JPS5855833A (ja) 差圧測定装置
US5902932A (en) Force balancing capacitance manometer
JPS5863829A (ja) 差圧測定装置
JPS586901B2 (ja) サアツオウドウソウチ
JPS5879128A (ja) 差圧測定装置
JP3544602B2 (ja) 隔膜型圧力センサ
JPS5855834A (ja) 差圧測定装置
JPS5863828A (ja) 差圧測定装置
JPS5850300Y2 (ja) 圧力伝送器
JPH0515071Y2 (enrdf_load_stackoverflow)
JPS5813728Y2 (ja) 圧力伝送器
JPS6140054B2 (enrdf_load_stackoverflow)
JPH01127932A (ja) 静電容量形差圧測定装置