JPS5866637U - 薄膜形成装置に於ける自公転偏角治具装置 - Google Patents

薄膜形成装置に於ける自公転偏角治具装置

Info

Publication number
JPS5866637U
JPS5866637U JP16029181U JP16029181U JPS5866637U JP S5866637 U JPS5866637 U JP S5866637U JP 16029181 U JP16029181 U JP 16029181U JP 16029181 U JP16029181 U JP 16029181U JP S5866637 U JPS5866637 U JP S5866637U
Authority
JP
Japan
Prior art keywords
rotation
work holder
declination
revolution
thin film
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP16029181U
Other languages
English (en)
Japanese (ja)
Other versions
JPH02908Y2 (enrdf_load_stackoverflow
Inventor
高石　幸一郎
名和　浩之
Original Assignee
日本真空技術株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 日本真空技術株式会社 filed Critical 日本真空技術株式会社
Priority to JP16029181U priority Critical patent/JPS5866637U/ja
Publication of JPS5866637U publication Critical patent/JPS5866637U/ja
Application granted granted Critical
Publication of JPH02908Y2 publication Critical patent/JPH02908Y2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
  • Electrodes Of Semiconductors (AREA)
  • Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
JP16029181U 1981-10-29 1981-10-29 薄膜形成装置に於ける自公転偏角治具装置 Granted JPS5866637U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP16029181U JPS5866637U (ja) 1981-10-29 1981-10-29 薄膜形成装置に於ける自公転偏角治具装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP16029181U JPS5866637U (ja) 1981-10-29 1981-10-29 薄膜形成装置に於ける自公転偏角治具装置

Publications (2)

Publication Number Publication Date
JPS5866637U true JPS5866637U (ja) 1983-05-06
JPH02908Y2 JPH02908Y2 (enrdf_load_stackoverflow) 1990-01-10

Family

ID=29952705

Family Applications (1)

Application Number Title Priority Date Filing Date
JP16029181U Granted JPS5866637U (ja) 1981-10-29 1981-10-29 薄膜形成装置に於ける自公転偏角治具装置

Country Status (1)

Country Link
JP (1) JPS5866637U (enrdf_load_stackoverflow)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59232434A (ja) * 1983-06-16 1984-12-27 Nippon Telegr & Teleph Corp <Ntt> 真空処理装置に於けるワ−ク回転装置

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5545209U (enrdf_load_stackoverflow) * 1978-09-14 1980-03-25
JPS5770274A (en) * 1980-10-17 1982-04-30 Fujitsu Ltd Vapor deposition apparatus

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5545209U (enrdf_load_stackoverflow) * 1978-09-14 1980-03-25
JPS5770274A (en) * 1980-10-17 1982-04-30 Fujitsu Ltd Vapor deposition apparatus

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59232434A (ja) * 1983-06-16 1984-12-27 Nippon Telegr & Teleph Corp <Ntt> 真空処理装置に於けるワ−ク回転装置

Also Published As

Publication number Publication date
JPH02908Y2 (enrdf_load_stackoverflow) 1990-01-10

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