JPS5862547A - 欠点検出装置 - Google Patents
欠点検出装置Info
- Publication number
- JPS5862547A JPS5862547A JP16185881A JP16185881A JPS5862547A JP S5862547 A JPS5862547 A JP S5862547A JP 16185881 A JP16185881 A JP 16185881A JP 16185881 A JP16185881 A JP 16185881A JP S5862547 A JPS5862547 A JP S5862547A
- Authority
- JP
- Japan
- Prior art keywords
- signal
- level
- counter
- output
- scanning
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 230000007547 defect Effects 0.000 title claims abstract description 32
- 238000001514 detection method Methods 0.000 claims abstract description 10
- 238000003384 imaging method Methods 0.000 claims description 6
- 230000003247 decreasing effect Effects 0.000 abstract 1
- 230000006641 stabilisation Effects 0.000 abstract 1
- 238000011105 stabilization Methods 0.000 abstract 1
- 239000003990 capacitor Substances 0.000 description 6
- 238000010586 diagram Methods 0.000 description 5
- 230000007423 decrease Effects 0.000 description 4
- 238000000034 method Methods 0.000 description 4
- 241000219112 Cucumis Species 0.000 description 1
- 235000015510 Cucumis melo subsp melo Nutrition 0.000 description 1
- FJJCIZWZNKZHII-UHFFFAOYSA-N [4,6-bis(cyanoamino)-1,3,5-triazin-2-yl]cyanamide Chemical compound N#CNC1=NC(NC#N)=NC(NC#N)=N1 FJJCIZWZNKZHII-UHFFFAOYSA-N 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 238000007599 discharging Methods 0.000 description 1
- 239000003292 glue Substances 0.000 description 1
- 230000010354 integration Effects 0.000 description 1
- 239000002244 precipitate Substances 0.000 description 1
- 230000002265 prevention Effects 0.000 description 1
- 239000000047 product Substances 0.000 description 1
- 230000004044 response Effects 0.000 description 1
- 230000000630 rising effect Effects 0.000 description 1
- 239000000523 sample Substances 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 210000002784 stomach Anatomy 0.000 description 1
- 230000001360 synchronised effect Effects 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/93—Detection standards; Calibrating baseline adjustment, drift correction
Landscapes
- Physics & Mathematics (AREA)
- Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
- General Physics & Mathematics (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16185881A JPS5862547A (ja) | 1981-10-09 | 1981-10-09 | 欠点検出装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16185881A JPS5862547A (ja) | 1981-10-09 | 1981-10-09 | 欠点検出装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5862547A true JPS5862547A (ja) | 1983-04-14 |
| JPH0350216B2 JPH0350216B2 (enrdf_load_stackoverflow) | 1991-08-01 |
Family
ID=15743289
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP16185881A Granted JPS5862547A (ja) | 1981-10-09 | 1981-10-09 | 欠点検出装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5862547A (enrdf_load_stackoverflow) |
-
1981
- 1981-10-09 JP JP16185881A patent/JPS5862547A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0350216B2 (enrdf_load_stackoverflow) | 1991-08-01 |
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