JPS5861816A - 高純度ガス精製装置の再生方法 - Google Patents
高純度ガス精製装置の再生方法Info
- Publication number
- JPS5861816A JPS5861816A JP56161202A JP16120281A JPS5861816A JP S5861816 A JPS5861816 A JP S5861816A JP 56161202 A JP56161202 A JP 56161202A JP 16120281 A JP16120281 A JP 16120281A JP S5861816 A JPS5861816 A JP S5861816A
- Authority
- JP
- Japan
- Prior art keywords
- gas
- temperature
- cylinder
- low
- heat exchanger
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 230000001172 regenerating effect Effects 0.000 title claims abstract description 16
- 238000000034 method Methods 0.000 title claims description 13
- 238000007670 refining Methods 0.000 title abstract description 7
- 239000007789 gas Substances 0.000 claims abstract description 119
- 238000001179 sorption measurement Methods 0.000 claims abstract description 68
- 238000011069 regeneration method Methods 0.000 claims abstract description 31
- 230000008929 regeneration Effects 0.000 claims abstract description 28
- 238000010438 heat treatment Methods 0.000 claims abstract description 16
- 239000003507 refrigerant Substances 0.000 claims abstract description 12
- 238000000746 purification Methods 0.000 claims description 30
- 239000003463 adsorbent Substances 0.000 claims description 19
- 239000012535 impurity Substances 0.000 claims description 9
- CURLTUGMZLYLDI-UHFFFAOYSA-N Carbon dioxide Chemical compound O=C=O CURLTUGMZLYLDI-UHFFFAOYSA-N 0.000 claims description 8
- 238000004781 supercooling Methods 0.000 claims description 7
- 239000011261 inert gas Substances 0.000 claims description 6
- 229910002092 carbon dioxide Inorganic materials 0.000 claims description 3
- 239000001569 carbon dioxide Substances 0.000 claims description 3
- 239000002994 raw material Substances 0.000 claims description 3
- 238000009413 insulation Methods 0.000 claims description 2
- 239000003795 chemical substances by application Substances 0.000 claims 1
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 abstract description 43
- 229910052757 nitrogen Inorganic materials 0.000 abstract description 16
- 229910001873 dinitrogen Inorganic materials 0.000 description 11
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 description 6
- 239000001307 helium Substances 0.000 description 4
- 229910052734 helium Inorganic materials 0.000 description 4
- SWQJXJOGLNCZEY-UHFFFAOYSA-N helium atom Chemical compound [He] SWQJXJOGLNCZEY-UHFFFAOYSA-N 0.000 description 4
- VNWKTOKETHGBQD-UHFFFAOYSA-N methane Chemical compound C VNWKTOKETHGBQD-UHFFFAOYSA-N 0.000 description 4
- 229910052760 oxygen Inorganic materials 0.000 description 3
- 238000010926 purge Methods 0.000 description 3
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 2
- 229910002090 carbon oxide Inorganic materials 0.000 description 2
- 230000003247 decreasing effect Effects 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 239000001301 oxygen Substances 0.000 description 2
- 241000218691 Cupressaceae Species 0.000 description 1
- NINIDFKCEFEMDL-UHFFFAOYSA-N Sulfur Chemical compound [S] NINIDFKCEFEMDL-UHFFFAOYSA-N 0.000 description 1
- 239000002250 absorbent Substances 0.000 description 1
- 230000002745 absorbent Effects 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 239000002826 coolant Substances 0.000 description 1
- 238000001816 cooling Methods 0.000 description 1
- 239000000112 cooling gas Substances 0.000 description 1
- 239000013078 crystal Substances 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000002474 experimental method Methods 0.000 description 1
- 239000012530 fluid Substances 0.000 description 1
- 239000001257 hydrogen Substances 0.000 description 1
- 229910052739 hydrogen Inorganic materials 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 238000004064 recycling Methods 0.000 description 1
- 229910052717 sulfur Inorganic materials 0.000 description 1
- 239000011593 sulfur Substances 0.000 description 1
Classifications
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02C—CAPTURE, STORAGE, SEQUESTRATION OR DISPOSAL OF GREENHOUSE GASES [GHG]
- Y02C20/00—Capture or disposal of greenhouse gases
- Y02C20/40—Capture or disposal of greenhouse gases of CO2
Landscapes
- Separation Of Gases By Adsorption (AREA)
- Separation By Low-Temperature Treatments (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP56161202A JPS5861816A (ja) | 1981-10-09 | 1981-10-09 | 高純度ガス精製装置の再生方法 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP56161202A JPS5861816A (ja) | 1981-10-09 | 1981-10-09 | 高純度ガス精製装置の再生方法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5861816A true JPS5861816A (ja) | 1983-04-13 |
| JPS6156009B2 JPS6156009B2 (enrdf_load_stackoverflow) | 1986-12-01 |
Family
ID=15730530
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP56161202A Granted JPS5861816A (ja) | 1981-10-09 | 1981-10-09 | 高純度ガス精製装置の再生方法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5861816A (enrdf_load_stackoverflow) |
Cited By (13)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6182822A (ja) * | 1984-09-27 | 1986-04-26 | Toshiba Corp | ガス精製装置 |
| JPH0356624U (enrdf_load_stackoverflow) * | 1989-09-29 | 1991-05-30 | ||
| USD936244S1 (en) | 2017-11-17 | 2021-11-16 | 2724889 Ontario Inc. | Connector for modular structure |
| USD936246S1 (en) | 2020-08-12 | 2021-11-16 | 2724889 Ontario Inc. | Connector for a modular structure |
| USD936247S1 (en) | 2020-08-12 | 2021-11-16 | 2724889 Ontario Inc. | Connector for a modular structure |
| USD938068S1 (en) | 2020-08-12 | 2021-12-07 | 2724889 Ontario Inc. | Connector for a modular structure |
| USD938772S1 (en) | 2020-02-04 | 2021-12-21 | 2724889 Ontario Inc. | Connector |
| USD938770S1 (en) | 2020-02-04 | 2021-12-21 | 2724889 Ontario Inc. | Connector |
| USD938771S1 (en) | 2020-02-04 | 2021-12-21 | 2724889 Ontario Inc. | Connector |
| USD939106S1 (en) | 2020-08-12 | 2021-12-21 | 2724889 Ontario Inc. | Connector for a modular structure |
| USD939731S1 (en) | 2020-08-12 | 2021-12-28 | 2724889 Ontario Inc. | Connector for a modular structure |
| JP2022070440A (ja) * | 2020-10-27 | 2022-05-13 | 大陽日酸株式会社 | ガス精製装置及びガス精製方法 |
| US11828056B2 (en) | 2017-02-21 | 2023-11-28 | 2724889 Ontario Inc. | Modular furniture system |
-
1981
- 1981-10-09 JP JP56161202A patent/JPS5861816A/ja active Granted
Cited By (16)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6182822A (ja) * | 1984-09-27 | 1986-04-26 | Toshiba Corp | ガス精製装置 |
| JPH0356624U (enrdf_load_stackoverflow) * | 1989-09-29 | 1991-05-30 | ||
| US11828056B2 (en) | 2017-02-21 | 2023-11-28 | 2724889 Ontario Inc. | Modular furniture system |
| USD936244S1 (en) | 2017-11-17 | 2021-11-16 | 2724889 Ontario Inc. | Connector for modular structure |
| USD936860S1 (en) | 2017-11-17 | 2021-11-23 | 2724889 Ontario Inc. | Connector for a modular structure |
| USD937444S1 (en) | 2017-11-17 | 2021-11-30 | 2724889 Ontario Inc. | Connector for modular structure |
| USD938770S1 (en) | 2020-02-04 | 2021-12-21 | 2724889 Ontario Inc. | Connector |
| USD938771S1 (en) | 2020-02-04 | 2021-12-21 | 2724889 Ontario Inc. | Connector |
| USD938772S1 (en) | 2020-02-04 | 2021-12-21 | 2724889 Ontario Inc. | Connector |
| USD936247S1 (en) | 2020-08-12 | 2021-11-16 | 2724889 Ontario Inc. | Connector for a modular structure |
| USD938068S1 (en) | 2020-08-12 | 2021-12-07 | 2724889 Ontario Inc. | Connector for a modular structure |
| USD939106S1 (en) | 2020-08-12 | 2021-12-21 | 2724889 Ontario Inc. | Connector for a modular structure |
| USD939731S1 (en) | 2020-08-12 | 2021-12-28 | 2724889 Ontario Inc. | Connector for a modular structure |
| USD968656S1 (en) | 2020-08-12 | 2022-11-01 | 2724889 Ontario Inc. | Connector for a modular structure |
| USD936246S1 (en) | 2020-08-12 | 2021-11-16 | 2724889 Ontario Inc. | Connector for a modular structure |
| JP2022070440A (ja) * | 2020-10-27 | 2022-05-13 | 大陽日酸株式会社 | ガス精製装置及びガス精製方法 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6156009B2 (enrdf_load_stackoverflow) | 1986-12-01 |
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