JPS6244973Y2 - - Google Patents

Info

Publication number
JPS6244973Y2
JPS6244973Y2 JP1982071207U JP7120782U JPS6244973Y2 JP S6244973 Y2 JPS6244973 Y2 JP S6244973Y2 JP 1982071207 U JP1982071207 U JP 1982071207U JP 7120782 U JP7120782 U JP 7120782U JP S6244973 Y2 JPS6244973 Y2 JP S6244973Y2
Authority
JP
Japan
Prior art keywords
hydrogen gas
metal hydride
valve
adsorption
hydrogen
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP1982071207U
Other languages
English (en)
Japanese (ja)
Other versions
JPS58172432U (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP7120782U priority Critical patent/JPS58172432U/ja
Publication of JPS58172432U publication Critical patent/JPS58172432U/ja
Application granted granted Critical
Publication of JPS6244973Y2 publication Critical patent/JPS6244973Y2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Separation Of Gases By Adsorption (AREA)
  • Hydrogen, Water And Hydrids (AREA)
JP7120782U 1982-05-14 1982-05-14 水素ガス精製装置 Granted JPS58172432U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP7120782U JPS58172432U (ja) 1982-05-14 1982-05-14 水素ガス精製装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP7120782U JPS58172432U (ja) 1982-05-14 1982-05-14 水素ガス精製装置

Publications (2)

Publication Number Publication Date
JPS58172432U JPS58172432U (ja) 1983-11-17
JPS6244973Y2 true JPS6244973Y2 (enrdf_load_stackoverflow) 1987-11-30

Family

ID=30080836

Family Applications (1)

Application Number Title Priority Date Filing Date
JP7120782U Granted JPS58172432U (ja) 1982-05-14 1982-05-14 水素ガス精製装置

Country Status (1)

Country Link
JP (1) JPS58172432U (enrdf_load_stackoverflow)

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS52131367A (en) * 1976-04-28 1977-11-04 Hitachi Ltd Quantitatively conveying type damper device

Also Published As

Publication number Publication date
JPS58172432U (ja) 1983-11-17

Similar Documents

Publication Publication Date Title
US4444727A (en) Hydrogen gas purification apparatus
US3996028A (en) Process for purification of argon from oxygen
US3103425A (en) Adsorption apparatus and method
US4030896A (en) Regeneration of adsorbents
US5689974A (en) Method and apparatus for pre-purification for air cryogenic separation plant
JPS61268336A (ja) 不活性ガス流を精製するための方法
JP2000317244A (ja) ガス精製方法及び装置
CN102602899B (zh) 氦气的纯化方法及纯化装置
CN102311103B (zh) 氦气的纯化方法及纯化装置
JP2000233909A (ja) 単結晶製造炉からの排ガスアルゴンの精製方法
CN102311102B (zh) 氦气的纯化方法及纯化装置
KR20060023461A (ko) 폐헬륨가스의 정제 방법과 장치
JPH0565206B2 (enrdf_load_stackoverflow)
JPS6156009B2 (enrdf_load_stackoverflow)
GB2281229A (en) An adsorber vessel
KR101720799B1 (ko) 아르곤 가스의 정제 방법 및 정제 장치
JPS6244973Y2 (enrdf_load_stackoverflow)
JPH01126203A (ja) 高純度水素ガスの製造方法
JP2960992B2 (ja) 水素同位体の分離方法
JPH04371209A (ja) 圧力差再生方式吸着塔の再生法
JPS5953202B2 (ja) 水素ガス精製装置
JPS60231402A (ja) Ｃａ−Νａ−Ａ，Νａ−Ｘ−Ａｌ↓２Ｏ↓３を使つたΝ↓２吸着塔による酸素製造方法
JPH1015331A (ja) 加熱再生式圧力スイング吸着方法
JPH01270923A (ja) サーマルスイング式吸着装置
SU944621A1 (ru) Устройство дл очистки водорода