JPS5858448A - 欠点検出回路 - Google Patents
欠点検出回路Info
- Publication number
- JPS5858448A JPS5858448A JP15718981A JP15718981A JPS5858448A JP S5858448 A JPS5858448 A JP S5858448A JP 15718981 A JP15718981 A JP 15718981A JP 15718981 A JP15718981 A JP 15718981A JP S5858448 A JPS5858448 A JP S5858448A
- Authority
- JP
- Japan
- Prior art keywords
- signal
- level
- defect
- counter
- output
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 230000007547 defect Effects 0.000 title claims abstract description 45
- 238000001514 detection method Methods 0.000 claims abstract description 13
- 238000003384 imaging method Methods 0.000 claims description 5
- 230000002238 attenuated effect Effects 0.000 claims 1
- 230000002401 inhibitory effect Effects 0.000 abstract 1
- 239000003990 capacitor Substances 0.000 description 11
- 238000010586 diagram Methods 0.000 description 8
- 230000007423 decrease Effects 0.000 description 6
- 238000007599 discharging Methods 0.000 description 3
- 230000003247 decreasing effect Effects 0.000 description 2
- 238000007689 inspection Methods 0.000 description 2
- 230000002950 deficient Effects 0.000 description 1
- 230000007257 malfunction Effects 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 230000001360 synchronised effect Effects 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/93—Detection standards; Calibrating baseline adjustment, drift correction
Landscapes
- Physics & Mathematics (AREA)
- Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
- General Physics & Mathematics (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15718981A JPS5858448A (ja) | 1981-10-02 | 1981-10-02 | 欠点検出回路 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15718981A JPS5858448A (ja) | 1981-10-02 | 1981-10-02 | 欠点検出回路 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5858448A true JPS5858448A (ja) | 1983-04-07 |
| JPH0325741B2 JPH0325741B2 (enrdf_load_stackoverflow) | 1991-04-08 |
Family
ID=15644140
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP15718981A Granted JPS5858448A (ja) | 1981-10-02 | 1981-10-02 | 欠点検出回路 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5858448A (enrdf_load_stackoverflow) |
-
1981
- 1981-10-02 JP JP15718981A patent/JPS5858448A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0325741B2 (enrdf_load_stackoverflow) | 1991-04-08 |